Tokyo Electron Saga Limited
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tokyo Electron Saga Limited.The latest application filed is for "washing apparatus, and washing method".
- Tokyo Electron Saga Limited - Tosu JP
| Patent | Date |
|---|---|
| Washing apparatus, and washing method Grant 5,887,604 - Murakami , et al. March 30, 1 | 1999-03-30 |
| Washing apparatus, and washing method Grant 5,671,764 - Murakami , et al. September 30, 1 | 1997-09-30 |
| Washing apparatus, and washing method Grant 5,488,964 - Murakami , et al. February 6, 1 | 1996-02-06 |
| Spindrier Grant 5,339,539 - Shiraishi , et al. August 23, 1 | 1994-08-23 |
| Processing vessel for a wafer washing system Grant 5,327,921 - Mokuo , et al. July 12, 1 | 1994-07-12 |
| Washing system Grant 5,301,700 - Kamikawa , et al. April 12, 1 | 1994-04-12 |
| Cleaning device Grant 5,299,584 - Miyazaki , et al. April 5, 1 | 1994-04-05 |
| Substrate detector with light emitting and receiving elements arranged in a staggered fashion Grant 5,266,812 - Mokuo November 30, 1 | 1993-11-30 |
| Transfer apparatus Grant 5,253,663 - Tanaka , et al. October 19, 1 | 1993-10-19 |
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