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Semiconductor crystal substrate, infrared detector, and method for producing semiconductor crystal substrate Grant 11,152,210 - Okumura , et al. October 19, 2 | 2021-10-19 |
Semiconductor crystal substrate, infrared detector, method for producing semiconductor crystal substrate, and method for producing infrared detector Grant 11,043,517 - Okumura , et al. June 22, 2 | 2021-06-22 |
Semiconductor Crystal Substrate, Infrared Detector, And Method For Producing Semiconductor Crystal Substrate App 20210143009 - Okumura; Shigekazu ;   et al. | 2021-05-13 |
Semiconductor crystal substrate, infrared detector, and method for producing semiconductor crystal substrate Grant 10,937,647 - Okumura , et al. March 2, 2 | 2021-03-02 |
Semiconductor Crystal Substrate, Infrared Detector, Method For Producing Semiconductor Crystal Substrate, And Method For Producing Infrared Detector App 20200295059 - Okumura; Shigekazu ;   et al. | 2020-09-17 |
Semiconductor crystal substrate, infrared detector, method for producing semiconductor crystal substrate, and method for producing infrared detector Grant 10,720,455 - Okumura , et al. | 2020-07-21 |
Semiconductor Crystal Substrate, Device, And Method For Manufacturing Semiconductor Crystal Substrate App 20190319143 - Okumura; Shigekazu ;   et al. | 2019-10-17 |
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Semiconductor Crystal Substrate, Infrared Detector, Method For Producing Semiconductor Crystal Substrate, And Method For Producing Infrared Detector App 20170358613 - Okumura; Shigekazu ;   et al. | 2017-12-14 |
Semiconductor crystal substrate, manufacturing method of semiconductor crystal substrate, manufacturing method of semiconductor device, power unit, and amplifier Grant 9,379,230 - Tomabechi June 28, 2 | 2016-06-28 |
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Manufacturing method of semiconductor device, semiconductor device, and semiconductor crystal growth substrate Grant 9,136,344 - Tomabechi September 15, 2 | 2015-09-15 |
Semiconductor Device And Manufacturing Method Thereof App 20150090957 - TOMABECHI; Shuichi ;   et al. | 2015-04-02 |
Semiconductor optical integrated device and method for fabricating the same Grant 8,987,117 - Okumura , et al. March 24, 2 | 2015-03-24 |
Semiconductor device and fabrication method Grant 8,962,409 - Tomabechi February 24, 2 | 2015-02-24 |
Method Of Manufacturing Semiconductor Crystal Substrate, Method Of Manufacturing Semiconductor Apparatus, Semiconductor Crystal Substrate, And Semiconductor Apparatus App 20140091317 - TOMABECHI; Shuichi ;   et al. | 2014-04-03 |
Semiconductor Optical Integrated Device And Method For Fabricating The Same App 20130330867 - OKUMURA; Shigekazu ;   et al. | 2013-12-12 |
Compound semiconductor device and method for manufacturing the same Grant 8,592,823 - Kotani , et al. November 26, 2 | 2013-11-26 |
Semiconductor optical integrated device and method for fabricating the same Grant 8,565,279 - Okumura , et al. October 22, 2 | 2013-10-22 |
Manufacturing Method Of Semiconductor Device, Semiconductor Device, And Semiconductor Crystal Growth Substrate App 20130248932 - TOMABECHI; Shuichi | 2013-09-26 |
Semiconductor Device And Fabrication Method App 20130075788 - TOMABECHI; Shuichi | 2013-03-28 |
Semiconductor Crystal Substrate, Manufacturing Method Of Semiconductor Crystal Substrate, Manufacturing Method Of Semiconductor Device, Power Unit, And Amplifier App 20130069072 - TOMABECHI; Shuichi | 2013-03-21 |
Compound Semiconductor Device And Method For Manufacturing The Same App 20130043489 - Kotani; Junji ;   et al. | 2013-02-21 |
Semiconductor Optical Integrated Device And Method For Fabricating The Same App 20130010824 - OKUMURA; Shigekazu ;   et al. | 2013-01-10 |
Optical semiconductor device and fabrication method therefor Grant 7,598,106 - Tomabechi , et al. October 6, 2 | 2009-10-06 |
Optical semiconductor device and fabrication method therefor App 20060145276 - Tomabechi; Shuichi ;   et al. | 2006-07-06 |