Trow, John

Patent Applications and Registrations

Patent applications and USPTO patent grants for Trow, John.The latest application filed is for "inductively coupled rf plasma reactor and plasma chamber enclosure structure therefor".

Company Profile

0.11.2

Trow, John - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Inductively coupled RF plasma reactor and plasma chamber enclosure structure therefor App 20040163764 - Collins, Kenneth S. ; et al.	2004-08-26
Inductively coupled RF plasma reactor and plasma chamber enclosure structure therefor Grant 6,736,931 - Collins , et al. May 18, 2	2004-05-18
Plasma reactor having an inductive antenna coupling power through a parallel plate electrode Grant 6,623,596 - Collins , et al. September 23, 2	2003-09-23
Inductively coupled RF plasma reactor having an antenna adjacent a window electrode Grant 6,444,085 - Collins , et al. September 3, 2	2002-09-03
Inductively coupled RF plasma reactor and plasma chamber enclosure structure therefor App 20020020499 - Collins, Kenneth S. ; et al.	2002-02-21
RF tuning method for an RF plasma reactor using frequency servoing and power, voltage, current or DI/DT control Grant 6,252,354 - Collins , et al. June 26, 2	2001-06-26
Plasma reactor having an inductive antenna coupling power through a parallel plate electrode Grant 6,077,384 - Collins , et al. June 20, 2	2000-06-20
Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners Grant 6,074,512 - Collins , et al. June 13, 2	2000-06-13
Parallel plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density Grant 6,054,013 - Collins , et al. April 25, 2	2000-04-25
Plasma confinement for an inductively coupled plasma reactor Grant 5,824,607 - Trow , et al. October 20, 1	1998-10-20
Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits Grant 5,574,410 - Collins , et al. November 12, 1	1996-11-12
Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits Grant 5,572,170 - Collins , et al. November 5, 1	1996-11-05
Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits Grant 5,392,018 - Collins , et al. February 21, 1	1995-02-21

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