Tong; Henry Yee Shian
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tong; Henry Yee Shian.The latest application filed is for "laser source device, extreme ultraviolet lithography device and method".
- Tong; Henry Yee Shian - Hsinchu TW
- Tong; Henry Yee-Shian - Taoyuan TW
- TONG; Henry Yee-Shian - Taoyuan City TW
| Patent | Date |
|---|---|
| EUV light source and apparatus for lithography Grant 11,226,564 - Yeh , et al. January 18, 2 | 2022-01-18 |
| Laser source device, extreme ultraviolet lithography device and method Grant 11,158,989 - Tong , et al. October 26, 2 | 2021-10-26 |
| Laser Source Device, Extreme Ultraviolet Lithography Device And Method App 20200245443 - Kind Code | 2020-07-30 |
| Laser source device and extreme ultraviolet lithography device Grant 10,624,196 - Tong , et al. | 2020-04-14 |
| Laser Source Device And Extreme Ultraviolet Lithography Device App 20200107428 - TONG; Henry Yee-Shian ; et al. | 2020-04-02 |
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