loadpatents
Patent applications and USPTO patent grants for Tomiyoshi; Rikio.The latest application filed is for "pattern forming apparatus and pattern forming method".
Patent | Date |
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Pattern forming apparatus and pattern forming method Grant 8,153,996 - Abe , et al. April 10, 2 | 2012-04-10 |
Pattern Forming Apparatus And Pattern Forming Method App 20100072403 - ABE; Takayuki ;   et al. | 2010-03-25 |
Semiconductor production system Grant 7,526,352 - Naya , et al. April 28, 2 | 2009-04-28 |
Semiconductor production system App 20080125903 - Naya; Hidemitsu ;   et al. | 2008-05-29 |
Semiconductor manufacturing apparatus Grant 7,218,985 - Naya , et al. May 15, 2 | 2007-05-15 |
Semiconductor production system Grant 7,177,718 - Naya , et al. February 13, 2 | 2007-02-13 |
Semiconductor production system App 20070027569 - Naya; Hidemitsu ;   et al. | 2007-02-01 |
Semiconductor production system App 20060265099 - Naya; Hidemitsu ;   et al. | 2006-11-23 |
Semiconductor production system Grant 7,099,733 - Naya , et al. August 29, 2 | 2006-08-29 |
Semiconductor manufacturing apparatus App 20060155414 - Naya; Hidemitsu ;   et al. | 2006-07-13 |
Semiconductor manufacturing apparatus Grant 7,027,888 - Naya , et al. April 11, 2 | 2006-04-11 |
Electron-beam drawing apparatus and electron-beam drawing method App 20060033050 - Ando; Kimiaki ;   et al. | 2006-02-16 |
Semiconductor manufacturing apparatus App 20050270857 - Naya, Hidemitsu ;   et al. | 2005-12-08 |
Semiconductor manufacturing apparatus Grant 6,941,186 - Naya , et al. September 6, 2 | 2005-09-06 |
Semiconductor production system App 20050119843 - Naya, Hidemitsu ;   et al. | 2005-06-02 |
Semiconductor production system Grant 6,850,854 - Naya , et al. February 1, 2 | 2005-02-01 |
Semiconductor production system App 20050015165 - Naya, Hidemitsu ;   et al. | 2005-01-20 |
Electron-beam drawing apparatus and electron-beam drawing method App 20040178366 - Ando, Kimiaki ;   et al. | 2004-09-16 |
Semiconductor manufacturing apparatus App 20040125355 - Naya, Hidemitsu ;   et al. | 2004-07-01 |
Semiconductor production system App 20030220754 - Naya, Hidemitsu ;   et al. | 2003-11-27 |
Semiconductor production system Grant 6,591,207 - Naya , et al. July 8, 2 | 2003-07-08 |
Semi conductor production system App 20020120417 - Naya, Hidemitsu ;   et al. | 2002-08-29 |
Electron-beam drawing appraratus electron-beam drawing method App 20020024020 - Ando, Kimiaki ;   et al. | 2002-02-28 |
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