Tomita; Shinichi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tomita; Shinichi.The latest application filed is for "charged particle beam device and installation method".
- Tomita; Shinichi - Tokyo JP
- Tomita; Shinichi - Hitachi N/A JP
- Tomita; Shinichi - Hitachinaka JP
- Tomita, Shinichi - Saga JP
- Tomita; Shinichi - Owariasahi JP
| Patent | Date |
|---|---|
| Charged particle beam device and installation method Grant 10,008,361 - Yabu , et al. June 26, 2 | 2018-06-26 |
| Charged Particle Beam Device And Installation Method App 20170169988 - YABU; Shuhei ; et al. | 2017-06-15 |
| Charged particle beam device Grant 9,287,083 - Tomita , et al. March 15, 2 | 2016-03-15 |
| Charged particle beam apparatus Grant 9,058,957 - Shigeto , et al. June 16, 2 | 2015-06-16 |
| Charged-particle radiation apparatus Grant 9,053,902 - Ebine , et al. June 9, 2 | 2015-06-09 |
| Charged-particle Radiation Apparatus App 20140284477 - Ebine; Yuta ; et al. | 2014-09-25 |
| Charged Particle Beam Apparatus App 20140131590 - Shigeto; Kunji ; et al. | 2014-05-15 |
| Charged Particle Beam Device App 20130299715 - Tomita; Shinichi ; et al. | 2013-11-14 |
| Charged particle beam apparatus Grant 8,143,573 - Ito , et al. March 27, 2 | 2012-03-27 |
| Scanning electron microscope Grant 8,097,848 - Hatano , et al. January 17, 2 | 2012-01-17 |
| Charged particle beam apparatus and method for charged particle beam adjustment Grant 8,026,491 - Ogashiwa , et al. September 27, 2 | 2011-09-27 |
| Method for manufacturing silicon wafer Grant 7,902,039 - Tomita , et al. March 8, 2 | 2011-03-08 |
| Method for manufacturing silicon wafer Grant 7,781,313 - Tomita , et al. August 24, 2 | 2010-08-24 |
| Scanning electron microscope Grant 7,755,045 - Hatano , et al. July 13, 2 | 2010-07-13 |
| Scanning Electron Microscope App 20100090109 - HATANO; Michio ; et al. | 2010-04-15 |
| Method for manufacturing silicon wafer App 20090325385 - Tomita; Shinichi ; et al. | 2009-12-31 |
| Charged Particle Beam Apparatus App 20090322973 - ITO; Sukehiro ; et al. | 2009-12-31 |
| Scanning Electron Microscope App 20090230304 - Hatano; Michio ; et al. | 2009-09-17 |
| Method for manufacturing bonded SOI wafer and bonded SOI wafer manufactured thereby Grant 7,528,049 - Ikeda , et al. May 5, 2 | 2009-05-05 |
| Bonded Soi Substrate, And Method For Manufacturing The Same App 20090093106 - TOMITA; Shinichi ; et al. | 2009-04-09 |
| Scanning electron microscope Grant 7,511,271 - Hatano , et al. March 31, 2 | 2009-03-31 |
| Bonded SOI substrate, and method for manufacturing the same Grant 7,442,992 - Tomita , et al. October 28, 2 | 2008-10-28 |
| Method For Manufacturing Silicon Wafer App 20080132032 - Tomita; Shinichi ; et al. | 2008-06-05 |
| Laminated substrate, method of manufacturing the substrate, and wafer outer periphery pressing jigs used for the method Grant 7,378,332 - Tomita , et al. May 27, 2 | 2008-05-27 |
| Scanning Electron Microscope App 20080035843 - Hatano; Michio ; et al. | 2008-02-14 |
| Method for manufacturing bonded SOI wafer and bonded SOI wafer manufactured thereby App 20080020541 - Ikeda; Yasunobu ; et al. | 2008-01-24 |
| Charged particle beam apparatus and method for charged particle beam adjustment App 20070284542 - Ogashiwa; Takeshi ; et al. | 2007-12-13 |
| SOI substrate and manufacturing method thereof Grant 7,208,058 - Tomita April 24, 2 | 2007-04-24 |
| Scanning electron microscope App 20060186337 - Hatano; Michio ; et al. | 2006-08-24 |
| Bonded SOI substrate, and method for manufacturing the same App 20060055003 - Tomita; Shinichi ; et al. | 2006-03-16 |
| Laminated substrate, method of manufacturing the substrate, and wafer outer periphery pressing jigs used for the method App 20050014347 - Tomita, Shinichi ; et al. | 2005-01-20 |
| SOI substrate and manufacturing method thereof App 20040246795 - Tomita, Shinichi | 2004-12-09 |
| Method and apparatus for separating composite substrate App 20040137697 - Tomita, Shinichi | 2004-07-15 |
| Method for bonding substrates Grant 6,620,285 - Tomita , et al. September 16, 2 | 2003-09-16 |
| Method for bonding substrates App 20020040754 - Tomita, Shinichi ; et al. | 2002-04-11 |
| Data input apparatus Grant 4,725,830 - Kawai , et al. February 16, 1 | 1988-02-16 |
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