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Patent applications and USPTO patent grants for Toyoda; Keigo.The latest application filed is for "plasma processing apparatus and gas introducing method".
Patent | Date |
---|---|
Method for processing workpiece Grant 11,056,370 - Ogawa , et al. July 6, 2 | 2021-07-06 |
Plasma Processing Apparatus And Gas Introducing Method App 20210166918 - UDA; Mayo ;   et al. | 2021-06-03 |
Method For Processing Workpiece App 20190189493 - OGAWA; Shuhei ;   et al. | 2019-06-20 |
Plasma Processing Apparatus App 20190098740 - YAMAZAWA; Yohei ;   et al. | 2019-03-28 |
Temperature control method and plasma processing apparatus Grant 10,163,607 - Toyoda , et al. Dec | 2018-12-25 |
Plasma processing method Grant 9,818,582 - Murakami , et al. November 14, 2 | 2017-11-14 |
Etching method and etching apparatus Grant 9,728,418 - Toyoda , et al. August 8, 2 | 2017-08-08 |
Plasma Processing Method App 20160372308 - MURAKAMI; Hiraku ;   et al. | 2016-12-22 |
Temperature Control Method And Plasma Processing Apparatus App 20160365229 - TOYODA; Keigo ;   et al. | 2016-12-15 |
Etching Method And Etching Apparatus App 20160079074 - TOYODA; Keigo ;   et al. | 2016-03-17 |
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