loadpatents
Patent applications and USPTO patent grants for Toriya; Daisuke.The latest application filed is for "substrate stage and substrate processing apparatus".
Patent | Date |
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Method of controlling substrate processing apparatus, and substrate processing apparatus Grant 11,441,224 - Toriya , et al. September 13, 2 | 2022-09-13 |
Substrate holder and film forming apparatus Grant 11,396,704 - Fujisato , et al. July 26, 2 | 2022-07-26 |
Placement apparatus and processing apparatus Grant 11,280,002 - Satoh , et al. March 22, 2 | 2022-03-22 |
Substrate stage and substrate processing apparatus Grant 11,281,116 - Tsuda , et al. March 22, 2 | 2022-03-22 |
Substrate Stage And Substrate Processing Apparatus App 20210302846 - TSUDA; Einosuke ;   et al. | 2021-09-30 |
Processing Apparatus App 20210005493 - FUJISATO; Toshiaki ;   et al. | 2021-01-07 |
Method of Controlling Substrate Processing Apparatus, and Substrate Processing Apparatus App 20200248306 - Kind Code | 2020-08-06 |
Substrate Holder and Film Forming Apparatus App 20200165723 - FUJISATO; Toshiaki ;   et al. | 2020-05-28 |
Placement Apparatus and Processing Apparatus App 20200095680 - SATOH; Kohichi ;   et al. | 2020-03-26 |
Film-forming Apparatus App 20200010956 - TORIYA; Daisuke ;   et al. | 2020-01-09 |
Film forming apparatus Grant 10,526,702 - Toriya , et al. J | 2020-01-07 |
Film formation device Grant 10,221,478 - Narushima , et al. | 2019-03-05 |
Gas treatment apparatus and gas treatment method Grant 10,156,014 - Kakegawa , et al. Dec | 2018-12-18 |
Film forming apparatus Grant 10,094,019 - Toriya , et al. October 9, 2 | 2018-10-09 |
Gas Treatment Apparatus And Gas Treatment Method App 20180171478 - KAKEGAWA; Takashi ;   et al. | 2018-06-21 |
Film Forming Apparatus App 20160355928 - TORIYA; Daisuke ;   et al. | 2016-12-08 |
Film Formation Device App 20160083837 - NARUSHIMA; Kensaku ;   et al. | 2016-03-24 |
Film Forming Apparatus App 20140130743 - TORIYA; Daisuke ;   et al. | 2014-05-15 |
Mounting table structure, and processing apparatus Grant 8,334,481 - Komatsu , et al. December 18, 2 | 2012-12-18 |
Liner for plasma processing apparatus Grant D658,692 - Suzuki , et al. May 1, 2 | 2012-05-01 |
Stage Structure And Heat Treatment Apparatus App 20100323313 - Toriya; Daisuke ;   et al. | 2010-12-23 |
Mounting Table Structure, And Processing Apparatus App 20090277895 - KOMATSU; Tomohito ;   et al. | 2009-11-12 |
Processing device and method of maintaining the device Grant 7,367,350 - Toriya , et al. May 6, 2 | 2008-05-06 |
Processing device and method of maintaining the device App 20050115501 - Toriya, Daisuke ;   et al. | 2005-06-02 |
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