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Substrate treatment method and substrate treatment apparatus Grant 10,629,446 - Tomita , et al. | 2020-04-21 |
Substrate processing method and substrate processing apparatus Grant 10,622,205 - Takahashi , et al. | 2020-04-14 |
Plasma processing apparatus and method, and method of manufacturing semiconductor device using the same Grant 10,410,874 - Yoo , et al. Sept | 2019-09-10 |
Substrate Processing Method and Substrate Processing Apparatus App 20190181015 - OGIWARA; Tomoaki ;   et al. | 2019-06-13 |
Substrate processing method and substrate processing apparatus Grant 10,312,101 - Moriya , et al. | 2019-06-04 |
Plasma Processing Apparatus and Method, and Method of Manufacturing Semiconductor Device Using the Same App 20190035606 - Yoo; Beom Jin ;   et al. | 2019-01-31 |
Substrate Treatment Method And Substrate Treatment Apparatus App 20180330962 - TOMITA; Masahiko ;   et al. | 2018-11-15 |
Oxide film removing method, oxide film removing apparatus, contact forming method, and contact forming system Grant 9,984,892 - Kobayashi , et al. May 29, 2 | 2018-05-29 |
Linear member transfer apparatus Grant 9,827,067 - Iwasaki , et al. November 28, 2 | 2017-11-28 |
Oxide Film Removing Method, Oxide Film Removing Apparatus, Contact Forming Method, And Contact Forming System App 20170338120 - Kobayashi; Takashi ;   et al. | 2017-11-23 |
Leak tester and endoscope reprocessor Grant 9,820,630 - Tomita November 21, 2 | 2017-11-21 |
Substrate Processing Method And Substrate Processing Apparatus App 20170316947 - MORIYA; Shuji ;   et al. | 2017-11-02 |
Substrate Processing Method And Substrate Processing Apparatus App 20170294319 - OGIWARA; Tomoaki ;   et al. | 2017-10-12 |
Linear Member Transfer Apparatus App 20170239016 - IWASAKI; Tomokazu ;   et al. | 2017-08-24 |
Leak Tester And Endoscope Reprocessor App 20170020367 - TOMITA; Masahiko | 2017-01-26 |
Substrate Processing Method And Substrate Processing Apparatus App 20160236244 - TAKAHASHI; Hiroyuki ;   et al. | 2016-08-18 |
Cleaning/disinfecting apparatus Grant 9,027,574 - Kosugi , et al. May 12, 2 | 2015-05-12 |
Cleaning/disinfecting Apparatus App 20140166059 - KOSUGI; Aiko ;   et al. | 2014-06-19 |
Endoscope cleaning/disinfecting apparatus and endoscope cleaning/disinfecting method Grant 8,715,425 - Sewake , et al. May 6, 2 | 2014-05-06 |
Water leakage checking apparatus Grant 8,631,684 - Kosugi , et al. January 21, 2 | 2014-01-21 |
Water Leakage Checking Apparatus App 20130008233 - KOSUGI; Aiko ;   et al. | 2013-01-10 |
Washing tube and endoscope washing and disinfecting apparatus Grant 8,267,102 - Onishi , et al. September 18, 2 | 2012-09-18 |
Semiconductor processing apparatus and method for using same Grant 8,183,158 - Tomita , et al. May 22, 2 | 2012-05-22 |
Endoscope washing and disinfecting apparatus and leak detection method performed by the apparatus Grant 8,176,771 - Onishi , et al. May 15, 2 | 2012-05-15 |
Film formation apparatus and method for using the same Grant 8,080,109 - Okada , et al. December 20, 2 | 2011-12-20 |
Film formation method and apparatus for semiconductor process Grant 7,981,809 - Shibata , et al. July 19, 2 | 2011-07-19 |
Endoscope Automatic Cleaning/disinfecting Apparatus App 20110097248 - TOMITA; Masahiko ;   et al. | 2011-04-28 |
Endoscope Cleaning/disinfecting Apparatus And Endoscope Cleaning/disinfecting Method App 20100252074 - SEWAKE; Ryuta ;   et al. | 2010-10-07 |
Endoscope Washing And Disinfecting Apparatus And Method Of Washing Endoscope Using Endoscope Washing And Disinfecting Apparatus App 20100022839 - ONISHI; Hideto ;   et al. | 2010-01-28 |
Washing Tube And Endoscope Washing And Disinfecting Apparatus App 20090205687 - ONISHI; Hideto ;   et al. | 2009-08-20 |
Endoscope Washing And Disinfecting Apparatus And Leak Detection Method Performed By The Apparatus App 20090158539 - ONISHI; Hideto ;   et al. | 2009-06-25 |
Film formation apparatus and method for using the same App 20080282976 - Okada; Mitsuhiro ;   et al. | 2008-11-20 |
Semiconductor processing apparatus and method for using same App 20080093023 - Tomita; Masahiko ;   et al. | 2008-04-24 |
Film formation method and apparatus for semiconductor process Grant 7,354,858 - Takahashi , et al. April 8, 2 | 2008-04-08 |
Endoscope washing and disinfecting apparatus and endoscope conduit washing brush cassette App 20070226927 - Suzuki; Eiri ;   et al. | 2007-10-04 |
Film formation method and apparatus for semiconductor process Grant 7,229,917 - Umehara , et al. June 12, 2 | 2007-06-12 |
Film formation method and apparatus for semiconductor process App 20060128161 - Shibata; Tetsuya ;   et al. | 2006-06-15 |
Film formation method and apparatus for semiconductor process App 20050227459 - Takahashi, Yutaka ;   et al. | 2005-10-13 |
Film formation method and apparatus for semiconductor process App 20050176261 - Umehara, Takahito ;   et al. | 2005-08-11 |