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Patent applications and USPTO patent grants for Trickett; Douglas M..The latest application filed is for "chamferless via structures".
Patent | Date |
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Chamferless via structures Grant 10,957,588 - Lenhardt , et al. March 23, 2 | 2021-03-23 |
Chamferless via structures Grant 10,937,694 - Lenhardt , et al. March 2, 2 | 2021-03-02 |
Chamferless via structures Grant 10,903,118 - Lenhardt , et al. January 26, 2 | 2021-01-26 |
Chamferless Via Structures App 20190333813 - LENHARDT; Mark L. ;   et al. | 2019-10-31 |
Chamferless Via Structures App 20190333814 - LENHARDT; Mark L. ;   et al. | 2019-10-31 |
Chamferless via structures Grant 10,388,565 - Lenhardt , et al. A | 2019-08-20 |
Chamferless Via Structures App 20180269103 - LENHARDT; Mark L. ;   et al. | 2018-09-20 |
Chamferless via structures Grant 10,032,668 - Lenhardt , et al. July 24, 2 | 2018-07-24 |
Methods employing sacrificial barrier layer for protection of vias during trench formation Grant 9,799,559 - Siddiqui , et al. October 24, 2 | 2017-10-24 |
Self aligned via in integrated circuit Grant 9,768,113 - Feurprier , et al. September 19, 2 | 2017-09-19 |
Chamferless Via Structures App 20170133268 - LENHARDT; Mark L. ;   et al. | 2017-05-11 |
Chamferless via structures Grant 9,613,862 - Lenhardt , et al. April 4, 2 | 2017-04-04 |
Chamferless Via Structures App 20170062275 - LENHARDT; Mark L. ;   et al. | 2017-03-02 |
Chamferless Via Structures App 20170062331 - LENHARDT; Mark L. ;   et al. | 2017-03-02 |
Self Aligned Via In Integrated Circuit App 20160379929 - Feurprier; Yannick ;   et al. | 2016-12-29 |
Self aligned via in integrated circuit Grant 9,385,078 - Feurprier , et al. July 5, 2 | 2016-07-05 |
Self aligned via in integrated circuit Grant 9,373,582 - Feurprier , et al. June 21, 2 | 2016-06-21 |
Forming interconnect features with reduced sidewall tapering Grant 9,373,543 - Mont , et al. June 21, 2 | 2016-06-21 |
Method for top oxide rounding with protection of patterned features Grant 9,252,051 - Lee , et al. February 2, 2 | 2016-02-02 |
Method for thinning a bonding wafer Grant 8,476,165 - Trickett , et al. July 2, 2 | 2013-07-02 |
Method to remove capping layer of insulation dielectric in interconnect structures Grant 8,202,803 - Feurprier , et al. June 19, 2 | 2012-06-19 |
Ultra-low-k dual damascene structure and method of fabricating App 20120064713 - RUSSELL; Noel ;   et al. | 2012-03-15 |
Method to remove capping layer of insulation dielectric in interconnect structures App 20110143542 - FEURPRIER; Yannick ;   et al. | 2011-06-16 |
Method For Thinning A Bonding Wafer App 20100255682 - Trickett; Douglas M. ;   et al. | 2010-10-07 |
Damage-free ashing process and system for post low-k etch Grant 7,279,427 - Nishino , et al. October 9, 2 | 2007-10-09 |
Damage-free ashing process and system for post low-k etch App 20070032087 - Nishino; Masaru ;   et al. | 2007-02-08 |
Method for coating internal surface of plasma processing chamber App 20050112289 - Trickett, Douglas M. ;   et al. | 2005-05-26 |
Method for coating internal surface of plasma processing chamber App 20050084617 - Trickett, Douglas M. ;   et al. | 2005-04-21 |
Method for coating internal surface of plasma processing chamber Grant 6,875,477 - Trickett , et al. April 5, 2 | 2005-04-05 |
Method for coating internal surface of plasma processing chamber App 20040151841 - Trickett, Douglas M. ;   et al. | 2004-08-05 |
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