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Method For Monitoring Transport Vehicle And Maintenance Thereof
App 20220155180 - HUANG; CHUN-JUNG ; et al. | 2022-05-19 |
Method for Ion Implantation That Adjusts a Targets Tilt Angle Based on a Distribution of Ejected Ions From a Target
App 20220076958 - Huang; Chun-Jung ; et al. | 2022-03-10 |
Method for ion implantation that adjusts a target's tilt angle based on a distribution of ejected ions from a target
Grant 11,195,720 - Huang , et al. December 7, 2 | 2021-12-07 |
Ion Implantation Apparatus And Method
App 20200135470 - HUANG; Chun-Jung ; et al. | 2020-04-30 |
Method and system for tool condition monitoring based on a simulated inline measurement
Grant 10,047,439 - Tsai , et al. August 14, 2 | 2018-08-14 |
System and method for controlling ion implanter
Grant 9,870,896 - Tsai , et al. January 16, 2 | 2018-01-16 |
Qualitative fault detection and classification system for tool condition monitoring and associated methods
Grant 9,727,049 - Ho , et al. August 8, 2 | 2017-08-08 |
Systems and associated methods for tuning processing tools
Grant 9,519,285 - Tsai , et al. December 13, 2 | 2016-12-13 |
Integrated circuit manufacturing tool condition monitoring system and method
Grant 9,349,660 - Tsai , et al. May 24, 2 | 2016-05-24 |
System And Method For Controlling Ion Implanter
App 20150162166 - TSAI; Po-Feng ; et al. | 2015-06-11 |
APC model extension using existing APC models
Grant 9,026,239 - Tsai , et al. May 5, 2 | 2015-05-05 |
Tool Optimizing Tuning Systems And Associated Methods
App 20140207271 - Tsai; Po-Feng ; et al. | 2014-07-24 |
Adaptive And Automatic Determination Of System Parameters
App 20140074258 - TSAI; Po-Feng ; et al. | 2014-03-13 |
Qualitative Fault Detection And Classification System For Tool Condition Monitoring And Associated Methods
App 20140067324 - Ho; Chia-Tong ; et al. | 2014-03-06 |
Adaptive and automatic determination of system parameters
Grant 8,606,387 - Tsai , et al. December 10, 2 | 2013-12-10 |
Processing exception handling
Grant 8,549,012 - Tsai , et al. October 1, 2 | 2013-10-01 |
Method And System For Tool Condition Monitoring
App 20130150997 - Tsai; Po-Feng ; et al. | 2013-06-13 |
Integrated Circuit Manufacturing Tool Condition Monitoring System And Method
App 20130144419 - Tsai; Po-Feng ; et al. | 2013-06-06 |
System and method for implementing a virtual metrology advanced process control platform
Grant 8,437,870 - Tsai , et al. May 7, 2 | 2013-05-07 |
System and method for data mining and feature tracking for fab-wide prediction and control
Grant 8,406,912 - Chen , et al. March 26, 2 | 2013-03-26 |
System and method for implementing multi-resolution advanced process control
Grant 8,394,719 - Tsen , et al. March 12, 2 | 2013-03-12 |
Method and system for implementing virtual metrology in semiconductor fabrication
Grant 8,396,583 - Tsai , et al. March 12, 2 | 2013-03-12 |
Light Bar and Manufacturing Method Thereof
App 20130051023 - Huang; Tzu-Chien ; et al. | 2013-02-28 |
Method and apparatus for advanced process control
Grant 8,224,475 - Tsai , et al. July 17, 2 | 2012-07-17 |
Adaptive And Automatic Determination Of System Parameters
App 20120130525 - TSAI; Po-Feng ; et al. | 2012-05-24 |
System and method for implementing a wafer acceptance test ("WAT") advanced process control ("APC") with novel sampling policy and architecture
Grant 8,108,060 - Tsen , et al. January 31, 2 | 2012-01-31 |
System And Method For Data Mining And Feature Tracking For Fab-wide Prediction And Control
App 20110320026 - Chen; Jui-Long ; et al. | 2011-12-29 |
APC Model Extension Using Existing APC Models
App 20110301736 - Tsai; Po-Feng ; et al. | 2011-12-08 |
Processing Exception Handling
App 20110282885 - Tsai; Po-Feng ; et al. | 2011-11-17 |
Method And System For Implementing Virtual Metrology In Semiconductor Fabrication
App 20110238198 - Tsai; Po-Feng ; et al. | 2011-09-29 |
System And Method For Implementing Multi-resolution Advanced Process Control
App 20110213478 - Tsen; Andy ; et al. | 2011-09-01 |
System and method for implementing multi-resolution advanced process control
Grant 7,951,615 - Tsen , et al. May 31, 2 | 2011-05-31 |
System And Method For Implementing A Virtual Metrology Advanced Process Control Platform
App 20100312374 - Tsai; Po-Feng ; et al. | 2010-12-09 |
System And Method For Implementing A Wafer Acceptance Test ("wat") Advanced Process Control ("apc") With Novel Sampling Policy And Architecture
App 20100292824 - Tsen; Andy ; et al. | 2010-11-18 |
System And Method For Implementing Multi-resolution Advanced Process Control
App 20100255613 - Tsen; Andy ; et al. | 2010-10-07 |
Method And Apparatus For Advanced Process Control
App 20100234970 - Tsai; Po-Feng ; et al. | 2010-09-16 |
Process controlling method with merged two-control loops
Grant 7,187,990 - Jang , et al. March 6, 2 | 2007-03-06 |
Process controlling method with merged two-control loops
App 20050075993 - Jang, Shi-Shang ; et al. | 2005-04-07 |
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