Tokyo Electron AT Limited and Japan Science and Technology Corporation
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tokyo Electron AT Limited and Japan Science and Technology Corporation.The latest application filed is for "plasma processing apparatus and plasma processing method".
- Tokyo Electron AT Limited and Japan Science and Technology Corporation - JP JP
- Tokyo Electron AT Limited and Japan Science and Technology Corporation -
| Patent | Date |
|---|---|
| Method of plasma processing Grant 7,183,219 - Hama , et al. February 27, 2 | 2007-02-27 |
| Plasma processing apparatus and plasma processing method App 20050172904 - Koshimizu, Chishio ; et al. | 2005-08-11 |
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