Patent | Date |
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Substrate Processing System App 20220234164 - TORIKOSHI; Tsuneo ;   et al. | 2022-07-28 |
Substrate Processing Apparatus And Substrate Processing Method App 20220152774 - TORIKOSHI; TSUNEO | 2022-05-19 |
Polishing Apparatus, Information Processing System, Polishing Method, And Computer-readable Storage Medium App 20210291312 - Nakamura; Akira ;   et al. | 2021-09-23 |
Non-transitory computer-readable storage medium storing a program of screen control and semiconductor manufacturing apparatus Grant 10,559,277 - Torikoshi , et al. Feb | 2020-02-11 |
Polishing method and apparatus Grant 10,478,938 - Torikoshi Nov | 2019-11-19 |
Display screen with animated graphic user interface Grant D864,978 - Nakamura , et al. Oc | 2019-10-29 |
Substrate Processing Control System, Substrate Processing Control Method, And Program App 20190240799 - TAKEDA; Koichi ;   et al. | 2019-08-08 |
Display screen with graphical user interface Grant D854,564 - Nakamura , et al. | 2019-07-23 |
Display screen with animated graphical user interface Grant D852,206 - Nakamura , et al. | 2019-06-25 |
Non-transitory Computer-readable Storage Medium Storing A Program Of Screen Control And Semiconductor Manufacturing Apparatus App 20190043443 - TORIKOSHI; Tsuneo ;   et al. | 2019-02-07 |
Substrate processing method including reprocessing rejected wafers Grant 9,847,263 - Otaki , et al. December 19, 2 | 2017-12-19 |
Polishing Method And Apparatus App 20170157734 - TORIKOSHI; Tsuneo | 2017-06-08 |
Polishing method and apparatus Grant 9,610,673 - Torikoshi April 4, 2 | 2017-04-04 |
Polishing method and polishing apparatus Grant 9,524,913 - Torikoshi , et al. December 20, 2 | 2016-12-20 |
Substrate Processing Method App 20150279751 - OTAKI; Hirofumi ;   et al. | 2015-10-01 |
Polishing Method And Polishing Apparatus App 20150221562 - TORIKOSHI; Tsuneo ;   et al. | 2015-08-06 |
Polishing Method And Apparatus App 20140213157 - Torikoshi; Tsuneo | 2014-07-31 |
Polishing method and polishing apparatus Grant 8,592,313 - Yamaguchi , et al. November 26, 2 | 2013-11-26 |
Polishing method and polishing apparatus, and program for controlling polishing apparatus Grant 8,332,064 - Torikoshi , et al. December 11, 2 | 2012-12-11 |
Polishing method, polishing apparatus, and program for controlling polishing apparatus Grant 8,165,710 - Torikoshi , et al. April 24, 2 | 2012-04-24 |
Polishing Method And Polishing Apparatus App 20110250824 - YAMAGUCHI; Kuniaki ;   et al. | 2011-10-13 |
Polishing method and polishing apparatus Grant 7,989,348 - Yamaguchi , et al. August 2, 2 | 2011-08-02 |
Polishing method and polishing apparatus Grant 7,720,562 - Torikoshi May 18, 2 | 2010-05-18 |
Polishing method, polishing apparatus, and program for controlling polishing apparatus App 20100015890 - Torikoshi; Tsuneo ;   et al. | 2010-01-21 |
Polishing method and polishing apparatus, and program for controlling polishing apparatus App 20090264052 - Torikoshi; Tsuneo ;   et al. | 2009-10-22 |
Polishing method and polishing apparatus App 20080254714 - Torikoshi; Tsuneo | 2008-10-16 |
Polishing method and polishing apparatus App 20070049166 - Yamaguchi; Kuniaki ;   et al. | 2007-03-01 |