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name:-0.022744178771973
name:-0.021656036376953
name:-0.016424894332886
Trumpf Lasersystems For Semiconductor Manufacturing GmbH Patent Filings

Trumpf Lasersystems For Semiconductor Manufacturing GmbH

Patent Applications and Registrations

Patent applications and USPTO patent grants for Trumpf Lasersystems For Semiconductor Manufacturing GmbH.The latest application filed is for "laser focussing module".

Company Profile
18.33.19
  • Trumpf Lasersystems For Semiconductor Manufacturing GmbH - Ditzingen DE
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Laser Focussing Module
App 20220206397 - BEERENS; Ruud Antonius Catharina Maria ;   et al.
2022-06-30
Arrangement for monitoring an optical element, laser source and euv radiation generation apparatus
Grant 11,322,902 - Schulz , et al. May 3, 2
2022-05-03
Polarizer
Grant 11,304,286 - Ergin April 12, 2
2022-04-12
Method for determining at least one beam propagation parameter of a laser beam
Grant 11,243,114 - Granson , et al. February 8, 2
2022-02-08
Method For Adjusting A Laser Beam, Apparatus For Providing An Adjusted Laser Beam And Optical Arrangement
App 20220006254 - Mueller; Jonathan
2022-01-06
Arrangement For Monitoring An Optical Element, Laser Source And Euv Radiation Generation Apparatus
App 20210351554 - Schulz; Joachim ;   et al.
2021-11-11
Focusing Device And Euv Radiation Generating Device Having Same
App 20210063712 - Lambert; Martin ;   et al.
2021-03-04
Reflective Optical Element, Beam Guiding Device And Euv-beam Generating Device
App 20210041708 - Lambert; Martin ;   et al.
2021-02-11
Linear polarization of a laser beam
Grant 10,884,255 - Krauss , et al. January 5, 2
2021-01-05
Faraday Rotators, Optical Isolators, Driver Laser Arrangements And Euv Radiation Generation Apparatus
App 20200379281 - Erhard; Steffen
2020-12-03
Elongating a travel path of a light beam by an optical delay device
Grant 10,739,572 - Schulz A
2020-08-11
Polarizer
App 20200154554 - Ergin; Tolga
2020-05-14
Exteme ultraviolet radiation producing systems with driver laser systems having optical isolators
Grant 10,644,473 - Brunne , et al.
2020-05-05
Amplifying laser pulses having different wavelengths for EUV radiation generation
Grant 10,638,589 - Wissert
2020-04-28
Method For Determining At Least One Beam Propagation Parameter Of A Laser Beam
App 20200088570 - Granson; Viktor ;   et al.
2020-03-19
Adjusting a beam diameter and an aperture angle of a laser beam
Grant 10,327,318 - Lambert , et al.
2019-06-18
Beam trap, beam guide device, EUV radiation generating apparatus, and method for absorbing a beam
Grant 10,264,660 - Lambert
2019-04-16
Amplifying pulsed laser radiation for EUV radiation production
Grant 10,186,827 - Schulz , et al. Ja
2019-01-22
Extreme Ultraviolet Radiation Producing Systems With Driver Laser Systems Having Optical Isolators
App 20180375278 - Brunne; Jens ;   et al.
2018-12-27
Amplifying Laser Pulses Having Different Wavelengths For Euv Radiation Generation
App 20180279459 - Wissert; Matthias
2018-09-27
Linear Polarization Of A Laser Beam
App 20180231790 - Krauss; Guenther ;   et al.
2018-08-16
Monitoring laser beams
Grant 10,044,167 - Schulz August 7, 2
2018-08-07
Beam Trap, Beam Guide Device, EUV Radiation Generating Apparatus, and Method for Absorbing a Beam
App 20170367167 - Lambert; Martin
2017-12-21
Adjusting a Beam Diameter and an Aperture Angle of a Laser Beam
App 20170325325 - Lambert; Martin ;   et al.
2017-11-09
Elongating a Travel Path of a Light Beam by an Optical Delay Device
App 20170160527 - Schulz; Joachim
2017-06-08
Amplifying Pulsed Laser Radiation for EUV Radiation Production
App 20170149202 - Schulz; Joachim ;   et al.
2017-05-25
EUV radiation generating device including a beam influencing optical unit
Grant 9,642,235 - Schulz , et al. May 2, 2
2017-05-02
Monitoring Laser Beams
App 20170085054 - Schulz; Joachim
2017-03-23
Beam guiding apparatus
Grant 9,596,743 - Enzmann March 14, 2
2017-03-14
Beam guiding apparatus
Grant 9,575,324 - Lambert February 21, 2
2017-02-21
Beam Guiding Apparatus
App 20160195729 - Lambert; Martin
2016-07-07
Beam Guiding Apparatus
App 20160198557 - Enzmann; Andreas
2016-07-07
EUV Radiation Generating Device Including a Beam Influencing Optical Unit
App 20160135275 - Schulz; Joachim ;   et al.
2016-05-12
Optical arrangement, optical module, and method for correctly positioning an optical module in a housing
Grant 9,323,026 - Lambert April 26, 2
2016-04-26
Device for amplifying a laser beam
Grant 9,306,367 - Schulz , et al. April 5, 2
2016-04-05
EUV excitation light source with a laser beam source and a beam guide device for manipulating the laser beam
Grant 9,129,717 - Lambert , et al. September 8, 2
2015-09-08

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