Trunz; Michael

Patent Applications and Registrations

Patent applications and USPTO patent grants for Trunz; Michael.The latest application filed is for "optical arrangement and projection exposure system for microlithography with passive thermal compensation".

Company Profile

0.13.8

Trunz; Michael - Ellwangen DE
Trunz; Michael - Ellwangen-Pfuhlheim DE
Trunz; Michael - Pfahlheim DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Optical Arrangement And Projection Exposure System For Microlithography With Passive Thermal Compensation App 20080212052 - Wagner; Christian ; et al.	2008-09-04
Optical arrangement and projection exposure system for microlithography with passive thermal compensation Grant 7,274,430 - Wagner , et al. September 25, 2	2007-09-25
Holding device for an optical element Grant 7,227,707 - Trunz , et al. June 5, 2	2007-06-05
Holding Device For An Optical Element App 20060187561 - Trunz; Michael ; et al.	2006-08-24
Arrangement for holding a particle beam apparatus Grant 6,969,854 - Essers , et al. November 29, 2	2005-11-29
Camera system having at least two first cameras and two second cameras Grant 6,834,163 - Trunz , et al. December 21, 2	2004-12-21
Optical arrangement and projection exposure system for microlithography with passive thermal compensation App 20040207825 - Wagner, Christian ; et al.	2004-10-21
Sensor module App 20040085474 - Trunz, Michael ; et al.	2004-05-06
Holding device for an optical element App 20040066566 - Trunz, Michael ; et al.	2004-04-08
Coordinate measuring apparatus having a bending-resistant measuring table Grant 6,655,037 - Gotz , et al. December 2, 2	2003-12-02
Camera system having at least two first cameras and two second cameras App 20030138247 - Trunz, Michael ; et al.	2003-07-24
Coordinate Measuring Apparatus Having A Bending-resistant Measuring Table App 20020189117 - GOTZ, KLAUS-DIETER ; et al.	2002-12-19
Device for the low-deformation support of an optical element and method for the low-deformation support of the optical element Grant 6,441,975 - Ebert , et al. August 27, 2	2002-08-27
Assembly comprising an optical element and a mount Grant 6,392,825 - Trunz , et al. May 21, 2	2002-05-21
Assembly comprising an optical element and a mount Grant 6,369,959 - Trunz , et al. April 9, 2	2002-04-09
Method of straightening the supporting surfaces of supporting elements for optical elements Grant 6,366,413 - Trunz , et al. April 2, 2	2002-04-02
Optical arrangement and projection exposure system for microlithography with passive thermal compensation App 20020008858 - Wagner, Christian ; et al.	2002-01-24
Adjustable assembly Grant 6,259,571 - Holderer , et al. July 10, 2	2001-07-10
Assembly of optical element and mount Grant 6,229,657 - Holderer , et al. May 8, 2	2001-05-08
Optical imaging device, particularly an objective, with at least one optical element Grant 6,191,898 - Trunz , et al. February 20, 2	2001-02-20
Composite body Grant 6,099,193 - Hangleiter , et al. August 8, 2	2000-08-08

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