Toshima; Takayuki

Patent Applications and Registrations

Patent applications and USPTO patent grants for Toshima; Takayuki.The latest application filed is for "cleaning composition, cleaning method, and method for manufacturing semiconductor".

Company Profile

6.81.76

Toshima; Takayuki - Kumamoto JP
Toshima; Takayuki - Tokyo JP
TOSHIMA; Takayuki - Koshi-shi Kumamoto
Toshima; Takayuki - Hillsboro OR
Toshima; Takayuki - Koshi N/A JP
Toshima; Takayuki - Koshi City JP
Toshima; Takayuki - Kumamoto-ken JP
Toshima; Takayuki - Nirasaki JP
Toshima; Takayuki - Futaba-Cho JP
Toshima; Takayuki - Yamanashi JP
Toshima; Takayuki - Yamanashi-Ken JP
Toshima; Takayuki - Nirasaki-Shi JP
Toshima; Takayuki - Koshi-Machi JP
Toshima; Takayuki - Shizuoka-ken JP
Toshima; Takayuki - Kitakoma-gun JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Cleaning composition, cleaning method, and method for manufacturing semiconductor Grant 11,441,101 - Hirano , et al. September 13, 2	2022-09-13
Washing method, washing device, storage medium, and washing composition Grant 11,355,362 - Hirano , et al. June 7, 2	2022-06-07
Cleaning Composition, Cleaning Method, And Method For Manufacturing Semiconductor App 20210284930 - HIRANO; Isao ; et al.	2021-09-16
Substrate Processing Apparatus, Substrate Processing Method, And Storage Medium Storing Program For Executing Substrate Processing Method App 20210217620 - KAGAWA; Koji ; et al.	2021-07-15
Aqueous cleaning solution and method of protecting features on a substrate during etch residue removal Grant 10,844,332 - Toshima , et al. November 24, 2	2020-11-24
Washing Method, Washing Device, Storage Medium, And Washing Composition App 20200098593 - HIRANO; Isao ; et al.	2020-03-26
Substrate Processing Apparatus, Substrate Processing Method, And Storage Medium With Program Stored Therein For Executing Substr App 20190279861 - Toshima; Takayuki ; et al.	2019-09-12
Substrate processing apparatus, substrate processing method, and storage medium with program stored therein for executing substrate processing method Grant 10,347,482 - Toshima , et al. July 9, 2	2019-07-09
Substrate liquid processing method, substrate liquid processing apparatus, and storage medium Grant 10,333,062 - Fujii , et al.	2019-06-25
Aqueous Cleaning Solution And Method Of Protecting Features On A Substrate During Etch Residue Removal App 20190185793 - Toshima; Takayuki ; et al.	2019-06-20
High-pressure container, substrate processing apparatus, and method for manufacturing high-pressure container Grant 10,207,349 - Mitsuoka , et al. Feb	2019-02-19
Substrate processing method, substrate processing apparatus, and storage medium Grant 10,199,240 - Hayashi , et al. Fe	2019-02-05
Separation and regeneration apparatus and substrate processing apparatus Grant 10,115,609 - Mitsuoka , et al. October 30, 2	2018-10-30
Substrate Liquid Processing Method, Substrate Liquid Processing Apparatus, And Storage Medium App 20180301623 - Fujii; Yasushi ; et al.	2018-10-18
Substrate processing method and storage medium Grant 10,096,462 - Hayashi , et al. October 9, 2	2018-10-09
Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium Grant 10,046,370 - Goshi , et al. August 14, 2	2018-08-14
Substrate Processing Apparatus, Substrate Processing Method, And Storage Medium With Program Stored Therein For Executing Substrate Processing Method App 20180040468 - Toshima; Takayuki ; et al.	2018-02-08
Substrate processing method, substrate processing apparatus, and storage medium Grant 9,881,784 - Ohno , et al. January 30, 2	2018-01-30
Substrate Processing Apparatus, Substrate Processing Method, Fluid Supplying Method And Storage Medium App 20170320107 - GOSHI; Gentaro ; et al.	2017-11-09
Plating apparatus, plating method and storage medium having plating program stored thereon Grant 9,731,322 - Tanaka , et al. August 15, 2	2017-08-15
Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium Grant 9,662,685 - Goshi , et al. May 30, 2	2017-05-30
Supercritical drying method for semiconductor substrate and supercritical drying apparatus Grant 9,583,330 - Ji , et al. February 28, 2	2017-02-28
Plating apparatus, plating method and storage medium Grant 9,421,569 - Tanaka , et al. August 23, 2	2016-08-23
Substrate Processing Method, Substrate Processing Apparatus, And Storage Medium App 20160118242 - Ohno; Hiroki ; et al.	2016-04-28
Substrate processing apparatus, substrate processing method, and storage medium Grant 9,236,280 - Toshima , et al. January 12, 2	2016-01-12
Separation And Regeneration Apparatus And Substrate Processing Apparatus App 20150258584 - Mitsuoka; Kazuyuki ; et al.	2015-09-17
Separation And Regeneration Apparatus And Substrate Processing Apparatus App 20150258465 - Mitsuoka; Kazuyuki ; et al.	2015-09-17
Separation And Regeneration Apparatus And Substrate Processing Apparatus App 20150258466 - Mitsuoka; Kazuyuki ; et al.	2015-09-17
Supercritical processing apparatus, substrate processing system and supercritical processing method Grant 9,076,643 - Toshima , et al. July 7, 2	2015-07-07
Substrate Processing Method And Template App 20140311530 - Iwatsu; Haruo ; et al.	2014-10-23
Plating Apparatus, Plating Method And Storage Medium Having Plating Program Stored Thereon App 20140302242 - Tanaka; Takashi ; et al.	2014-10-09
Supercritical Drying Method For Semiconductor Substrate And Supercritical Drying Apparatus App 20140250714 - JI; Linan ; et al.	2014-09-11
Semiconductor manufacturing apparatus and semiconductor manufacturing method Grant 8,770,138 - Hara , et al. July 8, 2	2014-07-08
Supercritical drying method for semiconductor substrate and supercritical drying apparatus Grant 8,771,429 - Ji , et al. July 8, 2	2014-07-08
High-pressure Container, Substrate Processing Apparatus, And Method For Manufacturing High-pressure Container App 20140145390 - Mitsuoka; Kazuyuki ; et al.	2014-05-29
Fluid heater, manufacturing method thereof, substrate processing apparatus including fluid heater, and substrate processing method Grant 8,701,308 - Hiroshiro , et al. April 22, 2	2014-04-22
Liquid treatment method and storage system Grant 8,652,344 - Tsurusaki , et al. February 18, 2	2014-02-18
Substrate Processing Method, Substrate Processing Apparatus And Storage Medium App 20140020721 - HAYASHI; Hidekazu ; et al.	2014-01-23
Liquid processing apparatus, liquid processing method, and storage medium Grant 8,617,656 - Nakamori , et al. December 31, 2	2013-12-31
Substrate Processing Apparatus, Substrate Processing Method, Fluid Supplying Method And Storage Medium App 20130333726 - GOSHI; Gentaro ; et al.	2013-12-19
Plating Apparatus, Plating Method And Storage Medium App 20130302525 - Tanaka; Takashi ; et al.	2013-11-14
Supercritical processing apparatus and supercritical processing method Grant 8,465,596 - Toshima , et al. June 18, 2	2013-06-18
Substrate carrying apparatus having circumferential sidewall and substrate processing system Grant 8,434,423 - Toshima , et al. May 7, 2	2013-05-07
Supercritical drying method and apparatus for semiconductor substrates Grant 8,372,212 - Sato , et al. February 12, 2	2013-02-12
Supercritical Drying Method For Semiconductor Substrate And Supercritical Drying Apparatus App 20130019905 - JI; Linan ; et al.	2013-01-24
Substrate Processing Method, Substrate Processing Apparatus, And Storage Medium App 20120304485 - Hayashi; Hidekazu ; et al.	2012-12-06
Substrate processing method and non-transitory storage medium for carrying out such method Grant 8,303,724 - Hiroshiro , et al. November 6, 2	2012-11-06
Supercritical Drying Method And Apparatus For Semiconductor Substrates App 20120247516 - SATO; Yohei ; et al.	2012-10-04
Substrate processing apparatus and substrate processing method Grant 8,235,061 - Toshima , et al. August 7, 2	2012-08-07
Substrate Liquid Processing Apparatus, Substrate Liquid Processing Method and Computer Readable Recording Medium Having Substrate Liquid Processing Program App 20120164339 - NAKAMORI; Mitsunori ; et al.	2012-06-28
Cap metal forming method Grant 8,206,785 - Toshima , et al. June 26, 2	2012-06-26
Substrate Processing Apparatus, Substrate Processing Method, and Storage Medium App 20120132230 - Toshima; Takayuki ; et al.	2012-05-31
Substrate Processing Method And Non-transitory Storage Medium For Carrying Out Such Method App 20110290280 - HIROSHIRO; Koukichi ; et al.	2011-12-01
Semiconductor Manufacturing Apparatus And Semiconductor Manufacturing Method App 20110265718 - Hara; Kenichi ; et al.	2011-11-03
Substrate processing apparatus including a drying mechanism using a fluid mixture of purified water and a volatile organic solvent Grant 8,015,984 - Hiroshiro , et al. September 13, 2	2011-09-13
Supercritical Processing Apparatus And Supercritical Processing Method App 20110214694 - TOSHIMA; Takayuki ; et al.	2011-09-08
Semiconductor manufacturing apparatus and semiconductor manufacturing method Grant 8,003,509 - Hara , et al. August 23, 2	2011-08-23
Liquid processing apparatus Grant 7,998,308 - Kaneko , et al. August 16, 2	2011-08-16
Substrate processing apparatus Grant 7,998,306 - Hiroshiro , et al. August 16, 2	2011-08-16
Fluid Heater, Manufacturing Method Thereof, Substrate Processing Apparatus Including Fluid Heater, And Substrate Processing Method App 20110099838 - Hiroshiro; Koukichi ; et al.	2011-05-05
Substrate Processing System, Substrate Processing Method, Recording Medium And Software App 20110011425 - TOSHIMA; Takayuki ; et al.	2011-01-20
Supercritical Processing Apparatus, Substrate Processing System And Supercritical Processing Method App 20110000507 - TOSHIMA; Takayuki ; et al.	2011-01-06
Substrate Processing Apparatus And Substrate Processing Method App 20110000512 - TOSHIMA; Takayuki ; et al.	2011-01-06
Liquid Processing Apparatus, Liquid Processing Method, And Storage Medium App 20100330283 - NAKAMORI; Mitsunori ; et al.	2010-12-30
Liquid processing system Grant 7,849,864 - Matsumoto , et al. December 14, 2	2010-12-14
Substrate processing system, substrate processing method, recording medium and software Grant 7,836,900 - Toshima , et al. November 23, 2	2010-11-23
Liquid processing apparatus Grant 7,793,610 - Akimoto , et al. September 14, 2	2010-09-14
Substrate Processing Method, Substrate Processing Apparatus, Program, Storage Medium, And Substitute Agent App 20100206337 - Hiroshiro; Koukichi ; et al.	2010-08-19
Substrate Carrying Apparatus And Substrate Processing System App 20100192992 - TOSHIMA; Takayuki ; et al.	2010-08-05
Substrate processing method, substrate processing apparatus and computer-readable memory medium Grant 7,731,799 - Toshima , et al. June 8, 2	2010-06-08
Cap Metal Forming Method App 20100075027 - Toshima; Takayuki ; et al.	2010-03-25
Semiconductor Manufacturing Apparatus And Semiconductor Manufacturing Method App 20090253258 - Hara; Kenichi ; et al.	2009-10-08
Liquid Treatment Method And Storage System App 20090179007 - TSURUSAKI; Kotaro ; et al.	2009-07-16
Substrate processing apparatus App 20090139656 - Hiroshiro; Koukichi ; et al.	2009-06-04
Substrate Processing Apparatus and Substrate Processing Method App 20090101186 - Hiroshiro; Koukichi ; et al.	2009-04-23
Substrate processing method Grant 7,482,281 - Fujii , et al. January 27, 2	2009-01-27
Substrate processing apparatus Grant 7,472,713 - Amai , et al. January 6, 2	2009-01-06
Substrate processing method Grant 7,410,543 - Toshima , et al. August 12, 2	2008-08-12
Substrate cleaning apparatus, substrate cleaning method, and storage medium App 20080178910 - Hiroshiro; Koukichi ; et al.	2008-07-31
Processing apparatus and substrate processing method Grant 7,387,131 - Kuroda , et al. June 17, 2	2008-06-17
Liquid processing system App 20080023049 - Matsumoto; Kazuhisa ; et al.	2008-01-31
Substrate processing method and apparatus Grant 7,300,598 - Konishi , et al. November 27, 2	2007-11-27
Liquid processing apparatus App 20070240638 - Akimoto; Masami ; et al.	2007-10-18
Liquid processing apparatus App 20070240824 - Kaneko; Satoshi ; et al.	2007-10-18
Substrate processing apparatus for resist film removal App 20070204885 - Toshima; Takayuki ; et al.	2007-09-06
Substrate processing system, substrate processing method, recording medium and software App 20070175062 - Toshima; Takayuki ; et al.	2007-08-02
Electroless plating apparatus and electroless plating method App 20070134431 - Hara; Kenichi ; et al.	2007-06-14
Substrate processing apparatus and substrate processing method Grant 7,229,522 - Toshima , et al. June 12, 2	2007-06-12
Electroless plating apparatus and electroless plating method App 20070128373 - Hara; Kenichi ; et al.	2007-06-07
Substrate processing method, substrate processing apparatus and computer-readable memory medium App 20070074747 - Toshima; Takayuki ; et al.	2007-04-05
Substrate processing method App 20070077768 - Fujii; Yasushi ; et al.	2007-04-05
Substrate processing apparatus for resist film removal Grant 7,191,785 - Toshima , et al. March 20, 2	2007-03-20
Substrate processing apparatus App 20060196531 - Amai; Masaru ; et al.	2006-09-07
Substrate processing apparatus Grant 7,063,094 - Amai , et al. June 20, 2	2006-06-20
Liquid treatment device and liquid treatment method App 20060060232 - Tsurusaki; Kotaro ; et al.	2006-03-23
Processing apparatus and processing method Grant 6,895,979 - Kohama , et al. May 24, 2	2005-05-24
Silylation treatment unit and method Grant 6,872,670 - Toshima , et al. March 29, 2	2005-03-29
Substrate processing method and substrate processing apparatus Grant 6,869,499 - Toshima , et al. March 22, 2	2005-03-22
Substrate processing method and substrate processing apparatus App 20050051246 - Toshima, Takayuki ; et al.	2005-03-10
Substrate processing method and apparatus App 20050011537 - Toshima, Takayuki ; et al.	2005-01-20
Substrate processing method and substrate processing apparatus Grant 6,817,790 - Toshima , et al. November 16, 2	2004-11-16
Substrate processing method and substrate processing apparatus Grant 6,817,368 - Toshima , et al. November 16, 2	2004-11-16
Substrate processing method and apparatus App 20040187896 - Konishi, Nobuo ; et al.	2004-09-30
Silylation treatment unit and method App 20040142580 - Toshima, Takayuki ; et al.	2004-07-22
Substrate processing apparatus and substrate processing method App 20040063319 - Toshima, Takayuki ; et al.	2004-04-01
Developing method and developing apparatus Grant 6,713,239 - Toshima , et al. March 30, 2	2004-03-30
Silylation treatment unit and method Grant 6,709,523 - Toshima , et al. March 23, 2	2004-03-23
Substrate processing method and substrate processing apparatus App 20040042790 - Toshima, Takayuki ; et al.	2004-03-04
Substrate processing apparatus Grant 6,688,020 - Toshima , et al. February 10, 2	2004-02-10
Film forming method and film forming system Grant 6,656,273 - Toshima , et al. December 2, 2	2003-12-02
Substrate processing method and substrate processing apparatus Grant 6,634,806 - Toshima , et al. October 21, 2	2003-10-21
Processing apparatus and substrate processing method App 20030172955 - Kuroda, Osamu ; et al.	2003-09-18
Substrate rinsing and drying method Grant 6,620,260 - Kumagai , et al. September 16, 2	2003-09-16
Substrate processing method and apparatus Grant 6,613,692 - Toshima , et al. September 2, 2	2003-09-02
Processing apparatus and processing method App 20030127117 - Kohama, Kyouji ; et al.	2003-07-10
Coating apparatus Grant 6,551,400 - Hasbe , et al. April 22, 2	2003-04-22
Processing apparatus and processing method Grant 6,536,452 - Kohama , et al. March 25, 2	2003-03-25
Substrate processing apparatus App 20030034056 - Amai, Masaru ; et al.	2003-02-20
Resist processing method and resist processing apparatus Grant 6,514,073 - Toshima , et al. February 4, 2	2003-02-04
Substrate processing method and substrate processing apparatus App 20020185225 - Toshima, Takayuki ; et al.	2002-12-12
Method and apparatus of processing surface of substrate App 20020155709 - Toshima, Takayuki ; et al.	2002-10-24
Developing method and developing apparatus App 20020122670 - Toshima, Takayuki ; et al.	2002-09-05
Substrate processing apparatus and substrate processing method App 20020096196 - Toshima, Takayuki ; et al.	2002-07-25
Developing method and developing apparatus Grant 6,398,429 - Toshima , et al. June 4, 2	2002-06-04
Substrate processing method and substrate processing apparatus App 20020045008 - Toshima, Takayuki ; et al.	2002-04-18
Substrate processing method and substrate processing apparatus App 20020037371 - Kumagai, Yoshio ; et al.	2002-03-28
Substrate processing method and substrate processing apparatus App 20010032396 - Toshima, Takayuki ; et al.	2001-10-25
Substrate processing method and substrate processing apparatus App 20010024767 - Toshima, Takayuki ; et al.	2001-09-27
Film forming method and film forming apparatus App 20010014224 - Hasebe, Keizo ; et al.	2001-08-16
Developing method and developing apparatus App 20010012456 - Konishi, Nobuo ; et al.	2001-08-09
Film forming method and film forming apparatus App 20010009135 - Hasebe, Keizo ; et al.	2001-07-26
Substrate processing method and substrate processing apparatus App 20010004066 - Toshima, Takayuki ; et al.	2001-06-21
Film forming method and film forming apparatus Grant 6,228,561 - Hasebe , et al. May 8, 2	2001-05-08
Method of processing resist onto substrate and resist processing apparatus Grant 6,097,469 - Yaegashi , et al. August 1, 2	2000-08-01
Method of processing resist utilizing alkaline component monitoring Grant 6,017,663 - Yaegashi , et al. January 25, 2	2000-01-25
Method of processing resist utilizing alkaline component monitoring Grant 5,932,380 - Yaegashi , et al. August 3, 1	1999-08-03
Method for washing substrates Grant 5,817,185 - Shindo , et al. October 6, 1	1998-10-06
Apparatus and method for washing substrates Grant 5,730,162 - Shindo , et al. March 24, 1	1998-03-24
Method and apparatus for treating film coated on substrate Grant 5,633,040 - Toshima , et al. May 27, 1	1997-05-27
Coating device Grant 4,899,686 - Toshima , et al. February 13, 1	1990-02-13

uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.

While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.

All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.