Tsai; Bin-Ming Benjamin

Patent Applications and Registrations

Patent applications and USPTO patent grants for Tsai; Bin-Ming Benjamin.The latest application filed is for "prediction based chucking and lithography control optimization".

Company Profile

3.39.30

Tsai; Bin-Ming Benjamin - Saratoga CA
Tsai; Bin-Ming (Benjamin) - Benjamin

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Prediction based chucking and lithography control optimization Grant 10,788,759 - Tsai , et al. September 29, 2	2020-09-29
Method of optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrology Grant 10,325,004 - Dziura , et al.	2019-06-18
Prediction Based Chucking and Lithography Control Optimization App 20180364579 - Tsai; Bin-Ming Benjamin ; et al.	2018-12-20
Prediction based chucking and lithography control optimization Grant 10,036,964 - Tsai , et al. July 31, 2	2018-07-31
Prediction Based Chucking and Lithography Control Optimization App 20160239600 - Tsai; Bin-Ming Benjamin ; et al.	2016-08-18
EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers Grant 9,377,414 - Chuang , et al. June 28, 2	2016-06-28
Optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrology Grant 9,310,296 - Dziura , et al. April 12, 2	2016-04-12
Dopant metrology with information feedforward and feedback Grant 8,962,351 - Salnik , et al. February 24, 2	2015-02-24
Optical metrology using targets with field enhancement elements Grant 8,879,073 - Madsen , et al. November 4, 2	2014-11-04
Process aware metrology Grant 8,832,611 - Liu , et al. September 9, 2	2014-09-09
EUV High Throughput Inspection System For Defect Detection On Patterned EUV Masks, Mask Blanks, And Wafers App 20140217299 - Chuang; Yung-Ho ; et al.	2014-08-07
EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers Grant 8,692,986 - Chuang , et al. April 8, 2	2014-04-08
EUV High Throughput Inspection System For Defect Detection On Patterned EUV Masks, Mask Blanks, And Wafers App 20140001370 - Chuang; Yung-Ho ; et al.	2014-01-02
Process Aware Metrology App 20130282340 - Liu; Xuefeng ; et al.	2013-10-24
EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers Grant 8,553,217 - Chuang , et al. October 8, 2	2013-10-08
Dopant metrology with information feedforward and feedback Grant 8,535,957 - Salnik , et al. September 17, 2	2013-09-17
Optical Metrology Using Targets With Field Enhancement Elements App 20130222795 - Madsen; Jonathan M. ; et al.	2013-08-29
Process aware metrology Grant 8,468,471 - Liu , et al. June 18, 2	2013-06-18
Process Aware Metrology App 20130080984 - Liu; Xuefeng ; et al.	2013-03-28
Method Of Optimizing An Optical Parametric Model For Structural Analysis Using Optical Critical Dimension (ocd) Metrology App 20120323356 - Dziura; Thaddeus G. ; et al.	2012-12-20
Ultra-broadband UV microscope imaging system with wide range zoom capability Grant 7,773,296 - Shafer , et al. August 10, 2	2010-08-10
Excimer laser inspection system Grant 7,728,968 - Tsai , et al. June 1, 2	2010-06-01
Optical inspection of a specimen using multi-channel responses from the specimen App 20100033716 - Tsai; Bin-Ming Benjamin ; et al.	2010-02-11
Ion implant metrology system with fault detection and identification Grant 7,660,686 - Nicolaides , et al. February 9, 2	2010-02-09
High throughput brightfield/darkfield water inspection system using advanced optical techniques Grant 7,554,655 - Fairley , et al. June 30, 2	2009-06-30
High throughput darkfield/brightfield wafer inspection system using advanced optical techniques Grant 7,522,275 - Fairley , et al. April 21, 2	2009-04-21
Optical inspection of a specimen using multi-channel responses from the specimen App 20080285023 - Tsai; Bin-Ming Benjamin ; et al.	2008-11-20
High throughput brightfield/darkfield water inspection system using advanced optical techniques App 20080225298 - Fairley; Christopher R. ; et al.	2008-09-18
Confocal wafer inspection method and apparatus using fly lens arrangement Grant 7,399,950 - Fairley , et al. July 15, 2	2008-07-15
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques Grant 7,379,173 - Fairley , et al. May 27, 2	2008-05-27
High throughput darkfield/brightfield wafer inspection system using advanced optical techniques App 20080007726 - Fairley; Christopher R. ; et al.	2008-01-10
High throughput darkfield/brightfield wafer inspection system using advanced optical techniques Grant 7,259,844 - Fairley , et al. August 21, 2	2007-08-21
Excimer laser inspection system App 20070121107 - Tsai; Bin-Ming Benjamin ; et al.	2007-05-31
High throughput darkfield/brightfield wafer inspection system using advanced optical techniques App 20070115461 - Fairley; Christopher R. ; et al.	2007-05-24
Optical inspection of a specimen using multi-channel responses from the specimen App 20070076198 - Tsai; Bin-Ming Benjamin ; et al.	2007-04-05
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques Grant 7,164,475 - Fairley , et al. January 16, 2	2007-01-16
Confocal wafer inspection method and apparatus using fly lens arrangement App 20070007429 - Fairley; Christopher R. ; et al.	2007-01-11
System and method for sensing using adjustable modulation transfer function (MTF) App 20060266926 - Chuang; Yung-Ho ; et al.	2006-11-30
Excimer laser inspection system Grant 7,136,159 - Tsai , et al. November 14, 2	2006-11-14
System and method for sensing using adjustable modulation transfer function (MTF) Grant 7,126,100 - Chuang , et al. October 24, 2	2006-10-24
Confocal wafer depth scanning inspection method Grant 7,109,458 - Fairley , et al. September 19, 2	2006-09-19
Optical inspection of a specimen using multi-channel responses from the specimen App 20060146319 - Tsai; Bin-Ming Benjamin ; et al.	2006-07-06
Methods and system for evaluation with notification means App 20050251438 - Tseng, Yi-Ming ; et al.	2005-11-10
Optical inspection of a specimen using multi-channel responses from the specimen App 20050162645 - Tsai, Bin-Ming Benjamin ; et al.	2005-07-28
Confocal wafer inspection method and apparatus App 20050156098 - Fairley, Christopher R. ; et al.	2005-07-21
High throughput brightfield/darkfield wafer inspection system using advanced optical techiques App 20050062962 - Fairley, Christopher R. ; et al.	2005-03-24
Confocal wafer inspection method and apparatus using fly lens arrangement Grant 6,867,406 - Fairley , et al. March 15, 2	2005-03-15
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques App 20040252297 - Fairley, Christopher R. ; et al.	2004-12-16
Optical inspection of a specimen using multi-channel responses from the specimen App 20040223146 - Tsai, Bin-Ming Benjamin ; et al.	2004-11-11
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques Grant 6,816,249 - Fairley , et al. November 9, 2	2004-11-09
Multi-pixel methods and apparatus for analysis of defect information from test structures on semiconductor devices Grant 6,771,806 - Satya , et al. August 3, 2	2004-08-03
Excimer laser inspection system App 20040095573 - Tsai, Bin-Ming Benjamin ; et al.	2004-05-20
Optical inspection of a specimen using multi-channel responses from the specimen App 20040017562 - Tsai, Bin-Ming Benjamin ; et al.	2004-01-29
Optical inspection of a specimen using multi-channel responses from the specimen App 20030063274 - Tsai, Bin-Ming Benjamin ; et al.	2003-04-03
Continuous movement scans of test structures on semiconductor integrated circuits Grant 6,524,873 - Satya , et al. February 25, 2	2003-02-25
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques App 20020118359 - Fairley, Christopher R. ; et al.	2002-08-29
Methods and apparatus for optimizing semiconductor inspection tools Grant 6,433,561 - Satya , et al. August 13, 2	2002-08-13
Inspection System Simultaneously Utilizing Monochromatic Darkfield And Broadband Brightfield Illumination Sources App 20020054291 - Tsai, Bin-Ming Benjamin ; et al.	2002-05-09
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques Grant 6,288,780 - Fairley , et al. September 11, 2	2001-09-11
System and method for analyzing topological features on a surface Grant 6,137,570 - Chuang , et al. October 24, 2	2000-10-24
Inspection system simultaneously utilizing monochromatic darkfield and broadband brightfield illumination sources Grant 6,078,386 - Tsai , et al. June 20, 2	2000-06-20
Ultra-broadband UV microscope imaging system with wide range zoom capability Grant 5,999,310 - Shafer , et al. December 7, 1	1999-12-07
Optical inspection of a specimen using multi-channel responses from the specimen using bright and darkfield detection Grant 5,822,055 - Tsai , et al. October 13, 1	1998-10-13

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