Tomoeda; Takayuki
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tomoeda; Takayuki.The latest application filed is for "processing apparatus and processing method".
- Tomoeda; Takayuki - Kumamoto-ken JP
- Tomoeda; Takayuki - Kumamoto JP
| Patent | Date |
|---|---|
| Processing apparatus and processing method Grant 5,965,200 - Tateyama , et al. October 12, 1 | 1999-10-12 |
| Washing apparatus, and washing method Grant 5,887,604 - Murakami , et al. March 30, 1 | 1999-03-30 |
| Processing apparatus and processing method Grant 5,871,584 - Tateyama , et al. February 16, 1 | 1999-02-16 |
| Resist processing method and apparatus Grant 5,779,796 - Tomoeda , et al. July 14, 1 | 1998-07-14 |
| Washing apparatus, and washing method Grant 5,671,764 - Murakami , et al. September 30, 1 | 1997-09-30 |
| Resist processing method and apparatus Grant 5,626,913 - Tomoeda , et al. May 6, 1 | 1997-05-06 |
| Method for scrubbing and cleaning substrate Grant 5,518,552 - Tanoue , et al. May 21, 1 | 1996-05-21 |
| Washing apparatus, and washing method Grant 5,488,964 - Murakami , et al. February 6, 1 | 1996-02-06 |
| Device and method for scrubbing and cleaning substrate Grant 5,345,639 - Tanoue , et al. September 13, 1 | 1994-09-13 |
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