Tsai; Yung-Li
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tsai; Yung-Li.The latest application filed is for "systems and methods for shuttered wafer cleaning".
- Tsai; Yung-Li - Houlong Town TW
- Tsai; Yung-Li - Miaoli County TW
| Patent | Date |
|---|---|
| Systems And Methods For Shuttered Wafer Cleaning App 20220262651 - Wang; Tsui-Wei ; et al. | 2022-08-18 |
| Contamination Control In Semiconductor Manufacturing Systems App 20220208581 - CHEN; Bo Chen ; et al. | 2022-06-30 |
| Systems and methods for shuttered wafer cleaning Grant 11,355,366 - Wang , et al. June 7, 2 | 2022-06-07 |
| Contamination control in semiconductor manufacturing systems Grant 11,282,728 - Chen , et al. March 22, 2 | 2022-03-22 |
| Systems and methods for dry wafer transport Grant 11,139,183 - Wang , et al. October 5, 2 | 2021-10-05 |
| Monitoring of process chamber Grant 10,943,804 - Chen , et al. March 9, 2 | 2021-03-09 |
| Systems And Methods For Shuttered Wafer Cleaning App 20200075352 - WANG; Tsui-Wei ; et al. | 2020-03-05 |
| Apparatus And Method For Wafer Cleaning App 20200055099 - CHEN; Bo Chen ; et al. | 2020-02-20 |
| Wafer Cleaning With Dynamic Contacts App 20200058521 - SHIH; Kun-Hsiung ; et al. | 2020-02-20 |
| Monitoring Of Process Chamber App 20200006101 - CHEN; Bo Chen ; et al. | 2020-01-02 |
| Contamination Control In Semiconductor Manufacturing Systems App 20200006104 - Chen; Bo Chen ; et al. | 2020-01-02 |
| Systems And Methods For Dry Wafer Transport App 20190362990 - WANG; Tsui-Wei ; et al. | 2019-11-28 |
| Method of etching and cleaning wafers Grant 9,583,352 - Tsai , et al. February 28, 2 | 2017-02-28 |
| Method Of Etching And Cleaning Wafers App 20150357198 - TSAI; Wen-Chang ; et al. | 2015-12-10 |
| Loading port, system for etching and cleaning wafers and method of use Grant 9,136,149 - Tsai , et al. September 15, 2 | 2015-09-15 |
| Loading Port, System For Etching And Cleaning Wafers And Method Of Use App 20140141541 - TSAI; Wen-Chang ; et al. | 2014-05-22 |
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