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Diffractive Optical Element App 20200116908 - TOYAMA; Nobuhito | 2020-04-16 |
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Diffractive Optical Device, And Aligner Comprising That Device App 20090168040 - Toyama; Nobuhito ;   et al. | 2009-07-02 |
Designing method and device for phase shift mask Grant 7,367,010 - Mesuda , et al. April 29, 2 | 2008-04-29 |
Antireflection structure Grant 7,297,386 - Suzuki , et al. November 20, 2 | 2007-11-20 |
Designing method and device for phase shift mask Grant 7,287,240 - Toyama , et al. October 23, 2 | 2007-10-23 |
Method of evaluating the exposure property of data to wafer Grant 7,117,140 - Toyama October 3, 2 | 2006-10-03 |
Designing method and device for phase shift mask App 20060141365 - Toyama; Nobuhito ;   et al. | 2006-06-29 |
Designing method and device for phase shift mask Grant 7,067,221 - Mesuda , et al. June 27, 2 | 2006-06-27 |
Designing method and device for phase shift mask App 20050262468 - Mesuda, Kei ;   et al. | 2005-11-24 |
Antireflection structure App 20050074579 - Suzuki, Toshiyuki ;   et al. | 2005-04-07 |
Method For Correcting Design Pattern Of Semiconductor Circuit, A Photomask Fabricated Using The Corrected Design Pattern Data, A Method For Inspecting The Photomask And A Method For Generating Pattern Data For Inspection Of Photomask Grant 6,821,683 - Toyama , et al. November 23, 2 | 2004-11-23 |
Phase mask for forming diffraction grating, method of fabricating phase mask, and method of forming diffraction grating App 20040131949 - Kurihara, Masaaki ;   et al. | 2004-07-08 |
Designing method and device for phase shift mask App 20040101766 - Mesuda, Kei ;   et al. | 2004-05-27 |
Design circuit pattern for test of semiconductor circuit Grant 6,694,500 - Toyama February 17, 2 | 2004-02-17 |
Method of forming minute focusing lens Grant 6,656,664 - Takahashi , et al. December 2, 2 | 2003-12-02 |
Method of forming minute focusing lens App 20030059725 - Takahashi, Yoichi ;   et al. | 2003-03-27 |
Method of evaluating the exposure property of data to wafer App 20020194576 - Toyama, Nobuhito | 2002-12-19 |
Method for correcting design pattern of semiconductor circuit, a photomask fabricated using the corrected design pattern data, a method for inspecting the photomask and a method for generating pattern data for inspection of photomask App 20020110742 - Toyama, Nobuhito ;   et al. | 2002-08-15 |
Design circuit pattern for test of semiconductor circuit App 20020075028 - Toyama, Nobuhito | 2002-06-20 |
Process for making photomask pattern data and photomask App 20020028523 - Toyama, Nobuhito ;   et al. | 2002-03-07 |