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Substrate processing method and computer storage medium Grant 10,586,711 - Muramatsu , et al. | 2020-03-10 |
Substrate Treatment Method, Computer Storage Medium And Substrate Treatment System App 20190341255 - MURAMATSU; Makoto ;   et al. | 2019-11-07 |
Substrate treatment method using a block copolymer containing a hydrophilic and a hydrophobic polymers Grant 10,418,242 - Muramatsu , et al. Sept | 2019-09-17 |
Substrate treatment method, computer storage medium and substrate treatment system Grant 10,329,144 - Muramatsu , et al. | 2019-06-25 |
Pattern forming method and heating apparatus Grant 10,121,659 - Muramatsu , et al. November 6, 2 | 2018-11-06 |
Substrate Processing Method And Computer Storage Medium App 20180269072 - MURAMATSU; Makoto ;   et al. | 2018-09-20 |
Substrate Treatment Method, Computer Storage Medium And Substrate Treatment System App 20180065843 - MURAMATSU; Makoto ;   et al. | 2018-03-08 |
Pattern Forming Method And Heating Apparatus App 20180019118 - MURAMATSU; Makoto ;   et al. | 2018-01-18 |
Pattern forming method and heating apparatus Grant 9,859,118 - Muramatsu , et al. January 2, 2 | 2018-01-02 |
Substrate treatment method, computer storage medium and substrate treatment system Grant 9,810,987 - Muramatsu , et al. November 7, 2 | 2017-11-07 |
Substrate Treatment Method, Computer Storage Medium And Substrate Treatment System App 20170287749 - MURAMATSU; Makoto ;   et al. | 2017-10-05 |
Substrate treatment method, computer storage medium, and substrate treatment system Grant 9,748,101 - Muramatsu , et al. August 29, 2 | 2017-08-29 |
Substrate treatment method, computer readable storage medium and substrate treatment system Grant 9,741,583 - Muramatsu , et al. August 22, 2 | 2017-08-22 |
Substrate Treatment Method, Computer Readable Storage Medium And Substrate Treatment System App 20170133235 - MURAMATSU; Makoto ;   et al. | 2017-05-11 |
Pattern forming method, pattern forming apparatus, and computer readable storage medium Grant 9,618,849 - Muramatsu , et al. April 11, 2 | 2017-04-11 |
Pattern forming method, pattern forming apparatus, and non-transitory computer-readable storage medium Grant 9,530,645 - Muramatsu , et al. December 27, 2 | 2016-12-27 |
Pattern Forming Method And Heating Apparatus App 20160293403 - MURAMATSU; Makoto ;   et al. | 2016-10-06 |
Use of topography to direct assembly of block copolymers in grapho-epitaxial applications Grant 9,418,860 - Somervell , et al. August 16, 2 | 2016-08-16 |
Substrate Treatment Method, Computer Storage Medium And Substrate Treatment System App 20160124307 - MURAMATSU; Makoto ;   et al. | 2016-05-05 |
Substrate Treatment Method, Computer Storage Medium, And Substrate Treatment System App 20150255271 - Muramatsu; Makoto ;   et al. | 2015-09-10 |
Substrate Treatment Method, Computer-readable Storage Medium, And Substrate Treatment System App 20150228512 - Muramatsu; Makoto ;   et al. | 2015-08-13 |
Use Of Topography To Direct Assembly Of Block Copolymers In Grapho-epitaxial Applications App 20150111387 - Somervell; Mark H. ;   et al. | 2015-04-23 |
Pattern Forming Method, Pattern Forming Apparatus, And Non-transitory Computer-readable Storage Medium App 20150072536 - Muramatsu; Makoto ;   et al. | 2015-03-12 |
Pattern Forming Method, Pattern Forming Apparatus, And Computer Readable Storage Medium App 20150062545 - Muramatsu; Makoto ;   et al. | 2015-03-05 |
Substrate processing method Grant 8,367,308 - Nakamura , et al. February 5, 2 | 2013-02-05 |
Substrate Processing Method App 20110200949 - Nakamura; Hiroshi ;   et al. | 2011-08-18 |