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Patent applications and USPTO patent grants for TONNIS; Eric.The latest application filed is for "method and apparatus for controlling the temperature of a semiconductor wafer".
Patent | Date |
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Method And Apparatus For Controlling The Temperature Of A Semiconductor Wafer App 20220034708 - ELLIOTT; Gregor ;   et al. | 2022-02-03 |
Semiconductor Wafer Mass Metrology Apparatus And Semiconductor Wafer Mass Metrology Method App 20210175102 - ELLIOTT; Gregor ;   et al. | 2021-06-10 |
System, method and apparatus for RF power compensation in plasma etch chamber Grant 9,412,670 - O'Neill , et al. August 9, 2 | 2016-08-09 |
System, Method and Apparatus for RF Power Compensation in Plasma Etch Chamber App 20140349417 - O'Neill; Robert G. ;   et al. | 2014-11-27 |
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