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Controlling multiple plasma processes
Grant 11,430,642 - Engelstaedter , et al. August 30, 2 | 2022-08-30 |
Method Of Plasma Processing A Substrate In A Plasma Chamber And Plasma Processing System
App 20220208532 - Gajewski; Wojciech ; et al. | 2022-06-30 |
Method Of Adjusting The Output Power Of A Power Supply Supplying Electrical Power To A Plasma, Plasma Apparatus And Power Supply
App 20220115207 - Swiatnicki; Jakub ; et al. | 2022-04-14 |
Power Converter, Power Supply System And Hf Plasma System
App 20210159050 - Klimczak; Andrzej ; et al. | 2021-05-27 |
Balun And Amplifier Including Balun
App 20210159872 - Klimczak; Andrzej ; et al. | 2021-05-27 |
Arc Detector For Detecting Arcs, Plasma System And Method Of Detecting Arcs
App 20210156893 - Klimczak; Andrzej ; et al. | 2021-05-27 |
Controlling multiple plasma processes
Grant 10,971,342 - Engelstaedter , et al. April 6, 2 | 2021-04-06 |
Controlling Multiple Plasma Processes
App 20200066498 - Engelstaedter; Jan Peter ; et al. | 2020-02-27 |
Controlling Multiple Plasma Processes
App 20200066497 - Engelstaedter; Jan Peter ; et al. | 2020-02-27 |
Controlling Multiple Plasma Processes
App 20200058475 - Engelstaedter; Jan Peter ; et al. | 2020-02-20 |
Detecting an arc occuring during supplying power to a plasma process
Grant 10,431,437 - O | 2019-10-01 |
Plasma impedance matching for supplying RF power to a plasma load
Grant 10,410,835 - Glazek , et al. Sept | 2019-09-10 |
Treating arcs in a plasma process
Grant 10,297,431 - Zelechowski , et al. | 2019-05-21 |
Monitoring a discharge in a plasma process
Grant 10,290,477 - Gieraltowski , et al. | 2019-05-14 |
Plasma Impedance Matching for Supplying RF Power to a Plasma Load
App 20180053633 - Glazek; Wojciech ; et al. | 2018-02-22 |
Generating a highly ionized plasma in a plasma chamber
Grant 9,840,770 - Klimczak , et al. December 12, 2 | 2017-12-12 |
Treating Arcs in a Plasma Process
App 20170330737 - Zelechowski; Marcin ; et al. | 2017-11-16 |
Reducing stored electrical energy in a lead inductance
Grant 9,818,579 - Ozimek , et al. November 14, 2 | 2017-11-14 |
Detecting An Arc Occuring During Supplying Power To A Plasma Process
App 20170287684 - Gapinski; Cezary ; et al. | 2017-10-05 |
High-rate reactive sputtering of dielectric stoichiometric films
Grant 9,637,814 - Bugyi , et al. May 2, 2 | 2017-05-02 |
Monitoring a Discharge in a Plasma Process
App 20160343549 - Gieraltowski; Andrzej ; et al. | 2016-11-24 |
Apparatus for generating and maintaining plasma for plasma processing
Grant 9,368,328 - Ozimek , et al. June 14, 2 | 2016-06-14 |
High-rate Reactive Sputtering Of Dielectric Stoichiometric Films
App 20150354052 - Bugyi; Rafal ; et al. | 2015-12-10 |
Apparatus For Generating And Maintaining Plasma For Plasma Processing
App 20150206711 - Ozimek; Pawel ; et al. | 2015-07-23 |
Reducing Stored Electrical Energy In A Lead Inductance
App 20140320015 - Ozimek; Pawel ; et al. | 2014-10-30 |
Reducing stored electrical energy in a lead inductance
Grant 8,786,263 - Ozimek , et al. July 22, 2 | 2014-07-22 |
Generating a Highly Ionized Plasma in a Plasma Chamber
App 20140174909 - Klimczak; Andrzej ; et al. | 2014-06-26 |
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