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Patent applications and USPTO patent grants for Tolles; Robert.The latest application filed is for "bonding of thin lamina".
Patent | Date |
---|---|
Bonding Of Thin Lamina App 20140048201 - Subbaraman; Venkateswaran ;   et al. | 2014-02-20 |
Apparatus for rapid filling of a processing volume Grant 7,950,407 - Mimken , et al. May 31, 2 | 2011-05-31 |
Apparatus For Rapid Filling Of A Processing Volume App 20080185018 - MIMKEN; VICTOR BURTON ;   et al. | 2008-08-07 |
Megasonic wafer cleaning tank with reflector for improved wafer edge cleaning App 20040154639 - Tolles, Robert ;   et al. | 2004-08-12 |
Substrate scrubbing apparatus having stationary brush member in contact with edge bevel of rotating substrate App 20040049870 - Tolles, Robert ;   et al. | 2004-03-18 |
Groove cleaning device for chemical-mechanical polishing Grant 6,371,836 - Brown , et al. April 16, 2 | 2002-04-16 |
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