Patent | Date |
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Enviromentally stable, thick film, chemically amplified resist Grant 11,385,543 - Toukhy , et al. July 12, 2 | 2022-07-12 |
Novolak/dnq Based, Chemically Amplified Photoresist App 20210382390 - Toukhy; Medhat A. ;   et al. | 2021-12-09 |
Negative Resist Formulation For Producing Undercut Pattern Profiles App 20200319555 - MUKHERJEE; Anupama ;   et al. | 2020-10-08 |
Enviromentally Stable, Thick Film, Chemically Amplified Resist App 20200183278 - Toukhy; Medhat A. ;   et al. | 2020-06-11 |
Thick film resists Grant 8,715,918 - Toukhy , et al. May 6, 2 | 2014-05-06 |
Thick Film Resists App 20090081589 - Toukhy; Medhat A. ;   et al. | 2009-03-26 |
Bottom Antireflective Coatings App 20080032229 - Toukhy; Medhat A. ;   et al. | 2008-02-07 |
Photoresist composition for imaging thick films Grant 7,255,970 - Toukhy , et al. August 14, 2 | 2007-08-14 |
Developable undercoating composition for thick photoresist layers App 20070105040 - Toukhy; Medhat A. ;   et al. | 2007-05-10 |
Photoresist composition for imaging thick films App 20070015080 - Toukhy; Medhat A. ;   et al. | 2007-01-18 |
Process for producing an image using a first minimum bottom antireflective coating composition App 20060199103 - Neisser; Mark O. ;   et al. | 2006-09-07 |
Process for producing an image using a first minimum bottom antireflective coating composition Grant 7,070,914 - Neisser , et al. July 4, 2 | 2006-07-04 |
Negative-working photoimageable bottom antireflective coating App 20060063105 - Oberlander; Joseph E. ;   et al. | 2006-03-23 |
Bottom antireflective coatings App 20050074688 - Toukhy, Medhat A. ;   et al. | 2005-04-07 |
Positive-working photoimageable bottom antireflective coating Grant 6,844,131 - Oberlander , et al. January 18, 2 | 2005-01-18 |
Photoacid generators App 20040265733 - Houlihan, Francis M. ;   et al. | 2004-12-30 |
Negative-working photoimageable bottom antireflective coating App 20030215736 - Oberlander, Joseph E. ;   et al. | 2003-11-20 |
Positive-working photoimageable bottom antireflective coating App 20030129531 - Oberlander, Joseph E. ;   et al. | 2003-07-10 |
Process for producing an image using a first minimum bottom antireflective coating composition App 20030129547 - Neisser, Mark O. ;   et al. | 2003-07-10 |
Selected trihydroxybenzophenone compounds and their use in photoactive compounds and radiation sensitive mixtures Grant 5,019,478 - Toukhy , et al. May 28, 1 | 1991-05-28 |
Positive photoresist with cresol-formaldehyde novolak resin and photosensitive naphthoquinone diazide Grant 4,587,196 - Toukhy * May 6, 1 | 1986-05-06 |
Positive photoresist composition with cresol-formaldehyde novolak resins Grant 4,529,682 - Toukhy July 16, 1 | 1985-07-16 |
Positive novolak photoresist compositions Grant 4,377,631 - Toukhy , et al. March 22, 1 | 1983-03-22 |