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Apparatus and method for depositing silicon germanium films App 20070155138 - Tomasini; Pierre ;   et al. | 2007-07-05 |
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Selective deposition of silicon-containing films App 20060234504 - Bauer; Matthias ;   et al. | 2006-10-19 |
Epitaxial semiconductor deposition methods and structures Grant 7,115,521 - Brabant , et al. October 3, 2 | 2006-10-03 |
SiGe rectification process Grant 7,022,593 - Arena , et al. April 4, 2 | 2006-04-04 |
Epitaxial semiconductor deposition methods and structures App 20050092235 - Brabant, Paul D. ;   et al. | 2005-05-05 |
Epitaxial growth of relaxed silicon germanium layers App 20050051795 - Arena, Chantal ;   et al. | 2005-03-10 |
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