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Single Coil Of Coil Unit For Linear Motor, Method And Device For Winding And Forming The Same, And Method For Forming And Fabricating Coil Unit App 20030160126 - Mori, Hidehiko ;   et al. | 2003-08-28 |
Stage position control method and stage position control apparatus capable of improving positioning precision Grant 6,584,367 - Makino , et al. June 24, 2 | 2003-06-24 |
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