Patent | Date |
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Laser Focussing Module App 20220206397 - BEERENS; Ruud Antonius Catharina Maria ;   et al. | 2022-06-30 |
Arrangement for monitoring an optical element, laser source and euv radiation generation apparatus Grant 11,322,902 - Schulz , et al. May 3, 2 | 2022-05-03 |
Polarizer Grant 11,304,286 - Ergin April 12, 2 | 2022-04-12 |
Method for determining at least one beam propagation parameter of a laser beam Grant 11,243,114 - Granson , et al. February 8, 2 | 2022-02-08 |
Method For Adjusting A Laser Beam, Apparatus For Providing An Adjusted Laser Beam And Optical Arrangement App 20220006254 - Mueller; Jonathan | 2022-01-06 |
Arrangement For Monitoring An Optical Element, Laser Source And Euv Radiation Generation Apparatus App 20210351554 - Schulz; Joachim ;   et al. | 2021-11-11 |
Focusing Device And Euv Radiation Generating Device Having Same App 20210063712 - Lambert; Martin ;   et al. | 2021-03-04 |
Reflective Optical Element, Beam Guiding Device And Euv-beam Generating Device App 20210041708 - Lambert; Martin ;   et al. | 2021-02-11 |
Linear polarization of a laser beam Grant 10,884,255 - Krauss , et al. January 5, 2 | 2021-01-05 |
Faraday Rotators, Optical Isolators, Driver Laser Arrangements And Euv Radiation Generation Apparatus App 20200379281 - Erhard; Steffen | 2020-12-03 |
Elongating a travel path of a light beam by an optical delay device Grant 10,739,572 - Schulz A | 2020-08-11 |
Polarizer App 20200154554 - Ergin; Tolga | 2020-05-14 |
Exteme ultraviolet radiation producing systems with driver laser systems having optical isolators Grant 10,644,473 - Brunne , et al. | 2020-05-05 |
Amplifying laser pulses having different wavelengths for EUV radiation generation Grant 10,638,589 - Wissert | 2020-04-28 |
Method For Determining At Least One Beam Propagation Parameter Of A Laser Beam App 20200088570 - Granson; Viktor ;   et al. | 2020-03-19 |
Adjusting a beam diameter and an aperture angle of a laser beam Grant 10,327,318 - Lambert , et al. | 2019-06-18 |
Beam trap, beam guide device, EUV radiation generating apparatus, and method for absorbing a beam Grant 10,264,660 - Lambert | 2019-04-16 |
Amplifying pulsed laser radiation for EUV radiation production Grant 10,186,827 - Schulz , et al. Ja | 2019-01-22 |
Extreme Ultraviolet Radiation Producing Systems With Driver Laser Systems Having Optical Isolators App 20180375278 - Brunne; Jens ;   et al. | 2018-12-27 |
Amplifying Laser Pulses Having Different Wavelengths For Euv Radiation Generation App 20180279459 - Wissert; Matthias | 2018-09-27 |
Linear Polarization Of A Laser Beam App 20180231790 - Krauss; Guenther ;   et al. | 2018-08-16 |
Monitoring laser beams Grant 10,044,167 - Schulz August 7, 2 | 2018-08-07 |
Beam Trap, Beam Guide Device, EUV Radiation Generating Apparatus, and Method for Absorbing a Beam App 20170367167 - Lambert; Martin | 2017-12-21 |
Adjusting a Beam Diameter and an Aperture Angle of a Laser Beam App 20170325325 - Lambert; Martin ;   et al. | 2017-11-09 |
Elongating a Travel Path of a Light Beam by an Optical Delay Device App 20170160527 - Schulz; Joachim | 2017-06-08 |
Amplifying Pulsed Laser Radiation for EUV Radiation Production App 20170149202 - Schulz; Joachim ;   et al. | 2017-05-25 |
EUV radiation generating device including a beam influencing optical unit Grant 9,642,235 - Schulz , et al. May 2, 2 | 2017-05-02 |
Monitoring Laser Beams App 20170085054 - Schulz; Joachim | 2017-03-23 |
Beam guiding apparatus Grant 9,596,743 - Enzmann March 14, 2 | 2017-03-14 |
Beam guiding apparatus Grant 9,575,324 - Lambert February 21, 2 | 2017-02-21 |
Beam Guiding Apparatus App 20160195729 - Lambert; Martin | 2016-07-07 |
Beam Guiding Apparatus App 20160198557 - Enzmann; Andreas | 2016-07-07 |
EUV Radiation Generating Device Including a Beam Influencing Optical Unit App 20160135275 - Schulz; Joachim ;   et al. | 2016-05-12 |
Optical arrangement, optical module, and method for correctly positioning an optical module in a housing Grant 9,323,026 - Lambert April 26, 2 | 2016-04-26 |
Device for amplifying a laser beam Grant 9,306,367 - Schulz , et al. April 5, 2 | 2016-04-05 |
EUV excitation light source with a laser beam source and a beam guide device for manipulating the laser beam Grant 9,129,717 - Lambert , et al. September 8, 2 | 2015-09-08 |