loadpatents
Patent applications and USPTO patent grants for Tollner; Martin Ernst.The latest application filed is for "vacuum pump".
Patent | Date |
---|---|
Vacuum pump Grant 9,759,256 - Brewster , et al. September 12, 2 | 2017-09-12 |
Vacuum pump Grant 9,309,892 - Tollner April 12, 2 | 2016-04-12 |
Vacuum Pump App 20140369831 - Brewster; Barrie Dudley ;   et al. | 2014-12-18 |
Vacuum pump Grant 8,851,829 - Brewster , et al. October 7, 2 | 2014-10-07 |
Vacuum pump Grant 8,662,841 - Tollner , et al. March 4, 2 | 2014-03-04 |
Vacuum Pump App 20120201696 - Tollner; Martin Ernst | 2012-08-09 |
Pressure control method Grant 8,070,459 - Tollner December 6, 2 | 2011-12-06 |
Apparatus for controlling the pressure in a process chamber and method of operating same Grant 7,814,922 - Tollner October 19, 2 | 2010-10-19 |
Vacuum Pump App 20100135784 - Brewster; Barrie ;   et al. | 2010-06-03 |
Molecular drag pumping mechanism App 20100104428 - Tollner; Martin Ernst ;   et al. | 2010-04-29 |
Vacuum Pump App 20100068054 - Tollner; Martin Ernst ;   et al. | 2010-03-18 |
Pressure control method App 20070163330 - Tollner; Martin Ernst | 2007-07-19 |
Apparatus for controlling the pressure in a process chamber and method of operating same App 20050217732 - Tollner, Martin Ernst | 2005-10-06 |
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