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Patent applications and USPTO patent grants for Tsai; Mo Hsun.The latest application filed is for "silicon etchant with high si/sio2 etching selectivity and application thereof".
Patent | Date |
---|---|
Silicon etchant with high Si/SiO2 etching selectivity and application thereof Grant 11,084,981 - Tsai August 10, 2 | 2021-08-10 |
Silicon etchant with high Si/SiO2 etching selectivity and Application thereof App 20200248074 - Kind Code | 2020-08-06 |
ETCHANT COMPOSITIONS AND ETCHING METHOD FOR METALS Cu/Mo App 20100301010 - Lin; Cheng Wei ;   et al. | 2010-12-02 |
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