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Patent applications and USPTO patent grants for Tsay; Jeng-Yann.The latest application filed is for "laser source device, extreme ultraviolet lithography device and method".
Patent | Date |
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EUV light source and apparatus for lithography Grant 11,226,564 - Yeh , et al. January 18, 2 | 2022-01-18 |
Laser source device, extreme ultraviolet lithography device and method Grant 11,158,989 - Tong , et al. October 26, 2 | 2021-10-26 |
Laser Source Device, Extreme Ultraviolet Lithography Device And Method App 20200245443 - Kind Code | 2020-07-30 |
Laser source device and extreme ultraviolet lithography device Grant 10,624,196 - Tong , et al. | 2020-04-14 |
Laser Source Device And Extreme Ultraviolet Lithography Device App 20200107428 - TONG; Henry Yee-Shian ;   et al. | 2020-04-02 |
Euv Light Source And Apparatus For Lithography App 20200004159 - YEH; Jhan-Hong ;   et al. | 2020-01-02 |
Method for sealing processing module Grant 9,970,105 - Chen , et al. May 15, 2 | 2018-05-15 |
Method For Sealing Processing Module App 20150179456 - CHEN; Chun-Ta ;   et al. | 2015-06-25 |
System for decharging a wafer or substrate after dechucking from an electrostatic chuck Grant 8,149,562 - Hsu , et al. April 3, 2 | 2012-04-03 |
System For Decharging A Wafer Or Substrate After Dechucking From An Electrostatic Chuck App 20080218931 - Hsu; Yen-Hsiang ;   et al. | 2008-09-11 |
Gas flow control system with interlock Grant 7,354,555 - Yen , et al. April 8, 2 | 2008-04-08 |
Ultrasonic wafer blade vibration detecting Grant 6,708,565 - Lin , et al. March 23, 2 | 2004-03-23 |
Gas flow control system with interlock App 20030211015 - Yen, Chih-Pen ;   et al. | 2003-11-13 |
Ultrasonic wafer blade vibration detection App 20030200808 - Lin, Chein-Fang ;   et al. | 2003-10-30 |
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