Tsay; Jeng-Yann

Patent Applications and Registrations

Patent applications and USPTO patent grants for Tsay; Jeng-Yann.The latest application filed is for "laser source device, extreme ultraviolet lithography device and method".

Company Profile

2.7.7

Tsay; Jeng-Yann - Tainan TW
TSAY; Jeng-Yann - Tainan City TW

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
EUV light source and apparatus for lithography Grant 11,226,564 - Yeh , et al. January 18, 2	2022-01-18
Laser source device, extreme ultraviolet lithography device and method Grant 11,158,989 - Tong , et al. October 26, 2	2021-10-26
Laser Source Device, Extreme Ultraviolet Lithography Device And Method App 20200245443 - Kind Code	2020-07-30
Laser source device and extreme ultraviolet lithography device Grant 10,624,196 - Tong , et al.	2020-04-14
Laser Source Device And Extreme Ultraviolet Lithography Device App 20200107428 - TONG; Henry Yee-Shian ; et al.	2020-04-02
Euv Light Source And Apparatus For Lithography App 20200004159 - YEH; Jhan-Hong ; et al.	2020-01-02
Method for sealing processing module Grant 9,970,105 - Chen , et al. May 15, 2	2018-05-15
Method For Sealing Processing Module App 20150179456 - CHEN; Chun-Ta ; et al.	2015-06-25
System for decharging a wafer or substrate after dechucking from an electrostatic chuck Grant 8,149,562 - Hsu , et al. April 3, 2	2012-04-03
System For Decharging A Wafer Or Substrate After Dechucking From An Electrostatic Chuck App 20080218931 - Hsu; Yen-Hsiang ; et al.	2008-09-11
Gas flow control system with interlock Grant 7,354,555 - Yen , et al. April 8, 2	2008-04-08
Ultrasonic wafer blade vibration detecting Grant 6,708,565 - Lin , et al. March 23, 2	2004-03-23
Gas flow control system with interlock App 20030211015 - Yen, Chih-Pen ; et al.	2003-11-13
Ultrasonic wafer blade vibration detection App 20030200808 - Lin, Chein-Fang ; et al.	2003-10-30

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