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Prediction based chucking and lithography control optimization Grant 10,788,759 - Tsai , et al. September 29, 2 | 2020-09-29 |
Method of optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrology Grant 10,325,004 - Dziura , et al. | 2019-06-18 |
Prediction Based Chucking and Lithography Control Optimization App 20180364579 - Tsai; Bin-Ming Benjamin ;   et al. | 2018-12-20 |
Prediction based chucking and lithography control optimization Grant 10,036,964 - Tsai , et al. July 31, 2 | 2018-07-31 |
Prediction Based Chucking and Lithography Control Optimization App 20160239600 - Tsai; Bin-Ming Benjamin ;   et al. | 2016-08-18 |
EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers Grant 9,377,414 - Chuang , et al. June 28, 2 | 2016-06-28 |
Optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrology Grant 9,310,296 - Dziura , et al. April 12, 2 | 2016-04-12 |
Dopant metrology with information feedforward and feedback Grant 8,962,351 - Salnik , et al. February 24, 2 | 2015-02-24 |
Optical metrology using targets with field enhancement elements Grant 8,879,073 - Madsen , et al. November 4, 2 | 2014-11-04 |
Process aware metrology Grant 8,832,611 - Liu , et al. September 9, 2 | 2014-09-09 |
EUV High Throughput Inspection System For Defect Detection On Patterned EUV Masks, Mask Blanks, And Wafers App 20140217299 - Chuang; Yung-Ho ;   et al. | 2014-08-07 |
EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers Grant 8,692,986 - Chuang , et al. April 8, 2 | 2014-04-08 |
EUV High Throughput Inspection System For Defect Detection On Patterned EUV Masks, Mask Blanks, And Wafers App 20140001370 - Chuang; Yung-Ho ;   et al. | 2014-01-02 |
Process Aware Metrology App 20130282340 - Liu; Xuefeng ;   et al. | 2013-10-24 |
EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers Grant 8,553,217 - Chuang , et al. October 8, 2 | 2013-10-08 |
Dopant metrology with information feedforward and feedback Grant 8,535,957 - Salnik , et al. September 17, 2 | 2013-09-17 |
Optical Metrology Using Targets With Field Enhancement Elements App 20130222795 - Madsen; Jonathan M. ;   et al. | 2013-08-29 |
Process aware metrology Grant 8,468,471 - Liu , et al. June 18, 2 | 2013-06-18 |
Process Aware Metrology App 20130080984 - Liu; Xuefeng ;   et al. | 2013-03-28 |
Method Of Optimizing An Optical Parametric Model For Structural Analysis Using Optical Critical Dimension (ocd) Metrology App 20120323356 - Dziura; Thaddeus G. ;   et al. | 2012-12-20 |
Ultra-broadband UV microscope imaging system with wide range zoom capability Grant 7,773,296 - Shafer , et al. August 10, 2 | 2010-08-10 |
Excimer laser inspection system Grant 7,728,968 - Tsai , et al. June 1, 2 | 2010-06-01 |
Optical inspection of a specimen using multi-channel responses from the specimen App 20100033716 - Tsai; Bin-Ming Benjamin ;   et al. | 2010-02-11 |
Ion implant metrology system with fault detection and identification Grant 7,660,686 - Nicolaides , et al. February 9, 2 | 2010-02-09 |
High throughput brightfield/darkfield water inspection system using advanced optical techniques Grant 7,554,655 - Fairley , et al. June 30, 2 | 2009-06-30 |
High throughput darkfield/brightfield wafer inspection system using advanced optical techniques Grant 7,522,275 - Fairley , et al. April 21, 2 | 2009-04-21 |
Optical inspection of a specimen using multi-channel responses from the specimen App 20080285023 - Tsai; Bin-Ming Benjamin ;   et al. | 2008-11-20 |
High throughput brightfield/darkfield water inspection system using advanced optical techniques App 20080225298 - Fairley; Christopher R. ;   et al. | 2008-09-18 |
Confocal wafer inspection method and apparatus using fly lens arrangement Grant 7,399,950 - Fairley , et al. July 15, 2 | 2008-07-15 |
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques Grant 7,379,173 - Fairley , et al. May 27, 2 | 2008-05-27 |
High throughput darkfield/brightfield wafer inspection system using advanced optical techniques App 20080007726 - Fairley; Christopher R. ;   et al. | 2008-01-10 |
High throughput darkfield/brightfield wafer inspection system using advanced optical techniques Grant 7,259,844 - Fairley , et al. August 21, 2 | 2007-08-21 |
Excimer laser inspection system App 20070121107 - Tsai; Bin-Ming Benjamin ;   et al. | 2007-05-31 |
High throughput darkfield/brightfield wafer inspection system using advanced optical techniques App 20070115461 - Fairley; Christopher R. ;   et al. | 2007-05-24 |
Optical inspection of a specimen using multi-channel responses from the specimen App 20070076198 - Tsai; Bin-Ming Benjamin ;   et al. | 2007-04-05 |
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques Grant 7,164,475 - Fairley , et al. January 16, 2 | 2007-01-16 |
Confocal wafer inspection method and apparatus using fly lens arrangement App 20070007429 - Fairley; Christopher R. ;   et al. | 2007-01-11 |
System and method for sensing using adjustable modulation transfer function (MTF) App 20060266926 - Chuang; Yung-Ho ;   et al. | 2006-11-30 |
Excimer laser inspection system Grant 7,136,159 - Tsai , et al. November 14, 2 | 2006-11-14 |
System and method for sensing using adjustable modulation transfer function (MTF) Grant 7,126,100 - Chuang , et al. October 24, 2 | 2006-10-24 |
Confocal wafer depth scanning inspection method Grant 7,109,458 - Fairley , et al. September 19, 2 | 2006-09-19 |
Optical inspection of a specimen using multi-channel responses from the specimen App 20060146319 - Tsai; Bin-Ming Benjamin ;   et al. | 2006-07-06 |
Methods and system for evaluation with notification means App 20050251438 - Tseng, Yi-Ming ;   et al. | 2005-11-10 |
Optical inspection of a specimen using multi-channel responses from the specimen App 20050162645 - Tsai, Bin-Ming Benjamin ;   et al. | 2005-07-28 |
Confocal wafer inspection method and apparatus App 20050156098 - Fairley, Christopher R. ;   et al. | 2005-07-21 |
High throughput brightfield/darkfield wafer inspection system using advanced optical techiques App 20050062962 - Fairley, Christopher R. ;   et al. | 2005-03-24 |
Confocal wafer inspection method and apparatus using fly lens arrangement Grant 6,867,406 - Fairley , et al. March 15, 2 | 2005-03-15 |
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques App 20040252297 - Fairley, Christopher R. ;   et al. | 2004-12-16 |
Optical inspection of a specimen using multi-channel responses from the specimen App 20040223146 - Tsai, Bin-Ming Benjamin ;   et al. | 2004-11-11 |
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques Grant 6,816,249 - Fairley , et al. November 9, 2 | 2004-11-09 |
Multi-pixel methods and apparatus for analysis of defect information from test structures on semiconductor devices Grant 6,771,806 - Satya , et al. August 3, 2 | 2004-08-03 |
Excimer laser inspection system App 20040095573 - Tsai, Bin-Ming Benjamin ;   et al. | 2004-05-20 |
Optical inspection of a specimen using multi-channel responses from the specimen App 20040017562 - Tsai, Bin-Ming Benjamin ;   et al. | 2004-01-29 |
Optical inspection of a specimen using multi-channel responses from the specimen App 20030063274 - Tsai, Bin-Ming Benjamin ;   et al. | 2003-04-03 |
Continuous movement scans of test structures on semiconductor integrated circuits Grant 6,524,873 - Satya , et al. February 25, 2 | 2003-02-25 |
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques App 20020118359 - Fairley, Christopher R. ;   et al. | 2002-08-29 |
Methods and apparatus for optimizing semiconductor inspection tools Grant 6,433,561 - Satya , et al. August 13, 2 | 2002-08-13 |
Inspection System Simultaneously Utilizing Monochromatic Darkfield And Broadband Brightfield Illumination Sources App 20020054291 - Tsai, Bin-Ming Benjamin ;   et al. | 2002-05-09 |
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques Grant 6,288,780 - Fairley , et al. September 11, 2 | 2001-09-11 |
System and method for analyzing topological features on a surface Grant 6,137,570 - Chuang , et al. October 24, 2 | 2000-10-24 |
Inspection system simultaneously utilizing monochromatic darkfield and broadband brightfield illumination sources Grant 6,078,386 - Tsai , et al. June 20, 2 | 2000-06-20 |
Ultra-broadband UV microscope imaging system with wide range zoom capability Grant 5,999,310 - Shafer , et al. December 7, 1 | 1999-12-07 |
Optical inspection of a specimen using multi-channel responses from the specimen using bright and darkfield detection Grant 5,822,055 - Tsai , et al. October 13, 1 | 1998-10-13 |