Patent | Date |
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Support Table For A Lithographic Apparatus, Method Of Loading A Substrate, Lithographic Apparatus And Device Manufacturing Method App 20210381548 - TROMP; Siegfried Alexander ;   et al. | 2021-12-09 |
Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method Grant 11,098,759 - Tromp , et al. August 24, 2 | 2021-08-24 |
Substrate Holder, A Lithographic Apparatus And Method Of Manufacturing Devices App 20210141312 - NAKIBOGLU; Gunes ;   et al. | 2021-05-13 |
Substrate holder, a lithographic apparatus and method of manufacturing devices Grant 10,895,808 - Nakiboglu , et al. January 19, 2 | 2021-01-19 |
Extraction Body For Lithographic Apparatus App 20200285154 - KRAMER; Gijs ;   et al. | 2020-09-10 |
Extraction body for lithographic apparatus Grant 10,705,426 - Kramer , et al. | 2020-07-07 |
A Substrate Holder, A Lithographic Apparatus And Method Of Manufacturing Devices App 20200183287 - NAKIBOGLU; Gunes ;   et al. | 2020-06-11 |
Support Table For A Lithographic Apparatus, Method Of Loading A Substrate, Lithographic Apparatus And Device Manufacturing Metho App 20200141445 - TROMP; Siegfried Alexander ;   et al. | 2020-05-07 |
Substrate holder, a lithographic apparatus and method of manufacturing devices Grant 10,599,049 - Roset , et al. | 2020-03-24 |
Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method Grant 10,527,092 - Tromp , et al. J | 2020-01-07 |
Object holder and lithographic apparatus Grant 10,481,502 - Laurent , et al. Nov | 2019-11-19 |
Stage System, Lithographic Apparatus, Method For Positioning And Device Manufacturing Method App 20190187571 - JANSSENS; Stef Marten Johan ;   et al. | 2019-06-20 |
Extraction Body For Lithographic Apparatus App 20190163066 - KRAMER; Gijs ;   et al. | 2019-05-30 |
Lithographic Apparatus, Method For Unloading A Substrate And Method For Loading A Substrate App 20190043749 - JEUNINK; Andre Bernardus ;   et al. | 2019-02-07 |
Substrate table and lithographic apparatus Grant 10,192,772 - Achanta , et al. Ja | 2019-01-29 |
Substrate Table And Lithographic Apparatus App 20180308740 - ACHANTA; Satish ;   et al. | 2018-10-25 |
Object Holder And Lithographic Apparatus App 20180267412 - LAURENT; Thibault Simon Mathieu ;   et al. | 2018-09-20 |
A Substrate Holder, a Lithographic Apparatus and Method of Manufacturing Devices App 20180259855 - ROSET; Bas Johannes Petrus ;   et al. | 2018-09-13 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Grant 10,018,924 - Lafarre , et al. July 10, 2 | 2018-07-10 |
Lithographic apparatus and method of manufacturing a lithographic apparatus Grant 10,018,926 - Cortie , et al. July 10, 2 | 2018-07-10 |
Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation Grant 9,983,489 - Berendsen , et al. May 29, 2 | 2018-05-29 |
Object holder and lithographic apparatus Grant 9,915,877 - Laurent , et al. March 13, 2 | 2018-03-13 |
Object Holder And Lithographic Apparatus App 20170315454 - LAURENT; Thibault Simon Mathieu ;   et al. | 2017-11-02 |
Support Table For A Lithographic Apparatus, Method Of Loading A Substrate, Lithographic Apparatus And Device Manufacturing Method App 20170292566 - TROMP; Siegfried Alexander ;   et al. | 2017-10-12 |
Object holder and lithographic apparatus Grant 9,785,055 - Laurent , et al. October 10, 2 | 2017-10-10 |
Method For Compensating for an Exposure Error, a Device Manufacturing Method, a Substrate Table, a Lithographic Apparatus, a Control System, a Method for Measuring Reflectivity and a Method for Measuring a Dose of EUV Radiation App 20170115578 - BERENDSEN; Christianus Wilhelmus Johannes ;   et al. | 2017-04-27 |
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, And Method Of Manufacturing A Substrate Holder App 20160170314 - LAFARRE; Raymond Wilhelmus Louis ;   et al. | 2016-06-16 |
Substrate holder, lithographic apparatus, and device manufacturing method Grant 9,298,104 - Tromp , et al. March 29, 2 | 2016-03-29 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Grant 9,256,139 - Lafarre , et al. February 9, 2 | 2016-02-09 |
Object Holder And Lithographic Apparatus App 20150131064 - Laurent; Thibault Simon Mathieu ;   et al. | 2015-05-14 |
Substrate Holder, Lithographic Apparatus, And Device Manufacturing Method App 20150092168 - Tromp; Siegfried Alexander ;   et al. | 2015-04-02 |
Substrate holder, lithographic apparatus, and device manufacturing method involving a heater and/or temperature sensor Grant 8,908,143 - Tromp , et al. December 9, 2 | 2014-12-09 |
Substrate Holder, Lithographic Apparatus, And Device Manufacturing Method App 20130189802 - TROMP; Siegfried Alexander ;   et al. | 2013-07-25 |
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, And Method Of Manufacturing A Substrate Holder App 20120212725 - LAFARRE; Raymond Wilhelmus Louis ;   et al. | 2012-08-23 |