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Patent applications and USPTO patent grants for Tritchkov; Alexander V..The latest application filed is for "inverse lithography for high transmission attenuated phase shift mask design and creation".
Patent | Date |
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Forming separation directives using a printing feasibility analysis Grant 8,640,059 - Sahouria , et al. January 28, 2 | 2014-01-28 |
Inverse lithography for high transmission attenuated phase shift mask design and creation Grant 8,510,686 - Hendrickx , et al. August 13, 2 | 2013-08-13 |
Inverse Lithography For High Transmission Attenuated Phase Shift Mask Design And Creation App 20120117523 - HENDRICKX; Eric Henri Jan ;   et al. | 2012-05-10 |
Inverse Lithography For High Transmission Attenuated Phase Shift Mask Design And Creation App 20100216061 - Hendrickx; Eric Henri Jan ;   et al. | 2010-08-26 |
Combining image imbalance compensation and optical proximity correction in designing phase shift masks App 20060051680 - Tritchkov; Alexander V. ;   et al. | 2006-03-09 |
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