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Patent applications and USPTO patent grants for Trinh; Son N..The latest application filed is for "method and apparatus for sealing electrical contacts during an electrochemical deposition process".
Patent | Date |
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Method and apparatus for sealing electrical contacts during an electrochemical deposition process Grant 7,067,045 - Keigler , et al. June 27, 2 | 2006-06-27 |
Plating uniformity control by contact ring shaping Grant 7,025,862 - Herchen , et al. April 11, 2 | 2006-04-11 |
Method and apparatus for sealing electrical contacts during an electrochemical deposition process App 20040074762 - Keigler, Arthur ;   et al. | 2004-04-22 |
Plating uniformity control by contact ring shaping App 20040074761 - Herchen, Harald ;   et al. | 2004-04-22 |
Oxide treatment and pressure control for electrodeposition App 20040069651 - Herchen, Harald ;   et al. | 2004-04-15 |
Resonant chamber applicator for remote plasma source Grant 6,603,269 - Vo , et al. August 5, 2 | 2003-08-05 |
Showerhead with reduced contact area Grant 6,461,435 - Littau , et al. October 8, 2 | 2002-10-08 |
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