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Method for manufacturing semiconductor device to form a via hole Grant 7,786,005 - Yamamoto , et al. August 31, 2 | 2010-08-31 |
Method of forming a high-k film on a semiconductor device Grant 7,718,532 - Tomimori , et al. May 18, 2 | 2010-05-18 |
Removing solution, cleaning method for semiconductor substrate, and process for production of semiconductor device Grant 7,592,266 - Aoki , et al. September 22, 2 | 2009-09-22 |
Process for making a semiconductor device having a roughened surface Grant 7,560,372 - Tomimori , et al. July 14, 2 | 2009-07-14 |
Method of forming a high-k film on a semiconductor device App 20080081445 - Tomimori; Hiroaki ;   et al. | 2008-04-03 |
Removing Solution, Cleaning Method For Semiconductor Substrate, And Process For Production Of Semiconductor Device App 20080066779 - AOKI; Hidemitsu ;   et al. | 2008-03-20 |
Cleaning solution for semiconductor substrate Grant 7,312,186 - Takashima , et al. December 25, 2 | 2007-12-25 |
Removing solution, cleaning method for semiconductor substrate, and process for production of semiconductor device Grant 7,312,160 - Aoki , et al. December 25, 2 | 2007-12-25 |
Manufacturing method of semiconductor device Grant 7,268,087 - Aoki , et al. September 11, 2 | 2007-09-11 |
Method of forming a high-k film on a semiconductor device Grant 7,192,835 - Tomimori , et al. March 20, 2 | 2007-03-20 |
Anticorrosive treating concentrate Grant 7,186,354 - Aoki , et al. March 6, 2 | 2007-03-06 |
Semiconductor device having a roughened surface Grant 7,170,172 - Tomimori , et al. January 30, 2 | 2007-01-30 |
Process or making a semiconductor device having a roughened surface App 20070015351 - Tomimori; Hiroaki ;   et al. | 2007-01-18 |
Washing liquid composition for semiconductor substrate Grant 7,138,362 - Abe , et al. November 21, 2 | 2006-11-21 |
Method for manufacturing semiconductor device App 20060214300 - Yamamoto; Kenichi ;   et al. | 2006-09-28 |
Post-CMP washing liquid composition Grant 7,087,562 - Abe , et al. August 8, 2 | 2006-08-08 |
Cleaning method, method for fabricating semiconductor device and cleaning solution Grant 6,998,352 - Aoki , et al. February 14, 2 | 2006-02-14 |
Stripping agent composition and method of stripping Grant 6,992,050 - Koita , et al. January 31, 2 | 2006-01-31 |
Semiconductor wafer surface and method of treating a semiconductor wafer surface Grant 6,897,150 - Aoki , et al. May 24, 2 | 2005-05-24 |
Semiconductor device fabricating method and treating liquid Grant 6,890,864 - Aoki , et al. May 10, 2 | 2005-05-10 |
Method of washing a semiconductor wafer Grant 6,864,187 - Tomimori , et al. March 8, 2 | 2005-03-08 |
Manufacturing method of semiconductor device App 20040266171 - Aoki, Hidemitsu ;   et al. | 2004-12-30 |
Method for manufacturing semiconductor device App 20040248350 - Tomimori, Hiroaki ;   et al. | 2004-12-09 |
Cleaning water for cleaning a wafer and method of cleaning a wafer Grant 6,797,648 - Aoki , et al. September 28, 2 | 2004-09-28 |
Manufacturing method of semicondcutor device Grant 6,787,480 - Aoki , et al. September 7, 2 | 2004-09-07 |
Cleaning solution for semiconductor substrate App 20040161933 - Takashima, Masayuki ;   et al. | 2004-08-19 |
Liquid composition for cleaning hydrophobic substrate and cleaning method therewith App 20040116315 - Aoki, Hidemitsu ;   et al. | 2004-06-17 |
Stripping agent composition and method of stripping App 20040029051 - Koita, Tatsuya ;   et al. | 2004-02-12 |
Post-CMP washing liquid composition App 20030216270 - Abe, Yumiko ;   et al. | 2003-11-20 |
Washing liquid composition for semiconductor substrate App 20030171233 - Abe, Yumiko ;   et al. | 2003-09-11 |
Removing solution, cleaning method for semiconductor substrate, and process for production of semiconductor device App 20030139045 - Aoki, Hidemitsu ;   et al. | 2003-07-24 |
Semiconductor device fabricating method and treating liquid App 20030134507 - Aoki, Hidemitsu ;   et al. | 2003-07-17 |
Method of forming a semiconductor device by simultaneously cleaning both sides of a wafer using different cleaning solutions Grant 6,592,677 - Tomimori , et al. July 15, 2 | 2003-07-15 |
Semiconductor device and method for producing the same App 20030111731 - Tomimori, Hiroaki ;   et al. | 2003-06-19 |
Wash water or immersion water used during semiconductor manufacturing App 20030094610 - Aoki, Hidemitsu ;   et al. | 2003-05-22 |
Cleaning method, method for fabricating semiconductor device and cleaning solution App 20030087524 - Aoki, Hidemitsu ;   et al. | 2003-05-08 |
Semiconductor device fabricating method and treating liquid App 20030027418 - Aoki, Hidemitsu ;   et al. | 2003-02-06 |
Method of washing a semiconductor wafer App 20030013310 - Tomimori, Hiroaki ;   et al. | 2003-01-16 |
Cleaning water for cleaning a wafer and method of cleaning a wafer App 20020189639 - Aoki, Hidemitsu ;   et al. | 2002-12-19 |
Manufacturing method of semiconductor device App 20020155702 - Aoki, Hidemitsu ;   et al. | 2002-10-24 |
Anticorrosive treating concentrate App 20010030315 - Aoki, Hidemitsu ;   et al. | 2001-10-18 |