Tokiguchi, Katsumi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tokiguchi, Katsumi.The latest application filed is for "wafer processing method and ion implantation apparatus".
- Tokiguchi, Katsumi - Mito JP
- Tokiguchi, Katsumi - Mito-shi JP
- Tokiguchi; Katsumi - Hitachi JP
- Tokiguchi; Katsumi - Machida JP
- Tokiguchi; Katsumi - Hachioji JP
| Patent | Date |
|---|---|
| Wafer processing method and ion implantation apparatus App 20030211711 - Seki, Hirofumi ; et al. | 2003-11-13 |
| Ion implantation equipment and implantation method thereof App 20010013578 - Seki, Takayoshi ; et al. | 2001-08-16 |
| Ion source and an ion implanting apparatus using it Grant 5,925,886 - Seki , et al. July 20, 1 | 1999-07-20 |
| Ion implanting apparatus Grant 5,349,196 - Amemiya , et al. September 20, 1 | 1994-09-20 |
| External resonance circuit type radio frequency quadrupole accelerator Grant 5,086,256 - Tokiguchi , et al. February 4, 1 | 1992-02-04 |
| Microwave ion source Grant 5,053,678 - Koike , et al. October 1, 1 | 1991-10-01 |
| Charged particle accelerator using quadrupole electrodes Grant 4,801,847 - Sakudo , et al. January 31, 1 | 1989-01-31 |
| Ion source Grant 4,658,143 - Tokiguchi , et al. April 14, 1 | 1987-04-14 |
| Ion implanter Grant 4,633,138 - Tokiguchi , et al. December 30, 1 | 1986-12-30 |
| Microwave plasma source having improved switching operation from plasma ignition phase to normal ion extraction phase Grant 4,543,465 - Sakudo , et al. September 24, 1 | 1985-09-24 |
| Non-mass-analyzed ion implantation Grant 4,533,831 - Itoh , et al. August 6, 1 | 1985-08-06 |
| Microwave discharge ion source Grant 4,409,520 - Koike , et al. October 11, 1 | 1983-10-11 |
| Microwave plasma ion source Grant 4,393,333 - Sakudo , et al. July 12, 1 | 1983-07-12 |
| Microwave plasma ion source Grant 4,316,090 - Sakudo , et al. February 16, 1 | 1982-02-16 |
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