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Semiconductor Device And Manufacturing Method Of The Same App 20220037532 - TORIUMI; Satoshi ;   et al. | 2022-02-03 |
Semiconductor device and manufacturing method of the same Grant 11,217,703 - Toriumi , et al. January 4, 2 | 2022-01-04 |
Semiconductor Device And Manufacturing Method Of The Same App 20200357925 - TORIUMI; Satoshi ;   et al. | 2020-11-12 |
Semiconductor device and manufacturing method of the same Grant 10,693,013 - Toriumi , et al. | 2020-06-23 |
Semiconductor device, manufacturing method thereof, and electronic device Grant 10,147,747 - Toriumi , et al. De | 2018-12-04 |
Method for manufacturing semiconductor device Grant 10,050,132 - Yamazaki , et al. August 14, 2 | 2018-08-14 |
Semiconductor device and manufacturing method thereof Grant 9,882,061 - Yamazaki , et al. January 30, 2 | 2018-01-30 |
Semiconductor Device App 20170352746 - YAMAZAKI; Shunpei ;   et al. | 2017-12-07 |
Semiconductor device and method for manufacturing the same Grant 9,806,096 - Hayakawa , et al. October 31, 2 | 2017-10-31 |
Semiconductor device and method for manufacturing the same Grant 9,755,083 - Noda , et al. September 5, 2 | 2017-09-05 |
Method for manufacturing semiconductor device Grant 9,722,056 - Yamazaki , et al. August 1, 2 | 2017-08-01 |
Liquid crystal display device having optical sensor Grant 9,720,277 - Yamazaki , et al. August 1, 2 | 2017-08-01 |
Semiconductor Device App 20170018631 - YAMAZAKI; Shunpei ;   et al. | 2017-01-19 |
Semiconductor Device And Method For Manufacturing The Same App 20160365454 - NODA; Kosei ;   et al. | 2016-12-15 |
Semiconductor device Grant 9,478,664 - Yamazaki , et al. October 25, 2 | 2016-10-25 |
Semiconductor Device And Manufacturing Method Of The Same App 20160300952 - TORIUMI; Satoshi ;   et al. | 2016-10-13 |
Semiconductor Device And Manufacturing Method Thereof App 20160276487 - YAMAZAKI; Shunpei ;   et al. | 2016-09-22 |
Semiconductor device and method for manufacturing the same Grant 9,450,102 - Noda , et al. September 20, 2 | 2016-09-20 |
Photoelectric conversion device and manufacturing method thereof Grant 9,450,132 - Kato , et al. September 20, 2 | 2016-09-20 |
Semiconductor Device and Method for Manufacturing the Same App 20160172382 - Hayakawa; Masahiko ;   et al. | 2016-06-16 |
Semiconductor Device, Manufacturing Method Thereof, And Electronic Device App 20160056179 - TORIUMI; Satoshi ;   et al. | 2016-02-25 |
Semiconductor device and method for manufacturing the same Grant 9,196,632 - Hayakawa , et al. November 24, 2 | 2015-11-24 |
Silicon structure and manufacturing methods thereof and of capacitor including silicon structure Grant 9,111,775 - Toriumi August 18, 2 | 2015-08-18 |
Semiconductor Device App 20150179810 - Yamazaki; Shunpei ;   et al. | 2015-06-25 |
Method for manufacturing semiconductor device Grant 9,054,206 - Yamazaki , et al. June 9, 2 | 2015-06-09 |
Method for cleaning film formation apparatus and method for manufacturing semiconductor device Grant 9,044,793 - Toriumi , et al. June 2, 2 | 2015-06-02 |
Photoelectric Conversion Device And Manufacturing Method Thereof App 20150053264 - KATO; Sho ;   et al. | 2015-02-26 |
Methods of removing contaminant impurities during the manufacture of a thin film transistor by applying water in which ozone is dissolved Grant 8,951,902 - Asami , et al. February 10, 2 | 2015-02-10 |
Semiconductor Device And Method For Manufacturing The Same App 20140319514 - Noda; Kosei ;   et al. | 2014-10-30 |
Photoelectric conversion device and manufacturing method thereof Grant 8,872,021 - Kato , et al. October 28, 2 | 2014-10-28 |
Semiconductor device Grant 8,735,897 - Miyairi , et al. May 27, 2 | 2014-05-27 |
Semiconductor Device and Method for Manufacturing the Same App 20140139776 - Hayakawa; Masahiko ;   et al. | 2014-05-22 |
Semiconductor device and method for manufacturing the same Grant 8,610,182 - Hayakawa , et al. December 17, 2 | 2013-12-17 |
Method of manufacturing a semiconductor device Grant 8,603,899 - Asami , et al. December 10, 2 | 2013-12-10 |
Method for forming crystalline semiconductor film, method for manufacturing thin film transistor, and method for manufacturing display device Grant 8,591,650 - Toriumi November 26, 2 | 2013-11-26 |
Semiconductor device Grant 8,519,394 - Miyairi , et al. August 27, 2 | 2013-08-27 |
Semiconductor device and manufacturing method thereof Grant 8,487,342 - Toriumi July 16, 2 | 2013-07-16 |
Plasma CVD apparatus Grant 8,476,638 - Toriumi , et al. July 2, 2 | 2013-07-02 |
Method For Cleaning Film Formation Apparatus And Method For Manufacturing Semiconductor Device App 20130130476 - TORIUMI; Satoshi ;   et al. | 2013-05-23 |
Semiconductor device and manufacturing method thereof Grant 8,431,496 - Toriumi April 30, 2 | 2013-04-30 |
Method of Manufacturing A Semiconductor Device App 20130059404 - Asami; Taketomi ;   et al. | 2013-03-07 |
Method for manufacturing semiconductor substrate Grant 8,349,702 - Kato , et al. January 8, 2 | 2013-01-08 |
Manufacturing method of microcrystalline semiconductor film and manufacturing method of semiconductor device Grant 8,343,857 - Toriumi January 1, 2 | 2013-01-01 |
Method for manufacturing transistor Grant 8,338,240 - Toriumi , et al. December 25, 2 | 2012-12-25 |
Method For Manufacturing Microcrystalline Semiconductor Film And Method For Manufacturing Semiconductor Device App 20120304932 - Toriumi; Satoshi ;   et al. | 2012-12-06 |
Method of manufacturing a semiconductor device Grant 8,304,327 - Asami , et al. November 6, 2 | 2012-11-06 |
Method for manufacturing semiconductor device, semiconductor device, and electronic appliance Grant 8,278,740 - Toriumi , et al. October 2, 2 | 2012-10-02 |
Manufacturing method of semiconductor device Grant 8,263,421 - Yamazaki , et al. September 11, 2 | 2012-09-11 |
Method for manufacturing microcrystalline semiconductor film by plasma CVD apparatus Grant 8,252,669 - Toriumi , et al. August 28, 2 | 2012-08-28 |
Silicon Structure And Manufacturing Methods Thereof And Of Capacitor Including Silicon Structure App 20120193632 - TORIUMI; Satoshi | 2012-08-02 |
Semiconductor Device and Method for Manufacturing the Same App 20120187411 - Hayakawa; Masahiko ;   et al. | 2012-07-26 |
Photoelectric conversion device and method for manufacturing the same Grant 8,198,629 - Yamazaki , et al. June 12, 2 | 2012-06-12 |
Manufacturing Method For Semiconductor Device App 20120129329 - ASAMI; Taketomi ;   et al. | 2012-05-24 |
Method for manufacturing semiconductor device Grant 8,173,496 - Kato , et al. May 8, 2 | 2012-05-08 |
Semiconductor device and method for manufacturing the same Grant 8,154,059 - Hayakawa , et al. April 10, 2 | 2012-04-10 |
Method For Manufacturing Transistor App 20120083078 - TORIUMI; Satoshi ;   et al. | 2012-04-05 |
Manufacturing method for semiconductor device Grant 8,138,101 - Asami , et al. March 20, 2 | 2012-03-20 |
Liquid Crystal Display Device App 20120033156 - YAMAZAKI; Shunpei ;   et al. | 2012-02-09 |
Manufacturing Method Of Microcrystalline Semiconductor Film And Manufacturing Method Of Semiconductor Device App 20110263080 - TORIUMI; Satoshi | 2011-10-27 |
Semiconductor Device App 20110220907 - MIYAIRI; Hidekazu ;   et al. | 2011-09-15 |
Semiconductor Device App 20110220905 - MIYAIRI; Hidekazu ;   et al. | 2011-09-15 |
Semiconductor Device And Manufacturing Method Thereof App 20110215332 - TORIUMI; Satoshi | 2011-09-08 |
Photoelectric Conversion Device and Method for Manufacturing the Same App 20110193087 - YAMAZAKI; Shunpei ;   et al. | 2011-08-11 |
Method For Manufacturing Semiconductor Device, Semiconductor Device, And Electronic Appliance App 20110175208 - TORIUMI; Satoshi ;   et al. | 2011-07-21 |
Method for manufacturing semiconductor device, semiconductor device, and electronic appliance Grant 7,955,994 - Toriumi , et al. June 7, 2 | 2011-06-07 |
Method For Manufacturing Semiconductor Device App 20110129969 - KATO; Sho ;   et al. | 2011-06-02 |
Method for manufacturing semiconductor device Grant 7,951,656 - Kato , et al. May 31, 2 | 2011-05-31 |
Method for manufacturing photoelectric conversion device Grant 7,947,523 - Kato , et al. May 24, 2 | 2011-05-24 |
Semiconductor Device And Manufacturing Method Thereof App 20110101363 - TORIUMI; Satoshi | 2011-05-05 |
Method of manufacturing an analytical sample and method of analyzing an analytical sample Grant 7,932,097 - Toriumi April 26, 2 | 2011-04-26 |
Manufacturing Method Of Semiconductor Device App 20110059562 - YAMAZAKI; Shunpei ;   et al. | 2011-03-10 |
Method For Manufacturing Microcrystalline Semiconductor Film And Method For Manufacturing Semiconductor Device App 20110053358 - TORIUMI; Satoshi ;   et al. | 2011-03-03 |
Semiconductor device and manufacturing method thereof Grant 7,897,482 - Toriumi March 1, 2 | 2011-03-01 |
Photoelectric conversion device and method for manufacturing the same Grant 7,888,167 - Yamazaki , et al. February 15, 2 | 2011-02-15 |
Method Of Manufacturing An Analytical Sample And Method Of Analyzing An Analytical Sample App 20110031390 - TORIUMI; Satoshi | 2011-02-10 |
Semiconductor Device and Method for Manufacturing the Same App 20110034215 - Hayakawa; Masahiko ;   et al. | 2011-02-10 |
Method of manufacturing an analytical sample and method of analyzing an analytical sample Grant 7,846,741 - Toriumi December 7, 2 | 2010-12-07 |
Manufacturing method of semiconductor device Grant 7,833,845 - Yamazaki , et al. November 16, 2 | 2010-11-16 |
Semiconductor device and method for manufacturing the same Grant 7,821,071 - Hayakawa , et al. October 26, 2 | 2010-10-26 |
Method Of Manufacturing An Analytical Sample And Method Of Analyzing An Analytical Sample App 20100171034 - Toriumi; Satoshi | 2010-07-08 |
Method of Manufacturing a Semiconductor Device App 20100151664 - Asami; Taketomi ;   et al. | 2010-06-17 |
Photoelectric Conversion Device And Method For Manufacturing The Photoelectric Conversion Device App 20100139766 - TORIUMI; Satoshi ;   et al. | 2010-06-10 |
Method of manufacturing an analytical sample and method of analyzing an analytical sample Grant 7,727,773 - Toriumi June 1, 2 | 2010-06-01 |
Photoelectric Conversion Device And Manufacturing Method Thereof App 20100071767 - KATO; Sho ;   et al. | 2010-03-25 |
Method of manufacturing a semiconductor device Grant 7,670,881 - Asami , et al. March 2, 2 | 2010-03-02 |
Method For Manufacturing Semiconductor Device App 20090305469 - KATO; Sho ;   et al. | 2009-12-10 |
Method of manufacturing display device Grant 7,611,930 - Yamazaki , et al. November 3, 2 | 2009-11-03 |
Photoelectric Conversion Device And Method For Manufacturing The Same App 20090267066 - YAMAZAKI; Shunpei ;   et al. | 2009-10-29 |
Method For Manufacturing Photoelectric Conversion Device App 20090269875 - KATO; Sho ;   et al. | 2009-10-29 |
Method For Manufacturing Semiconductor Substrate App 20090269906 - KATO; Sho ;   et al. | 2009-10-29 |
Semiconductor Device and Method for Manufacturing the Same App 20090224260 - Hayakawa; Masahiko ;   et al. | 2009-09-10 |
Method For Forming Crystalline Semiconductor Film, Method For Manufacturing Thin Film Transistor, And Method For Manufacturing Display Device App 20090139447 - Toriumi; Satoshi | 2009-06-04 |
Semiconductor Device And Manufacturing Method Thereof App 20090114915 - TORIUMI; Satoshi | 2009-05-07 |
Method For Manufacturing Semiconductor Device, Semiconductor Device, And Electronic Appliance App 20090102027 - TORIUMI; Satoshi ;   et al. | 2009-04-23 |
Semiconductor device and method for manufacturing the same Grant 7,504,343 - Hayakawa , et al. March 17, 2 | 2009-03-17 |
Method for manufacturing semiconductor device App 20090047759 - Yamazaki; Shunpei ;   et al. | 2009-02-19 |
Method Of Manufacturing Display Device App 20090047758 - YAMAZAKI; Shunpei ;   et al. | 2009-02-19 |
Manufacturing method of semiconductor device App 20090047761 - Yamazaki; Shunpei ;   et al. | 2009-02-19 |
Film formation method and manufacturing method of semiconductor device Grant 7,465,966 - Ichijo , et al. December 16, 2 | 2008-12-16 |
Semiconductor device and method of manufacturing the same Grant 7,368,335 - Asami , et al. May 6, 2 | 2008-05-06 |
Method of manufacturing an analytical sample and method of analyzing an analytical sample App 20080102536 - Toriumi; Satoshi | 2008-05-01 |
Manufacturing method for semiconductor device App 20070254416 - Asami; Taketomi ;   et al. | 2007-11-01 |
Method of manufacturing a semiconductor device App 20070202667 - Asami; Taketomi ;   et al. | 2007-08-30 |
Manufacturing method for semiconductor device Grant 7,220,613 - Asami , et al. May 22, 2 | 2007-05-22 |
Method of manufacturing a semiconductor device with a fluorine concentration Grant 7,208,394 - Asami , et al. April 24, 2 | 2007-04-24 |
Semiconductor device and method for manufacturing the same App 20060267114 - Hayakawa; Masahiko ;   et al. | 2006-11-30 |
Semiconductor Device and Method of Manufacturing the Same App 20060246638 - Asami; Taketomi ;   et al. | 2006-11-02 |
Semiconductor device and method for manufacturing the same Grant 7,064,388 - Hayakawa , et al. June 20, 2 | 2006-06-20 |
Semiconductor device and method of manufacturing the same Grant 7,034,337 - Asami , et al. April 25, 2 | 2006-04-25 |
Method of manufacturing a semiconductor device App 20050202602 - Asami, Taketomi ;   et al. | 2005-09-15 |
Semiconductor device and method for manufacturing the same App 20050116294 - Hayakawa, Masahiko ;   et al. | 2005-06-02 |
Method of manufacturing a semiconductor device with fluorine concentration Grant 6,875,674 - Asami , et al. April 5, 2 | 2005-04-05 |
Semiconductor device and method for manufacturing the same Grant 6,858,898 - Hayakawa , et al. February 22, 2 | 2005-02-22 |
Manufacturing method for semiconductor device App 20050026320 - Asami, Taketomi ;   et al. | 2005-02-03 |
Film formation method and manufacturing method of semiconductor device App 20040185673 - Ichijo, Mitsuhiro ;   et al. | 2004-09-23 |
Manufacturing method for semiconductor device Grant 6,794,229 - Asami , et al. September 21, 2 | 2004-09-21 |
Semiconductor device and method of manufacturing the same App 20040169177 - Asami, Taketomi ;   et al. | 2004-09-02 |
Semiconductor device and method of manufacturing the same Grant 6,703,265 - Asami , et al. March 9, 2 | 2004-03-09 |
Semiconductor device and method of manufacturing the same App 20020014625 - Asami, Taketomi ;   et al. | 2002-02-07 |
Method of manufacturing a semiconductor device App 20020004262 - Asami, Taketomi ;   et al. | 2002-01-10 |
Manufacturing method for semiconductor device App 20020004261 - Asami, Taketomi ;   et al. | 2002-01-10 |