Patent | Date |
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Optical substance analyzer Grant 7,212,693 - Carr , et al. May 1, 2 | 2007-05-01 |
Molecular detection using an optical waveguide fixed to a cantilever Grant 7,158,693 - Tran , et al. January 2, 2 | 2007-01-02 |
Molecular detection using an optical waveguide fixed to a cantilever App 20060233483 - Tran; Alex T. ;   et al. | 2006-10-19 |
Optical shuttle system and method used in an optical switch Grant 7,116,855 - Yang , et al. October 3, 2 | 2006-10-03 |
Structure and method for a microelectromechanic cylindrical reflective diffraction grating spectrophotometer Grant 7,106,441 - Sun , et al. September 12, 2 | 2006-09-12 |
Mirror for an integrated device Grant 7,002,719 - Tran February 21, 2 | 2006-02-21 |
Molecular detection using an optical waveguide fixed to a cantilever Grant 6,987,898 - Tran , et al. January 17, 2 | 2006-01-17 |
Optical shuttle system and method used in an optical switch App 20060002652 - Yang; Fuqian ;   et al. | 2006-01-05 |
Piezo-resistive sensing of mirror position in an optical switch Grant 6,911,913 - Kim , et al. June 28, 2 | 2005-06-28 |
Optical substance analyzer App 20050135723 - Carr, Dustin W. ;   et al. | 2005-06-23 |
Molecular detection using an optical waveguide fixed to a cantilever App 20050018946 - Tran, Alex T. ;   et al. | 2005-01-27 |
Micromirror having counterbalancing structures and method for manufacturing same Grant 6,846,087 - Carr , et al. January 25, 2 | 2005-01-25 |
Structure and method for a microelectromechanic cylindrical reflective diffraction grating spectrophotometer App 20040145738 - Sun, Decai ;   et al. | 2004-07-29 |
Mirror for an integrated device App 20040136045 - Tran, Alex T. | 2004-07-15 |
Piezo-resistive sensing of mirror position in an optical switch App 20040061619 - Kim, Jungsang ;   et al. | 2004-04-01 |
Micromirror having counterbalancing structures and method for manufacturing same App 20040021963 - Carr, Dustin W. ;   et al. | 2004-02-05 |
Micromechanical and microoptomechanical structures with single crystal silicon exposure step Grant 6,661,070 - Zosel , et al. December 9, 2 | 2003-12-09 |
Process for manufacturing micromechanical and microoptomechanical structures with backside metalization Grant 6,506,620 - Scharf , et al. January 14, 2 | 2003-01-14 |
Micromechanical and microoptomechanical structures with single crystal silicon exposure step App 20020197762 - Zosel, Andrew J. ;   et al. | 2002-12-26 |
Micromechanical and microoptomechanical structures with backside metalization App 20020192852 - Scharf, Bruce R. ;   et al. | 2002-12-19 |
Process for manufacturing micromechanical and microoptomechanical structures with single crystal silicon exposure step Grant 6,479,315 - Zosel , et al. November 12, 2 | 2002-11-12 |
Method of forming protrusions on single crystal silicon structures built on silicon-on-insulator wafers Grant 6,413,793 - Lin , et al. July 2, 2 | 2002-07-02 |
Process for manufacture of microoptomechanical structures Grant 6,379,989 - Kubby , et al. April 30, 2 | 2002-04-30 |
Microelectromechanical structures defined from silicon on insulator wafers Grant 6,362,512 - Kubby , et al. March 26, 2 | 2002-03-26 |
Structure and method for a microelectromechanically tunable fabry-perot cavity spectrophotometer Grant 6,295,130 - Sun , et al. September 25, 2 | 2001-09-25 |
Scanning vertical cavity surface emitting laser array capable of page-width image scan Grant 6,257,739 - Sun , et al. July 10, 2 | 2001-07-10 |
Fabrication of scanning III-V compound light emitters integrated with Si-based actuators Grant 6,054,335 - Sun , et al. April 25, 2 | 2000-04-25 |