TOKYO ELECTRONIC LIMITED

Patent Applications and Registrations

Patent applications and USPTO patent grants for TOKYO ELECTRONIC LIMITED.The latest application filed is for "silicon oxide film forming method and silicon oxide film forming apparatus".

Company Profile

1.6.4

TOKYO ELECTRONIC LIMITED - Tokyo JP
Tokyo Electronic Limited - Tokyo-To JP
Tokyo Electronic Limited -

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Liquid delivery method, liquid delivery system, and computer-readable storage medium Grant 10,400,760 - Sasa , et al. Sep	2019-09-03
Silicon Oxide Film Forming Method And Silicon Oxide Film Forming Apparatus App 20140295675 - IKEUCHI; Toshiyuki ; et al.	2014-10-02
Developing device and developing method Grant 7,918,182 - Yamamoto , et al. April 5, 2	2011-04-05
Heat treatment apparatus using a lamp for rapidly and uniformly heating a wafer Grant 7,629,557 - Shimizu December 8, 2	2009-12-08
Measurement system cluster App 20060274306 - Hasan; Talat Fatima	2006-12-07
Substrate mounting table, substrate processing apparatus and substrate processing method App 20060207725 - Oohashi; Kaoru ; et al.	2006-09-21
Prober and probe testing method for temperature-controlling object to be tested Grant 6,992,500 - Sugiyama , et al. January 31, 2	2006-01-31
Precursor deposition using ultrasonic nebulizer Grant 6,471,782 - Fang , et al. October 29, 2	2002-10-29
Positioning apparatus and process system having the same Grant 5,740,034 - Saeki April 14, 1	1998-04-14

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