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Patent applications and USPTO patent grants for Tsai; Matthew C.The latest application filed is for "cooling pedestal with coating of diamond-like carbon".
Patent | Date |
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Cooling pedestal with coating of diamond-like carbon Grant 10,053,778 - Parkhe , et al. August 21, 2 | 2018-08-21 |
Cooling Pedestal With Coating Of Diamond-like Carbon App 20140326184 - PARKHE; Vijay D. ;   et al. | 2014-11-06 |
Heat exchange pedestal with coating of diamond-like material Grant 8,852,348 - Parkhe , et al. October 7, 2 | 2014-10-07 |
Heat Exchange Pedestal With Coating Of Diamond-like Material App 20110017424 - PARKHE; Vijay D. ;   et al. | 2011-01-27 |
Coating for reducing contamination of substrates during processing Grant 7,824,498 - Parkhe , et al. November 2, 2 | 2010-11-02 |
Contaminant reducing substrate transport and support system App 20050252454 - Parkhe, Vijay D. ;   et al. | 2005-11-17 |
Coating for reducing contamination of substrates during processing App 20050183669 - Parkhe, Vijay D. ;   et al. | 2005-08-25 |
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