TORKKELI; Altti
Patent Applications and Registrations
Patent applications and USPTO patent grants for TORKKELI; Altti.The latest application filed is for "method for bonding wafers, and a wafer".
- TORKKELI; Altti - Tuusula FI
- Torkkeli; Altti - Espoo FI
| Patent | Date |
|---|---|
| Method For Bonding Wafers, And A Wafer App 20220289567 - HANNULA; Konsta ; et al. | 2022-09-15 |
| MEMS reflector with center support Grant 10,969,575 - Torkkeli , et al. April 6, 2 | 2021-04-06 |
| MEMS reflector system Grant 10,914,939 - Torkkeli , et al. February 9, 2 | 2021-02-09 |
| Two-axis Mems Mirror With Separated Drives App 20200386985 - LIUKKU; Matti ; et al. | 2020-12-10 |
| Mems Structure Including A Cap With A Via App 20200283292 - TORKKELI; Altti ; et al. | 2020-09-10 |
| Scanning mirror device and a method for manufacturing it Grant 10,377,625 - Torkkeli , et al. A | 2019-08-13 |
| Mems Reflector With Center Support App 20190146211 - TORKKELI; Altti ; et al. | 2019-05-16 |
| Scanning MEMS reflector system Grant 10,281,718 - Torkkeli | 2019-05-07 |
| A Mems Reflector System App 20190064508 - TORKKELI; Altti ; et al. | 2019-02-28 |
| Manufacturing method of a multi-level micromechanical structure on a single layer of homogenous material Grant 9,969,615 - Iihola , et al. May 15, 2 | 2018-05-15 |
| Scanning Mems Reflector System App 20180059406 - TORKKELI; Altti | 2018-03-01 |
| Scanning Mirror Device And A Method For Manufacturing It App 20170297898 - TORKKELI; Altti ; et al. | 2017-10-19 |
| Multi-level micromechanical structure Grant 9,764,942 - Iihola , et al. September 19, 2 | 2017-09-19 |
| Method of manufacturing a MEMS structure and use of the method Grant 9,556,021 - Torkkeli January 31, 2 | 2017-01-31 |
| Manufacturing Method Of A Multi-level Micromechanical Structure App 20160332872 - IIHOLA; Antti ; et al. | 2016-11-17 |
| Multi-level Micromechanical Structure App 20160332864 - IIHOLA; Antti ; et al. | 2016-11-17 |
| Method of manufacturing a MEMS structure Grant 9,334,160 - Torkkeli , et al. May 10, 2 | 2016-05-10 |
| Method Of Manufacturing A Mems Structure App 20150336793 - TORKKELI; Altti ; et al. | 2015-11-26 |
| Method Of Manufacturing A Mems Structure And Use Of The Method App 20150336794 - TORKKELI; Altti | 2015-11-26 |
| Vibrating micromechanical sensor of angular velocity Grant 8,646,333 - Klemetti , et al. February 11, 2 | 2014-02-11 |
| Vibrating micromechanical sensor of angular velocity Grant 8,635,909 - Klemetti , et al. January 28, 2 | 2014-01-28 |
| Encapsulation module method for production and use thereof Grant 8,279,615 - Schmid , et al. October 2, 2 | 2012-10-02 |
| Vibrating Micromechanical Sensor Of Angular Velocity App 20120085167 - KLEMETTI; Petri ; et al. | 2012-04-12 |
| Vibrating Micromechanical Sensor Of Angular Velocity App 20120085168 - KLEMETTI; Petri ; et al. | 2012-04-12 |
| Vibrating micromechanical sensor of angular velocity Grant 8,104,343 - Klemetti , et al. January 31, 2 | 2012-01-31 |
| Encapsulation Module Method for Production and Use Thereof App 20100290199 - Schmid; Bernhard ; et al. | 2010-11-18 |
| Vibrating micromechanical sensor of angular velocity App 20090165553 - Klemetti; Petri ; et al. | 2009-07-02 |
| Method of manufacturing a membrane sensor Grant 6,901,804 - Torkkeli June 7, 2 | 2005-06-07 |
| Method of manufacturing a membrane sensor App 20030094047 - Torkkeli, Altti | 2003-05-22 |
| Electrically modulatable thermal radiant source with specific filament Grant 5,827,438 - Blomberg , et al. October 27, 1 | 1998-10-27 |
| Miniaturized fabry-perot spectrometer for optical analysis Grant 5,818,586 - Lehto , et al. October 6, 1 | 1998-10-06 |
| Single-channel gas concentration measurement method and apparatus using a short-resonator Fabry-Perot interferometer Grant 5,646,729 - Koskinen , et al. July 8, 1 | 1997-07-08 |
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