| Patent | Date |
|---|
Method of production of uniform metal plates and sputtering targets made thereby
Grant 11,062,889 - Ivanov , et al. July 13, 2 | 2021-07-13 |
Tungsten-boron Sputter Targets And Films Made Thereby
App 20200332410 - IVANOV; Eugene Y. ; et al. | 2020-10-22 |
Optimized textured surfaces and methods of optimizing
Grant 10,792,788 - Smathers , et al. October 6, 2 | 2020-10-06 |
Method Of Making A Tantalum Sputter Target And Sputter Targets Made Thereby
App 20200240006 - Ivanov; Eugene Y. ; et al. | 2020-07-30 |
Method of making a tantalum sputter target and sputter targets made thereby
Grant 10,655,214 - Ivanov , et al. | 2020-05-19 |
Magnesium Oxide Sputtering Target And Method Of Making Same
App 20200010368 - Ivanov; Eugene Y. ; et al. | 2020-01-09 |
Ultra-fine Grain Size Tantalum Sputtering Targets With Improved Voltage Performance And Methods Thereby
App 20190161850 - Kuhn; Alex ; et al. | 2019-05-30 |
Titanium-tantalum Powders For Additive Manufacturing
App 20190084048 - Ivanov; Eugene Y. ; et al. | 2019-03-21 |
Method Of Making A Tantalum Sputtering Target With Increased Deposition Rate
App 20190055629 - Fisher; Matt ; et al. | 2019-02-21 |
Method Of Production Of Uniform Metal Plates And Sputtering Targets Made Thereby
App 20180374690 - Ivanov; Eugene Y. ; et al. | 2018-12-27 |
Method Of Making Low Resistivity Tungsten Sputter Targets And Targets Made Thereby
App 20180312960 - Ivanov; Eugene Y. ; et al. | 2018-11-01 |
Method Of Making A Tantalum Sputter Target And Sputter Targets Made Thereby
App 20180080120 - Ivanov; Eugene Y. ; et al. | 2018-03-22 |
Sputtering Target Having Reverse Bowng Target Geometry
App 20180044778 - Bailey; Robert S. ; et al. | 2018-02-15 |
Low deflection sputtering target assembly and methods of making same
Grant 9,831,073 - Yuan , et al. November 28, 2 | 2017-11-28 |
Radio Frequency Identification In-metal Installation And Isolation For Sputtering Target
App 20170098529 - Reed; Justin K. ; et al. | 2017-04-06 |
Diffusion-bonded Sputter Target Assembly And Method Of Manufacturing
App 20170084434 - Miao; Weifang ; et al. | 2017-03-23 |
Silicon Sputtering Target With Special Surface Treatment And Good Particle Performance And Methods Of Making The Same
App 20170076923 - Yuan; Yongwen ; et al. | 2017-03-16 |
Silicon sputtering target with special surface treatment and good particle performance and methods of making the same
Grant 9,566,618 - Yuan , et al. February 14, 2 | 2017-02-14 |
Boron-doped N-type Silicon Target
App 20170022603 - Ivanov; Eugene Y. ; et al. | 2017-01-26 |
Diffusion-bonded sputter target assembly and method of manufacturing
Grant 9,546,418 - Miao , et al. January 17, 2 | 2017-01-17 |
Soft-magnetic Based Targets Having Improved Pass Through Flux
App 20160298228 - Ivanov; Eugene Y. ; et al. | 2016-10-13 |
Optimized Textured Surfaces And Methods Of Optimizing
App 20160229029 - Smathers; David B. ; et al. | 2016-08-11 |
Silicon Sputtering Target With Enhanced Surface Profile And Improved Performance And Methods Of Making The Same
App 20150357169 - Yuan; Yongwen ; et al. | 2015-12-10 |
Method of making a sputter target and sputter targets made thereby
Grant 9,150,957 - Holcomb , et al. October 6, 2 | 2015-10-06 |
Monolithic aluminum alloy target and method of manufacturing
Grant 9,150,956 - Miao , et al. October 6, 2 | 2015-10-06 |
Low Deflection Sputtering Target Assembly And Methods Of Making Same
App 20150170887 - Yuan; Yongwen ; et al. | 2015-06-18 |
Sputtering target
Grant 8,992,748 - Ivanov , et al. March 31, 2 | 2015-03-31 |
Silicon Sputtering Target With Special Surface Treatment And Good Particle Performance And Methods Of Making The Same
App 20140311900 - Yuan; Yongwen ; et al. | 2014-10-23 |
Diffusion-bonded Sputter Target Assembly And Method Of Manufacturing
App 20140034490 - Miao; Weifang ; et al. | 2014-02-06 |
Monolithic Aluminum Alloy Target And Method Of Manufacturing
App 20130306467 - Miao; Weifang ; et al. | 2013-11-21 |
Ultra smooth face sputter targets and methods of producing same
Grant 8,556,681 - Banks , et al. October 15, 2 | 2013-10-15 |
Monolithic aluminum alloy target and method of manufacturing
Grant 8,551,267 - Miao , et al. October 8, 2 | 2013-10-08 |
High purity target manufacturing methods
Grant 8,506,882 - Ivanov August 13, 2 | 2013-08-13 |
Circular groove pressing mechanism and method for sputtering target manufacturing
Grant 8,453,487 - Ivanov , et al. June 4, 2 | 2013-06-04 |
Sputter Target
App 20120305393 - Ivanov; Eugene Y. ; et al. | 2012-12-06 |
Sputtering Target
App 20120298506 - Ivanov; Eugene Y. ; et al. | 2012-11-29 |
Systems And Methods For A Target And Backing Plate Assembly
App 20120267243 - Ivanov; Eugene Y. | 2012-10-25 |
Sputtering target assembly and method of making same
Grant 8,235,277 - Ivanov , et al. August 7, 2 | 2012-08-07 |
Sputtering Target Assembly And Method Of Making Same
App 20120000594 - Ivanov; Eugene Y. ; et al. | 2012-01-05 |
Non-planar sputter targets having crystallographic orientations promoting uniform deposition
Grant 8,037,727 - Bailey , et al. October 18, 2 | 2011-10-18 |
Circular Groove Pressing Mechanism And Method For Sputtering Target Manufacturing
App 20110219847 - Ivanov; Eugene Y. ; et al. | 2011-09-15 |
Method Of Making A Sputter Target And Sputter Targets Made Thereby
App 20110214987 - Holcomb; M. Kirk ; et al. | 2011-09-08 |
Method Of Bonding Rotatable Ceramic Targets To A Backing Structure
App 20110203921 - Ivanov; Eugene Y. | 2011-08-25 |
Sputtering Target With An Insulating Ring And A Gap Between The Ring And The Target
App 20110139614 - Ivanov; Eugene Y. ; et al. | 2011-06-16 |
Sputtering target with an insulating ring and a gap between the ring and the target
Grant 7,922,881 - Ivanov , et al. April 12, 2 | 2011-04-12 |
Monolithic Aluminum Alloy Target And Method Of Manufacturing
App 20110056828 - Miao; Weifang ; et al. | 2011-03-10 |
Sputter targets with expansion grooves for reduced separation
Grant 7,850,829 - Smathers December 14, 2 | 2010-12-14 |
Sputter targets and methods of manufacturing same to reduce particulate emission during sputtering
Grant 7,712,514 - Wickersham, Jr. , et al. May 11, 2 | 2010-05-11 |
Variable thickness plate for forming variable wall thickness physical vapor deposition target
Grant 7,708,868 - Smathers , et al. May 4, 2 | 2010-05-04 |
Ultra Smooth Face Sputter Targets And Methods Of Producing Same
App 20100105296 - Banks; Terry L. ; et al. | 2010-04-29 |
Process for making dense mixed metal Si3N4 targets
App 20100051453 - Smathers; David B. ; et al. | 2010-03-04 |
Sputtering target assembly and method of making same
App 20100044415 - Ivanov; Eugene Y. ; et al. | 2010-02-25 |
Systems and methods for a target and backing plate assembly
App 20100038241 - Ivanov; Eugene Y. | 2010-02-18 |
Copper Sputtering Target With Fine Grain Size And High Electromigration Resistance And Methods Of Making the Same
App 20100000860 - Yuan; Yongwen ; et al. | 2010-01-07 |
Process for making dense mixed metal Si.sub.3N.sub.4 targets
Grant 7,638,200 - Smathers , et al. December 29, 2 | 2009-12-29 |
Non-planar sputter targets having crystlallographic orientations promoting uniform deposition
App 20090235709 - Bailey; Robert S. ; et al. | 2009-09-24 |
High purity target manufacturing methods
App 20090214374 - Ivanov; Eugene Y. | 2009-08-27 |
Automated sputtering target production
Grant 7,561,937 - Reed , et al. July 14, 2 | 2009-07-14 |
Low leak O-ring seal
App 20090160137 - Smathers; David B. ; et al. | 2009-06-25 |
Sputter Targets with Expansion Grooves for Reduced Separation
App 20090120784 - Smathers; David B. | 2009-05-14 |
Sputter targets and methods of manufacturing same to reduce particulate emission during sputtering
App 20090078391 - Wickersham, JR.; Charles E. ; et al. | 2009-03-26 |
Electronic Device, Method of Manufacture of Same and Sputtering Target
App 20090022982 - Ivanov; Eugene Y. ; et al. | 2009-01-22 |
Sputtering Target
App 20090008786 - Ivanov; Eugene Y. ; et al. | 2009-01-08 |
Sputtering Target with an Insulating Ring and a Gap Between the Ring and the Target
App 20080164146 - Ivanov; Eugene Y. ; et al. | 2008-07-10 |
Systems and methods for non-contact measuring sputtering target thickness ultrasonics
Grant 7,334,479 - Leybovich February 26, 2 | 2008-02-26 |
Low Leak O-Ring Seal
App 20080029972 - Smathers; David B. ; et al. | 2008-02-07 |
High Purity Target Manufacturing Methods
App 20070243095 - Ivanov; Eugene Y. | 2007-10-18 |
Continuous Casting of Copper to Form Sputter Targets
App 20070227688 - Holcomb; Melvin K. | 2007-10-04 |
Method and apparatus for deposition of low-k dielectric materials
App 20070158178 - Leybovich; Alexander | 2007-07-12 |
Sputtering target assembly having low conductivity backing plate and method of making same
App 20070107185 - Bailey; Robert S. ; et al. | 2007-05-17 |
Variable thickness plate for forming variable wall thickness physical vapor deposition target
App 20070007131 - Smathers; David B. ; et al. | 2007-01-11 |
Systems and methods for non-contact measuring sputtering target thickness ultrasonics
App 20060266121 - Leybovich; Alexander | 2006-11-30 |
Friction fit target assembly for high power sputtering operation
Grant 7,114,643 - Ivanov , et al. October 3, 2 | 2006-10-03 |
Method for determining a critical size of an inclusion in aluminum or aluminum alloy sputtering target
Grant 7,087,142 - Wickersham, Jr. , et al. August 8, 2 | 2006-08-08 |
Process for making dense mixed metal si3n4 targets
App 20060166010 - Smathers; DavidB ; et al. | 2006-07-27 |
High purity sputter targets with target end-of-life indication and method of manufacture
Grant 7,063,773 - Ivanov , et al. June 20, 2 | 2006-06-20 |
Methods for making low silicon content ni-si sputtering targets and targets made thereby
App 20060118407 - Ivanov; Eugene Y. | 2006-06-08 |
Non-planar sputter targets having crystallographic orientations promoting uniform deposition
App 20060076234 - Bailey; RobertS ; et al. | 2006-04-13 |
Target and method of diffusion bonding target to backing plate
App 20060065517 - Ivanov; EugeneY ; et al. | 2006-03-30 |
Systems and methods for a target and backing plate assembly
App 20050284746 - Ivanov, Eugene Y. | 2005-12-29 |
Method of manufacturing sputter targets with internal cooling channels
Grant 6,955,852 - Ivanov October 18, 2 | 2005-10-18 |
Replaceable target sidewall insert with texturing
App 20050161322 - Smathers, David B. | 2005-07-28 |
Sputter targets and methods of manufacturing same to reduce particulate emission during sputtering
App 20050155456 - Wickersham, Charles E. JR. ; et al. | 2005-07-21 |
Method and apparatus for non-destructive target cleanliness characterization by types of flaws sorted by size and location
Grant 6,895,342 - Leybovich May 17, 2 | 2005-05-17 |
Method of manufacturing sputter targets with internal cooling channels
App 20050092604 - Ivanov, Eugene Y. | 2005-05-05 |
Target and method of optimizing target profile
Grant 6,872,284 - Ivanov , et al. March 29, 2 | 2005-03-29 |
Method of manufacturing sputter targets with internal cooling channels
Grant 6,840,427 - Ivanov January 11, 2 | 2005-01-11 |
Method for reducing the oxygen and oxide content in cobalt to produce cobalt sputtering targets
Grant 6,827,759 - Zhang December 7, 2 | 2004-12-07 |
Method for making Ni-Si magnetron sputtering targets and targets made thereby
Grant 6,780,295 - Ivanvov August 24, 2 | 2004-08-24 |
Hermetic sealing of target/backing plate assemblies using electron beam melted indium or tin
Grant 6,774,339 - Smathers , et al. August 10, 2 | 2004-08-10 |
Low temperature sputter target bonding method and target assemblies produced thereby
Grant 6,749,103 - Ivanov , et al. June 15, 2 | 2004-06-15 |
Cleanliness evaluation in sputter targets using phase
Grant 6,739,196 - Leybovich May 25, 2 | 2004-05-25 |
Method of assembling target and backing plates
Grant 6,725,522 - Ivanov , et al. April 27, 2 | 2004-04-27 |
Diffusion bonding of copper sputtering targets to backing plates using nickel alloy interlayers
Grant 6,619,537 - Zhang , et al. September 16, 2 | 2003-09-16 |
Diffusion bonding of high purity metals and metal alloys to aluminum backing plates using nickel or nickel alloy interlayers
Grant 6,579,431 - Bolcavage , et al. June 17, 2 | 2003-06-17 |
Method of ultrasonic on-line texture characterization
Grant 6,494,098 - Leybovich December 17, 2 | 2002-12-17 |
Insert target assembly and method of making same
App 20020134675 - Holcomb, Melvin K. ; et al. | 2002-09-26 |
Fine grain tantalum sputtering target and fabrication process
Grant 6,193,821 - Zhang February 27, 2 | 2001-02-27 |
Sputter target assembly having a metal-matrix-composite backing plate and methods of making same
Grant 6,183,686 - Bardus , et al. February 6, 2 | 2001-02-06 |
Non-contact protective package
Grant D434,316 - Simmers November 28, 2 | 2000-11-28 |
Diffusion bonded sputter target assembly and method of making
Grant 6,071,389 - Zhang June 6, 2 | 2000-06-06 |
Method for producing near net shape planar sputtering targets and an intermediate therefor
Grant 5,963,778 - Stellrecht October 5, 1 | 1999-10-05 |
Sputter target container
Grant D382,111 - Bardus , et al. August 12, 1 | 1997-08-12 |
Methods of bonding targets to backing plate members using gallium based solder pastes and target/backing plate assemblies bonded thereby
Grant 5,653,856 - Ivanov , et al. August 5, 1 | 1997-08-05 |
Methods of bonding targets to backing plate members using solder pastes and target/backing plate assemblies bonded thereby
Grant 5,593,082 - Ivanov , et al. January 14, 1 | 1997-01-14 |
Methods and structural combinations providing for backing plate reuse in sputter target/backing plate assemblies
Grant 5,522,535 - Ivanov , et al. June 4, 1 | 1996-06-04 |
Method of bonding tungsten titanium sputter targets to titanium plates and target assemblies produced thereby
Grant 5,397,050 - Mueller March 14, 1 | 1995-03-14 |
Method of welding sputtering target/backing plate assemblies
Grant 5,342,496 - Stellrecht August 30, 1 | 1994-08-30 |
Method for producing sputtering target for deposition of titanium, aluminum and nitrogen coatings, sputtering target made thereby, and method of sputtering with said targets
Grant 5,342,571 - Dittmar , et al. August 30, 1 | 1994-08-30 |
Cathode assembly for cathodic sputtering apparatus
Grant 5,269,899 - Fan December 14, 1 | 1993-12-14 |
Method of producing tungsten-titanium sputter targets and targets produced thereby
Grant 5,234,487 - Wickersham, Jr. , et al. August 10, 1 | 1993-08-10 |
Method of bonding a sputter target-backing plate assembly assemblies produced thereby
Grant 5,230,459 - Mueller , et al. July 27, 1 | 1993-07-27 |
Quick change sputter target assembly
Grant 5,147,521 - Belli , et al. September 15, 1 | 1992-09-15 |
Sputter target design
Grant 5,009,765 - Qamar , et al. April 23, 1 | 1991-04-23 |
Titanium nitride sputter targets
Grant 4,820,393 - Brat , et al. April 11, 1 | 1989-04-11 |
| 