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Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method
Grant 11,145,483 - Nakayama , et al. October 12, 2 | 2021-10-12 |
Charged particle beam writing apparatus and charged particle beam writing method
Grant 10,998,164 - Touya , et al. May 4, 2 | 2021-05-04 |
Charged particle beam writing method and charged particle beam writing apparatus
Grant 10,504,686 - Ogasawara , et al. Dec | 2019-12-10 |
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method
App 20190371565 - TOUYA; Takanao ; et al. | 2019-12-05 |
Charged Particle Beam Writing Apparatus, Method Of Adjusting Beam Incident Angle To Target Object Surface, And Charged Particle Beam Writing Method
App 20190115185 - NAKAYAMA; Takahito ; et al. | 2019-04-18 |
Blanking device for multi charged particle beams, and multi charged particle beam irradiation apparatus
Grant 10,224,171 - Touya , et al. | 2019-03-05 |
Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method
Grant 10,192,712 - Nakayama , et al. Ja | 2019-01-29 |
Charged Particle Beam Writing Method And Charged Particle Beam Writing Apparatus
App 20180342366 - OGASAWARA; Munehiro ; et al. | 2018-11-29 |
Charged Particle Beam Writing Apparatus, Method Of Adjusting Beam Incident Angle To Target Object Surface, And Charged Particle Beam Writing Method
App 20180076002 - NAKAYAMA; Takahito ; et al. | 2018-03-15 |
Multi charged particle beam irradiation apparatus, multi charged particle beam irradiation method, and multi charged particle beam adjustment method
Grant 9,916,962 - Nishimura , et al. March 13, 2 | 2018-03-13 |
Blanking Device For Multi Charged Particle Beams, And Multi Charged Particle Beam Irradiation Apparatus
App 20170345612 - TOUYA; Takanao ; et al. | 2017-11-30 |
Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method
Grant 9,824,849 - Nakayama , et al. November 21, 2 | 2017-11-21 |
Multi Charged Particle Beam Irradiation Apparatus, Multi Charged Particle Beam Irradiation Method, And Multi Charged Particle Beam Adjustment Method
App 20170309440 - NISHIMURA; Shinsuke ; et al. | 2017-10-26 |
Inspection system and method for inspecting line width and/or positional errors of a pattern
Grant 9,406,117 - Touya , et al. August 2, 2 | 2016-08-02 |
Electron beam writing apparatus and electron beam writing method
Grant 9,373,424 - Touya , et al. June 21, 2 | 2016-06-21 |
Charged particle beam pattern writing method and charged particle beam writing apparatus that corrects beam rotation utilizing a correlation table
Grant 9,343,266 - Ogasawara , et al. May 17, 2 | 2016-05-17 |
Charged Particle Beam Writing Apparatus, Method Of Adjusting Beam Incident Angle To Target Object Surface, And Charged Particle Beam Writing Method
App 20160071682 - NAKAYAMA; Takahito ; et al. | 2016-03-10 |
Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method
Grant 9,236,223 - Nakayama , et al. January 12, 2 | 2016-01-12 |
Inspection System And Method For Inspecting Line Width And/or Positional Errors Of A Pattern
App 20150193918 - TOUYA; Takanao ; et al. | 2015-07-09 |
Inspection system and method for inspecting line width and/or positional errors of a pattern
Grant 9,036,896 - Touya , et al. May 19, 2 | 2015-05-19 |
Multi charged particle beam writing apparatus and multi charged particle beam writing method with fixed voltage ratio einzel lens
Grant 8,927,941 - Touya , et al. January 6, 2 | 2015-01-06 |
Charged particle beam writing apparatus
Grant 8,884,254 - Touya , et al. November 11, 2 | 2014-11-11 |
Multi charged particle beam writing apparatus
Grant 8,835,868 - Touya , et al. September 16, 2 | 2014-09-16 |
Electron beam writing apparatus and electron beam writing method
Grant 8,816,276 - Touya , et al. August 26, 2 | 2014-08-26 |
Charged particle beam writing apparatus and charged particle beam writing method
Grant 8,791,422 - Touya , et al. July 29, 2 | 2014-07-29 |
Charged Particle Beam Writing Apparatus, Method Of Adjusting Beam Incident Angle To Target Object Surface, And Charged Particle Beam Writing Method
App 20140203185 - NAKAYAMA; Takahito ; et al. | 2014-07-24 |
Multi Charged Particle Beam Writing Apparatus
App 20140175302 - TOUYA; Takanao ; et al. | 2014-06-26 |
Charged Particle Beam Writing Apparatus
App 20140175303 - TOUYA; Takanao ; et al. | 2014-06-26 |
Charged Particle Beam Pattern Writing Method And Charged Particle Beam Writing Apparatus
App 20140061499 - Ogasawara; Munehiro ; et al. | 2014-03-06 |
Charged particle beam writing apparatus and method
Grant 8,610,096 - Touya December 17, 2 | 2013-12-17 |
Multi Charged Particle Beam Writing Apparatus And Multi Charged Particle Beam Writing Method
App 20130240750 - Touya; Takanao ; et al. | 2013-09-19 |
Electron Beam Writing Apparatus And Electron Beam Writing Method
App 20130216953 - TOUYA; Takanao ; et al. | 2013-08-22 |
Electron Beam Writing Apparatus And Electron Beam Writing Method
App 20130214172 - Touya; Takanao ; et al. | 2013-08-22 |
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method
App 20130149646 - TOUYA; Takanao ; et al. | 2013-06-13 |
Charged Particle Beam Writing Apparatus And Method
App 20120193553 - TOUYA; Takanao | 2012-08-02 |
Electron beam writing apparatus and method
Grant 8,067,753 - Touya November 29, 2 | 2011-11-29 |
Inspection System And Method For Inspecting Line Width And/or Positional Errors Of A Pattern
App 20110255770 - Touya; Takanao ; et al. | 2011-10-20 |
Electron Beam Writing Apparatus And Method
App 20090246655 - TOUYA; Takanao | 2009-10-01 |
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