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Wafer transport assembly with integrated buffers Grant 11,393,705 - Daugherty , et al. July 19, 2 | 2022-07-19 |
Wafer Transport Assembly With Integrated Buffers App 20210005485 - Daugherty; John E. ;   et al. | 2021-01-07 |
Active showerhead Grant 10,804,079 - Gregor , et al. October 13, 2 | 2020-10-13 |
Wafer transport assembly with integrated buffers Grant 10,790,174 - Daugherty , et al. September 29, 2 | 2020-09-29 |
Active Showerhead App 20190371573 - Gregor; Mariusch ;   et al. | 2019-12-05 |
Active showerhead Grant 10,403,476 - Gregor , et al. Sep | 2019-09-03 |
Load lock interface and integrated post-processing module Grant 10,304,707 - Trussell , et al. | 2019-05-28 |
Wafer Transport Assembly With Integrated Buffers App 20180233387 - DAUGHERTY; John ;   et al. | 2018-08-16 |
Wafer transport assembly with integrated buffers Grant 10,014,196 - Daugherty , et al. July 3, 2 | 2018-07-03 |
Active Showerhead App 20180130640 - Gregor; Mariusch ;   et al. | 2018-05-10 |
Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs Grant 9,929,028 - Trussell , et al. March 27, 2 | 2018-03-27 |
Wafer Transport Assembly With Integrated Buffers App 20170110354 - Daugherty; John ;   et al. | 2017-04-20 |
Load Lock Interface And Integrated Post-processing Module App 20170110351 - Trussell; David ;   et al. | 2017-04-20 |
Service Tunnel For Use On Capital Equipment In Semiconductor Manufacturing And Research Fabs App 20170110350 - Trussell; David ;   et al. | 2017-04-20 |
Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs Grant 9,502,275 - Trussell , et al. November 22, 2 | 2016-11-22 |
Movable Gas Nozzle In Drying Module App 20160086864 - Fischer; Andreas ;   et al. | 2016-03-24 |
Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode Grant 8,573,153 - Fischer , et al. November 5, 2 | 2013-11-05 |
Plasma confinement rings having reduced polymer deposition characteristics Grant 8,500,952 - Dhindsa , et al. August 6, 2 | 2013-08-06 |
Plasma Confinement Rings Having Reduced Polymer Deposition Characteristics App 20120325407 - Dhindsa; Rajinder ;   et al. | 2012-12-27 |
Plasma confinement rings having reduced polymer deposition characteristics Grant 8,262,922 - Dhindsa , et al. September 11, 2 | 2012-09-11 |
Multi-part Electrode For A Semiconductor Processing Plasma Reactor And Method Of Replacing A Portion Of A Multi-part Electrode App 20110067814 - Fischer; Andreas ;   et al. | 2011-03-24 |
Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode Grant 7,861,667 - Fischer , et al. January 4, 2 | 2011-01-04 |
Plasma confinement rings assemblies having reduced polymer deposition characteristics App 20080318433 - Dhindsa; Rajinder ;   et al. | 2008-12-25 |
Plasma confinement ring assemblies having reduced polymer deposition characteristics Grant 7,430,986 - Dhindsa , et al. October 7, 2 | 2008-10-07 |
Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode App 20040074609 - Fischer, Andreas ;   et al. | 2004-04-22 |
Chemical vapor deposition system with a plasma chamber having separate process gas and cleaning gas injection ports Grant 5,988,187 - Trussell , et al. November 23, 1 | 1999-11-23 |