Travis; Glenn W.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Travis; Glenn W..The latest application filed is for "wafer carrier head assembly".
- Travis; Glenn W. - Sunnyvale CA
- Travis; Glenn W. - Sherman Oaks CA
| Patent | Date |
|---|---|
| Wafer carrier head assembly Grant 6,666,756 - Travis December 23, 2 | 2003-12-23 |
| System for wafer carrier in-process clean and rinse Grant 6,659,116 - Williams , et al. December 9, 2 | 2003-12-09 |
| Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization Grant 6,328,637 - Labunsky , et al. December 11, 2 | 2001-12-11 |
| Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization Grant 6,086,460 - Labunsky , et al. July 11, 2 | 2000-07-11 |
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