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Patent applications and USPTO patent grants for Tooyama; Hiroshi.The latest application filed is for "method and apparatus for inspecting integrated circuit pattern".
Patent | Date |
---|---|
Method and apparatus for inspecting integrated circuit pattern Grant 7,952,074 - Shinada , et al. May 31, 2 | 2011-05-31 |
Method And Apparatus For Inspecting Integrated Circuit Pattern App 20080302964 - Shinada; Hiroyuki ;   et al. | 2008-12-11 |
Method and apparatus for inspecting integrated circuit pattern Grant 7,417,444 - Shinada , et al. August 26, 2 | 2008-08-26 |
Charged particle beam application system Grant 7,408,760 - Tanimoto , et al. August 5, 2 | 2008-08-05 |
Method and apparatus for inspecting integrated circuit pattern Grant 7,026,830 - Shinada , et al. April 11, 2 | 2006-04-11 |
Charged particle beam application system App 20060056131 - Tanimoto; Sayaka ;   et al. | 2006-03-16 |
Method and apparatus for inspecting integrated circuit pattern App 20060043982 - Shinada; Hiroyuki ;   et al. | 2006-03-02 |
Method and apparatus for inspecting integrated circuit pattern App 20030169060 - Shinada, Hiroyuki ;   et al. | 2003-09-11 |
Method and apparatus for inspecting integrated circuit pattern App 20020027440 - Shinada, Hiroyuki ;   et al. | 2002-03-07 |
Method and apparatus for inspecting integrated circuit pattern Grant 6,172,363 - Shinada , et al. January 9, 2 | 2001-01-09 |
Surface metrological apparatus Grant 5,001,409 - Hosaka , et al. March 19, 1 | 1991-03-19 |
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