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3D printing process for producing a spectacle lens Grant 11,400,668 - von Blanckenhagen , et al. August 2, 2 | 2022-08-02 |
Refractive optical component and spectacle lens produced therefrom, method for producing a refractive optical component, computer program product, construction data of a spectacle lens stored on a data medium, device for additive Grant 11,279,104 - Totzeck , et al. March 22, 2 | 2022-03-22 |
Method For Correcting Centering Parameters And/or An Axial Position And Refractive Optical Component And Spectacle Lens Produced Therefrom, Method For Producing A Refractive Optical Component, Computer Program Product, Construction Data Of A Spectacle Lens Stored On A Data Medium, Device For Additiv App 20210362444 - Totzeck; Michael ;   et al. | 2021-11-25 |
Inspection Of Bonding Quality Of Transparent Materials Using Optical Coherence Tomography App 20210215470 - TOTZECK; Michael ;   et al. | 2021-07-15 |
Adaptive Closed-Loop Control of Additive Manufacturing for Producing a Workpiece App 20210107215 - BAUZA; Marcin B. ;   et al. | 2021-04-15 |
Method and apparatus for determining a defocusing valve and for image-based determination of a dimensional size Grant 10,719,915 - Jester , et al. | 2020-07-21 |
Method and Device for Additive Manufacturing App 20200223146 - TOTZECK; Michael ;   et al. | 2020-07-16 |
Spectacle lens and method for producing same Grant 10,670,884 - Gloge , et al. | 2020-06-02 |
Material Testing By Angle-Variable Illumination App 20200158499 - STOPPE; Lars ;   et al. | 2020-05-21 |
3d Printing Process For Producing A Spectacle Lens App 20190240938 - von Blanckenhagen; Bernhard ;   et al. | 2019-08-08 |
Spectacle Lens And Method For Producing Same App 20190243161 - Gloge; Thomas ;   et al. | 2019-08-08 |
Method of operating a projection exposure tool for microlithography Grant 10,241,423 - Conradi , et al. | 2019-03-26 |
Microlithography illumination system and microlithography illumination optical unit Grant 9,778,576 - Fiolka , et al. October 3, 2 | 2017-10-03 |
Method And Apparatus For Determining A Defocussing Value And For Image-based Determination Of A Dimensional Size App 20170249722 - JESTER; Philipp ;   et al. | 2017-08-31 |
Method Of Operating A Projection Exposure Tool For Microlithography App 20160342097 - Conradi; Olaf ;   et al. | 2016-11-24 |
Method of operating a projection exposure tool for microlithography Grant 9,442,381 - Conradi , et al. September 13, 2 | 2016-09-13 |
Test sample device and test method for an optical microscope with subwavelength resolution Grant 9,411,145 - Kalkbrenner , et al. August 9, 2 | 2016-08-09 |
Microlithography Illumination System And Microlithography Illumination Optical Unit App 20160195820 - Fiolka; Damian ;   et al. | 2016-07-07 |
Microlithography illumination system and microlithography illumination optical unit Grant 9,304,405 - Fiolka , et al. April 5, 2 | 2016-04-05 |
Microscope and microscopy method for space-resolved measurement of a predetermined structure, in particular a structure of a lithographic mask Grant 9,134,626 - Mann , et al. September 15, 2 | 2015-09-15 |
Projection objective for microlithography with stray light compensation and related methods Grant 9,063,439 - Goehnermeier , et al. June 23, 2 | 2015-06-23 |
Microlithographic projection exposure apparatus Grant 8,982,325 - Totzeck , et al. March 17, 2 | 2015-03-17 |
Projection exposure system, method for manufacturing a micro-structured structural member by the aid of such a projection exposure system and polarization-optical element adapted for use in such a system Grant 8,854,606 - Mann , et al. October 7, 2 | 2014-10-07 |
Microlithographic exposure method as well as a projection exposure system for carrying out the method Grant 8,767,181 - Gruner , et al. July 1, 2 | 2014-07-01 |
Method and apparatus for measuring structures on photolithography masks Grant 8,736,849 - Stroessner , et al. May 27, 2 | 2014-05-27 |
Test Sample Device And Test Method For An Optical Microscope With Subwavelength Resolution App 20140055593 - Kalkbrenner; Thomas ;   et al. | 2014-02-27 |
Method For Mask Inspection, And Mask Inspection Installation App 20130335552 - Feldmann; Heiko ;   et al. | 2013-12-19 |
Projection system with compensation of intensity variations and compensation element therefor Grant 8,605,257 - Scheible , et al. December 10, 2 | 2013-12-10 |
Optical system of a microlithographic projection exposure apparatus and microlithographic exposure method Grant 8,593,618 - Totzeck November 26, 2 | 2013-11-26 |
Method Of Operating A Projection Exposure Tool For Microlithography App 20130301024 - Conradi; Olaf ;   et al. | 2013-11-14 |
Transmitting optical element and objective for a microlithographic projection exposure apparatus Grant 8,570,488 - Clauss , et al. October 29, 2 | 2013-10-29 |
Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection Grant RE44,216 - Totzeck , et al. May 14, 2 | 2013-05-14 |
Projection objective for microlithography Grant 8,436,982 - Beierl , et al. May 7, 2 | 2013-05-07 |
Microlithographic projection exposure apparatus Grant 8,395,753 - Fiolka , et al. March 12, 2 | 2013-03-12 |
Lithographic apparatus and device manufacturing method Grant 8,339,574 - Totzeck , et al. December 25, 2 | 2012-12-25 |
Projection objective of a microlithographic projection exposure apparatus Grant 8,325,426 - Schuster , et al. December 4, 2 | 2012-12-04 |
Illumination system for a microlithography projection exposure apparatus Grant 8,305,558 - Gruner , et al. November 6, 2 | 2012-11-06 |
Interference systems for microlithgraphic projection exposure systems Grant 8,294,991 - Mueller , et al. October 23, 2 | 2012-10-23 |
Optical system of a microlithographic projection exposure apparatus Grant 8,237,918 - Totzeck , et al. August 7, 2 | 2012-08-07 |
Optical apparatus and method for modifying the imaging behavior of such apparatus Grant 8,169,595 - Schriever , et al. May 1, 2 | 2012-05-01 |
Microlithographic Projection Exposure Apparatus App 20120092637 - Totzeck; Michael ;   et al. | 2012-04-19 |
Optimization and matching of optical systems by use of orientation Zernike polynomials Grant 8,126,669 - Totzeck , et al. February 28, 2 | 2012-02-28 |
Microlithographic projection exposure apparatus Grant 8,107,054 - Totzeck , et al. January 31, 2 | 2012-01-31 |
Projection Exposure System, Method For Manufacturing A Micro-structured Structural Member By The Aid Of Such A Projection Exposure System And Polarization-optical Element Adapted For Use In Such A System App 20110242517 - Mann; Hans-Jurgen ;   et al. | 2011-10-06 |
Method And Apparatus For Measuring Structures On Photolithography Masks App 20110242544 - Stroessner; Ulrich ;   et al. | 2011-10-06 |
Illumination system or projection lens of a microlithographic exposure system Grant 8,031,326 - Totzeck , et al. October 4, 2 | 2011-10-04 |
Projection Objective Of A Microlithographic Projection Exposure Apparatus App 20110235013 - Schuster; Karl-Heinz ;   et al. | 2011-09-29 |
Projection objective of a microlithographic projection exposure apparatus Grant 7,982,969 - Schuster , et al. July 19, 2 | 2011-07-19 |
Projection exposure system, method for manufacturing a micro-structured structural member by the aid of such a projection exposure system and polarization-optical element adapted for use in such a system Grant 7,982,854 - Mann , et al. July 19, 2 | 2011-07-19 |
Method for determining intensity distribution in the image plane of a projection exposure arrangement Grant 7,961,297 - Greif-Wuestenbecker , et al. June 14, 2 | 2011-06-14 |
Optical System Of A Microlithographic Projection Exposure Apparatus And Microlithographic Exposure Method App 20110122391 - Totzeck; Michael | 2011-05-26 |
Microlithography Illumination System And Microlithography Illumination Optical Unit App 20110122392 - Fiolka; Damian ;   et al. | 2011-05-26 |
Method for approximating an influence of an optical system on the state of polarization of optical radiation Grant 7,924,436 - Mengel , et al. April 12, 2 | 2011-04-12 |
Microlithographic Exposure Method As Well As A Projection Exposure System For Carrying Out The Method App 20110069296 - GRUNER; Toralf ;   et al. | 2011-03-24 |
Microlithographic Projection Exposure Apparatus App 20110007293 - Fiolka; Damian ;   et al. | 2011-01-13 |
Microlithographic exposure method as well as a projection exposure system for carrying out the method Grant 7,847,921 - Gruner , et al. December 7, 2 | 2010-12-07 |
Microlithographic projection exposure apparatus Grant 7,817,250 - Fiolka , et al. October 19, 2 | 2010-10-19 |
Projection exposure apparatus and method for operating the same Grant 7,808,615 - Gruner , et al. October 5, 2 | 2010-10-05 |
Projection Objective For Microlithography App 20100201959 - Beierl; Helmut ;   et al. | 2010-08-12 |
Microscope And Microscopy Method For Space-resolved Measurement Of A Predetermined Structure, In Particular A Structure Of A Lithographic Mask App 20100142042 - Mann; Hans-Juergen ;   et al. | 2010-06-10 |
Optical System Of A Microlithographic Projection Exposure Apparatus App 20100134891 - Mueller; Ralf ;   et al. | 2010-06-03 |
Method for describing, evaluating and improving optical polarization properties of a microlithographic projection exposure apparatus Grant 7,728,975 - Totzeck , et al. June 1, 2 | 2010-06-01 |
Method And Apparatus For Determining The Position Of A Structure On A Carrier Relative To A Reference Point Of The Carrier App 20100104128 - Arnz; Michael ;   et al. | 2010-04-29 |
Projection Objective For Microlithography App 20100079741 - Kraehmer; Daniel ;   et al. | 2010-04-01 |
Projection Objective For Microlithography App 20100079739 - Goehnermeier; Aksel ;   et al. | 2010-04-01 |
Optical System Of A Microlithographic Projection Exposure Apparatus App 20090323042 - Totzeck; Michael ;   et al. | 2009-12-31 |
Specification, Optimization And Matching Of Optical Systems By Use Of Orientational Zernike Polynomials App 20090306921 - Totzeck; Michael ;   et al. | 2009-12-10 |
Projection Objective Of A Microlithographic Projection Exposure Apparatus App 20090284831 - Schuster; Karl-Heinz ;   et al. | 2009-11-19 |
Illumination System For A Microlithography Projection Exposure Apparatus App 20090213356 - Gruner; Toralf ;   et al. | 2009-08-27 |
Transmitting Optical Element And Objective For A Microlithographic Projection Exposure Apparatus App 20090201478 - Clauss; Wilfried ;   et al. | 2009-08-13 |
Optical Apparatus And Method For Modifying The Imaging Behavior Of Such Apparatus App 20090174876 - Schriever; Martin ;   et al. | 2009-07-09 |
Imaging system for emulation of a high aperture scanning system Grant 7,535,640 - Totzeck , et al. May 19, 2 | 2009-05-19 |
Microlithographic Projection Exposure Apparatus App 20090073398 - Totzeck; Michael ;   et al. | 2009-03-19 |
Microlithographic Exposure Method As Well As A Projection Exposure System For Carrying Out The Method App 20090040496 - GRUNER; Toralf ;   et al. | 2009-02-12 |
Projection Lens Of A Microlithographic Exposure System App 20090021830 - Totzeck; Michael ;   et al. | 2009-01-22 |
Microlithographic Projection Exposure Apparatus App 20090021719 - Fiolka; Damian ;   et al. | 2009-01-22 |
Arrangement of optical elements in a microlithographic projection exposure apparatus Grant 7,474,469 - Totzeck , et al. January 6, 2 | 2009-01-06 |
Lithographic Apparatus and Device Manufacturing Method App 20080304037 - TOTZECK; Michael ;   et al. | 2008-12-11 |
Projection exposure apparatus Grant 7,463,422 - Kamenow , et al. December 9, 2 | 2008-12-09 |
Lithographic apparatus and device manufacturing method Grant 7,423,727 - Totzeck , et al. September 9, 2 | 2008-09-09 |
Method for Determining Intensity Distribution in the Image Plane of a Projection Exposure Arrangement App 20080212060 - Greif-Wuestenbecker; Joern ;   et al. | 2008-09-04 |
Illumination System Or Projection Lens Of A Microlithographic Exposure System App 20080204877 - Totzeck; Michael ;   et al. | 2008-08-28 |
Optical System, In Particular Objective Or Illumination System For A Microlithographic Projection Exposure Apparatus App 20080198455 - Totzeck; Michael ;   et al. | 2008-08-21 |
Projection Exposure System, Method For Manufacturing a Micro-Structured Structural Member by the Aid of Such a Projection Exposure System and Polarization-Optical Element Adapted for Use in Such a System App 20080192225 - Mann; Hans-Jurgen ;   et al. | 2008-08-14 |
Optically polarizing retardation arrangement, and a microlithography projection exposure machine Grant 7,411,656 - Totzeck , et al. August 12, 2 | 2008-08-12 |
Microlithographic exposure method as well as a projection exposure system for carrying out the method Grant 7,408,616 - Gruner , et al. August 5, 2 | 2008-08-05 |
Optical system, in particular illumination system, of a microlithographic projection exposure apparatus Grant 7,405,808 - Gruner , et al. July 29, 2 | 2008-07-29 |
Projection System with Compensation of Intensity Variations and Compensation Element Therefor App 20080094599 - Scheible; Patrick ;   et al. | 2008-04-24 |
Method And Apparatus For Determining The Influencing Of The State Of Polarization By An Optical System, And An Analyser App 20080037905 - Wegmann; Ulrich ;   et al. | 2008-02-14 |
Method of optimizing an objective with fluoride crystal lenses, and objective with fluoride crystal lenses Grant 7,321,465 - Totzeck , et al. January 22, 2 | 2008-01-22 |
Projection Exposure Apparatus And Method For Operating The Same App 20080002167 - Gruner; Toralf ;   et al. | 2008-01-03 |
Microlithographic Projection Exposure Apparatus App 20080002172 - Totzeck; Michael | 2008-01-03 |
Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser Grant 7,286,245 - Wegmann , et al. October 23, 2 | 2007-10-23 |
Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection Grant 7,286,284 - Totzeck , et al. October 23, 2 | 2007-10-23 |
Method of determining lens materials for a projection exposure apparatus App 20070195423 - Kamenov; Vladimir ;   et al. | 2007-08-23 |
Method for approximating an influence of an optical system on the state of polarization of optical radiation App 20070182969 - Mengel; Markus ;   et al. | 2007-08-09 |
Method of determining lens materials for a projection exposure apparatus Grant 7,239,450 - Kamenov , et al. July 3, 2 | 2007-07-03 |
Optical element, in particular for an objective or an illumination system of a microlithographic projection exposure apparatus App 20070007491 - Mueller; Ralf ;   et al. | 2007-01-11 |
Lithographic apparatus and device manufacturing method App 20060164621 - Totzeck; Michael ;   et al. | 2006-07-27 |
Optically polarizing retardation arrangement, and a microlithography projection exposure machine App 20060152701 - Totzeck; Michael ;   et al. | 2006-07-13 |
Optically polarizing retardation arrangement, and microlithography projection exposure machine Grant 7,053,988 - Totzeck , et al. May 30, 2 | 2006-05-30 |
Method of determining lens materials for a projection exposure apparatus App 20060109560 - Kamenov; Vladimir ;   et al. | 2006-05-25 |
Arrangement of optical elements in a microlithographic projection exposure apparatus App 20060066962 - Totzeck; Michael ;   et al. | 2006-03-30 |
Polarizer device for generating a defined spatial distribution of polarization states App 20060028706 - Totzeck; Michael ;   et al. | 2006-02-09 |
Objective with birefringent lenses Grant 6,992,834 - Totzeck , et al. January 31, 2 | 2006-01-31 |
Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection App 20060012873 - Totzeck; Michael ;   et al. | 2006-01-19 |
Imaging system for emulation of a high aperture scanning system App 20060007541 - Totzeck; Michael ;   et al. | 2006-01-12 |
Optical system of a microlithographic projection exposure apparatus App 20050243222 - Maul, Manfred ;   et al. | 2005-11-03 |
Objective with birefringent lenses App 20050200966 - Totzeck, Michael ;   et al. | 2005-09-15 |
Method of optimizing an objective with fluoride crystal lenses, and objective with fluoride crystal lenses App 20050180023 - Totzeck, Michael ;   et al. | 2005-08-18 |
Optical system, in particular illumination system, of a microlithographic projection exposure apparatus App 20050152046 - Gruner, Toralf ;   et al. | 2005-07-14 |
Microlithographic exposure method as well as a projection exposure system for carrying out the method App 20050146704 - Gruner, Toralf ;   et al. | 2005-07-07 |
Mask for use in a microlithographic projection exposure apparatus App 20050123840 - Totzeck, Michael ;   et al. | 2005-06-09 |
Optical system with birefringent optical elements App 20050094268 - Fiolka, Damian ;   et al. | 2005-05-05 |
Microlithographic projection exposure apparatus App 20040257553 - Totzeck, Michael | 2004-12-23 |
Optically polarizing retardation arrangement, and microlithography projection exposure machine App 20040184019 - Totzeck, Michael ;   et al. | 2004-09-23 |
Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser App 20040114150 - Wegmann, Ulrich ;   et al. | 2004-06-17 |