Tojo; Toru
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tojo; Toru.The latest application filed is for "pattern inspection apparatus".
Company Profile
0.33.18
- Tojo; Toru - Kanagawa-Ken JP
- Tojo; Toru - Naka-gun JP
- Tojo; Toru - Tokyo JP
- Tojo; Toru - Ninomiya-machi JP
- Tojo; Toru - Kanagawa JP
- Tojo; Toru - Ninomiya JP
- Tojo; Toru - Yamato JP
Patent Activity
| Patent | Date |
|---|---|
| Pattern inspecting method Grant 7,590,277 - Oaki , et al. September 15, 2 | 2009-09-15 |
| Pattern inspection apparatus Grant 7,551,767 - Tsuchiya , et al. June 23, 2 | 2009-06-23 |
| Pattern inspection apparatus Grant 7,526,119 - Isomura , et al. April 28, 2 | 2009-04-28 |
| Pattern inspection method Grant 7,522,276 - Tojo , et al. April 21, 2 | 2009-04-21 |
| Defect inspecting apparatus Grant 7,508,526 - Ogawa , et al. March 24, 2 | 2009-03-24 |
| Pattern inspection apparatus Grant 7,421,109 - Tsuchiya , et al. September 2, 2 | 2008-09-02 |
| Pattern inspection apparatus Grant 7,415,149 - Tsuchiya , et al. August 19, 2 | 2008-08-19 |
| Pattern Inspection Apparatus App 20080166054 - Tsuchiya; Hideo ; et al. | 2008-07-10 |
| Pattern Inspection Method App 20080151230 - Tojo; Toru ; et al. | 2008-06-26 |
| Sample Analyzing Apparatus App 20080121799 - Kanno; Chohei ; et al. | 2008-05-29 |
| Pattern inspection apparatus Grant 7,372,560 - Tojo , et al. May 13, 2 | 2008-05-13 |
| Defect inspection apparatus and defect inspection method Grant 7,359,546 - Sugihara , et al. April 15, 2 | 2008-04-15 |
| Defect inspecting apparatus and defect inspection method Grant 7,345,755 - Ogawa , et al. March 18, 2 | 2008-03-18 |
| Inspection apparatus having two sensors, method for inspecting an object, and a method for manufacturing a photolithography mask App 20080030719 - Inoue; Hiromu ; et al. | 2008-02-07 |
| Inspection apparatus having two sensors, method for inspecting an object, and a method for manufacturing a photolithography mask Grant 7,304,730 - Inoue , et al. December 4, 2 | 2007-12-04 |
| Pattern Inspection Apparatus App 20070127806 - Tsuchiya; Hideo ; et al. | 2007-06-07 |
| Pattern defect inspection method and apparatus App 20060239535 - Takada; Akira ; et al. | 2006-10-26 |
| Automatic focusing apparatus Grant 7,123,345 - Sugihara , et al. October 17, 2 | 2006-10-17 |
| Alignment method Grant 7,075,621 - Mitsui , et al. July 11, 2 | 2006-07-11 |
| Defect inspecting apparatus and defect inspection method App 20060087649 - Ogawa; Riki ; et al. | 2006-04-27 |
| Defect inspecting apparatus App 20060082782 - Ogawa; Riki ; et al. | 2006-04-20 |
| Pattern inspecting method App 20060018530 - Oaki; Junji ; et al. | 2006-01-26 |
| Defect inspection apparatus and defect inspection method App 20050232477 - Sugihara, Shinji ; et al. | 2005-10-20 |
| Alignment method App 20050128451 - Mitsui, Soichiro ; et al. | 2005-06-16 |
| Alignment apparatus for substrates Grant 6,901,314 - Mitsui , et al. May 31, 2 | 2005-05-31 |
| Automatic focusing apparatus App 20050052634 - Sugihara, Shinji ; et al. | 2005-03-10 |
| Inspection apparatus having two sensors, method for inspecting an object, and a method for manufacturing a photolithography mask App 20050002020 - Inoue, Hiromu ; et al. | 2005-01-06 |
| Pattern inspection apparatus App 20040252296 - Tojo, Toru ; et al. | 2004-12-16 |
| Pattern inspection apparatus App 20040126003 - Isomura, Ikunao ; et al. | 2004-07-01 |
| Pattern inspection apparatus App 20040105578 - Tsuchiya, Hideo ; et al. | 2004-06-03 |
| Temperature measuring method in pattern drawing apparatus Grant 6,676,289 - Hirano , et al. January 13, 2 | 2004-01-13 |
| Alignment apparatus for substrates App 20030185664 - Mitsui, Soichiro ; et al. | 2003-10-02 |
| Temperature measuring method in pattern drawing apparatus App 20020027945 - Hirano, Ryoichi ; et al. | 2002-03-07 |
| Sample transferring method and sample transfer supporting apparatus Grant 6,281,510 - Yoshitake , et al. August 28, 2 | 2001-08-28 |
| Position measuring apparatus Grant 6,080,990 - Watanabe , et al. June 27, 2 | 2000-06-27 |
| Charged particle beam exposure system Grant 5,912,468 - Hirano , et al. June 15, 1 | 1999-06-15 |
| Method of inspecting a pattern formed on a sample for a defect, and an apparatus thereof Grant 5,744,381 - Tabata , et al. April 28, 1 | 1998-04-28 |
| Pattern evaluation apparatus and a method of pattern evaluation Grant 5,602,645 - Tabata , et al. February 11, 1 | 1997-02-11 |
| Method and system for generating a bit pattern Grant 5,404,410 - Tojo , et al. April 4, 1 | 1995-04-04 |
| Method and an apparatus for aligning first and second objects with each other Grant 4,984,890 - Tojo , et al. January 15, 1 | 1991-01-15 |
| Method and an apparatus for aligning first and second objects with each other Grant 4,902,133 - Tojo , et al. February 20, 1 | 1990-02-20 |
| Method for aligning first and second objects relative to each other and apparatus for practicing this method Grant 4,811,062 - Tabata , et al. March 7, 1 | 1989-03-07 |
| Position detector by vibrating a light beam for averaging the reflected light Grant 4,698,513 - Tojo , et al. October 6, 1 | 1987-10-06 |
| Piezoelectric precise rotation mechanism for slightly rotating an object Grant 4,578,607 - Tojo , et al. March 25, 1 | 1986-03-25 |
| Electron beam pattern transfer system having an autofocusing mechanism Grant 4,572,956 - Tojo , et al. February 25, 1 | 1986-02-25 |
| IC Tester using an electron beam capable of easily setting a probe card unit for wafers & packaged IC's to be tested Grant 4,532,423 - Tojo , et al. July 30, 1 | 1985-07-30 |
| Electrostatic chuck plate Grant 4,480,284 - Tojo , et al. October 30, 1 | 1984-10-30 |
| Electron beam pattern transfer device and method for aligning mask and semiconductor wafer Grant 4,469,949 - Mori , et al. September 4, 1 | 1984-09-04 |
| Precision rotation mechanism Grant 4,455,501 - Tojo , et al. June 19, 1 | 1984-06-19 |
| Cassette retaining device of electron beam apparatus Grant 4,408,126 - Tojo , et al. October 4, 1 | 1983-10-04 |
| Linear bearing apparatus Grant 4,262,974 - Tojo , et al. April 21, 1 | 1981-04-21 |
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