Tokuda; Yukio
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tokuda; Yukio.The latest application filed is for "microscope".
- Tokuda; Yukio - Kawasaki-shi JP
- Tokuda; Yukio - Kawasaki JP
| Patent | Date |
|---|---|
| Microscope App 20130141562 - Yano; Masashi ; et al. | 2013-06-06 |
| Image Acquisition Apparatus And Image Acquisition System App 20130033822 - Nishikawara; Tomofumi ; et al. | 2013-02-07 |
| Imaging Apparatus And Control Method Therefor App 20120314050 - Nawata; Ryo ; et al. | 2012-12-13 |
| Exposure apparatus and device manufacturing method Grant 7,463,334 - Tokuda December 9, 2 | 2008-12-09 |
| Exposure Apparatus And Device Manufacturing Method App 20080084547 - Tokuda; Yukio | 2008-04-10 |
| Driving apparatus and exposure apparatus Grant 6,493,062 - Tokuda , et al. December 10, 2 | 2002-12-10 |
| Driving Apparatus And Exposure Apparatus App 20020054280 - TOKUDA, YUKIO ; et al. | 2002-05-09 |
| Stage system and exposure apparatus, and device manufacturing method using the same Grant 6,320,645 - Inoue , et al. November 20, 2 | 2001-11-20 |
| Stage system for exposure apparatus Grant 6,320,649 - Miyajima , et al. November 20, 2 | 2001-11-20 |
| Projection exposure apparatus containing an enclosed hollow structure Grant 5,691,806 - Tokuda , et al. November 25, 1 | 1997-11-25 |
| Method and apparatus for processing a plate-like workpiece Grant 4,775,877 - Kosugi , et al. October 4, 1 | 1988-10-04 |
| Mask storing mechanism Grant 4,757,355 - Iizuka , et al. July 12, 1 | 1988-07-12 |
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