Toyoda; Satoru
Patent Applications and Registrations
Patent applications and USPTO patent grants for Toyoda; Satoru.The latest application filed is for "film-forming apparatus".
- Toyoda; Satoru - Susono N/A JP
- Toyoda; Satoru - Sizuoka N/A JP
- Toyoda; Satoru - Shizuoka-ken JP
- TOYODA; Satoru - Susono-shi JP
- TOYODA; Satoru - Shizuoka JP
- Toyoda; Satoru - Chigasaki JP
| Patent | Date |
|---|---|
| Film formation apparatus Grant 9,005,413 - Kodaira , et al. April 14, 2 | 2015-04-14 |
| Method for the formation of Co film and method for the formation of Cu interconnection film Grant 8,809,193 - Kumamoto , et al. August 19, 2 | 2014-08-19 |
| Method for forming tantalum nitride film Grant 8,796,142 - Gonohe , et al. August 5, 2 | 2014-08-05 |
| Film-forming Apparatus App 20140048413 - KODAIRA; Shuji ; et al. | 2014-02-20 |
| Film-forming Apparatus And Method For Cleaning Film-forming Apparatus App 20130239993 - Ogawa; Yohei ; et al. | 2013-09-19 |
| Method For The Formation Of Co Film And Method For The Formation Of Cu Interconnection Film App 20130023116 - Kumamoto; Shoichiro ; et al. | 2013-01-24 |
| Film Formation Apparatus App 20120118732 - Kodaira; Shuji ; et al. | 2012-05-17 |
| Coating Surface Processing Method And Coating Surface Processing Apparatus App 20120121818 - Kodaira; Shuji ; et al. | 2012-05-17 |
| Film-forming Apparatus App 20120111722 - Kodaira; Shuji ; et al. | 2012-05-10 |
| Film Formation Apparatus App 20120103801 - Kodaira; Shuji ; et al. | 2012-05-03 |
| Film Formation Apparatus And Film Forming Method App 20120097527 - Kodaira; Shuji ; et al. | 2012-04-26 |
| Method for forming tantalum nitride film Grant 8,158,197 - Gonohe , et al. April 17, 2 | 2012-04-17 |
| Method for forming tantalum nitride film Grant 8,158,198 - Gonohe , et al. April 17, 2 | 2012-04-17 |
| Method for forming tantalum nitride film Grant 8,105,468 - Gonohe , et al. January 31, 2 | 2012-01-31 |
| Method for Forming Tantalum Nitride Film App 20100206716 - Gonohe; Narishi ; et al. | 2010-08-19 |
| Method For Forming Tantalum Nitride Film App 20090246375 - Gonohe; Narishi ; et al. | 2009-10-01 |
| Method for Forming Tantalum Nitride Film App 20090162565 - Gonohe; Narishi ; et al. | 2009-06-25 |
| Method for Forming Tantalum Nitride Film App 20090159431 - Gonohe; Narishi ; et al. | 2009-06-25 |
| Method for Forming Tantalum Nitride Film App 20090159430 - Gonohe; Narishi ; et al. | 2009-06-25 |
| Method Of Manufacturing Semiconductor Device App 20090120787 - OKAMURA; Yoshihiro ; et al. | 2009-05-14 |
| Method for Forming Tantalum Nitride Film App 20090104775 - Gonohe; Narishi ; et al. | 2009-04-23 |
| Bias Sputtering Film Forming Process And Bias Sputtering Film Forming Apparatus App 20090095617 - LEE; Myounggoo ; et al. | 2009-04-16 |
| Method for Forming Cu Film App 20090078580 - Yoshihama; Tomoyuki ; et al. | 2009-03-26 |
| Method for Forming Tantalum Nitride Film App 20080199601 - Gonohe; Narishi ; et al. | 2008-08-21 |
| Bias sputtering film forming process and bias sputtering film forming apparatus App 20040050687 - Lee, Myounggoo ; et al. | 2004-03-18 |
| Sputtering apparatus for filling pores of a circular substrate Grant 6,280,585 - Obinata , et al. August 28, 2 | 2001-08-28 |
| Fine particle collector trap for vacuum evacuating system Grant 4,816,046 - Maeba , et al. March 28, 1 | 1989-03-28 |
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