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Patent applications and USPTO patent grants for TOJO; Toshihiro.The latest application filed is for "inductively-coupled plasma processing apparatus".
Patent | Date |
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Inductively-Coupled Plasma Processing Apparatus App 20200227236 - SAITO; Hitoshi ;   et al. | 2020-07-16 |
Inductively coupled plasma processing apparatus Grant 9,543,121 - Sasaki , et al. January 10, 2 | 2017-01-10 |
Antenna Unit For Inductively Coupled Plasma, Inductively Coupled Plasma Processing Apparatus And Method Therefor App 20130200043 - TOJO; Toshihiro ;   et al. | 2013-08-08 |
Inductively Coupled Plasma Processing Apparatus App 20120267051 - SASAKI; Kazuo ;   et al. | 2012-10-25 |
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